JPH0510903Y2 - - Google Patents
Info
- Publication number
- JPH0510903Y2 JPH0510903Y2 JP1988130961U JP13096188U JPH0510903Y2 JP H0510903 Y2 JPH0510903 Y2 JP H0510903Y2 JP 1988130961 U JP1988130961 U JP 1988130961U JP 13096188 U JP13096188 U JP 13096188U JP H0510903 Y2 JPH0510903 Y2 JP H0510903Y2
- Authority
- JP
- Japan
- Prior art keywords
- mounting
- mounting frame
- equipment
- opening
- steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 34
- 239000010959 steel Substances 0.000 claims description 34
- 239000000463 material Substances 0.000 description 7
- 238000005192 partition Methods 0.000 description 7
- 210000000744 eyelid Anatomy 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
【考案の詳細な説明】
[産業上の利用分野]
本考案は、全面層流型クリーンルームに於い
て、フイルターの外に付設される照明器具、火災
感知器、前記電気機器用のケーブル、パーテーシ
ヨン等の取付けが容易で、且つレイアウトの変更
によつて前記各機器を取外しても、新しいレイア
ウトによる各機器の取付けもできるフイルターの
取付けフレームに関するものである。[Detailed description of the invention] [Industrial application field] The invention is applicable to lighting equipment, fire detectors, cables for the electrical equipment, and partitions installed outside the filter in a laminar flow clean room. The present invention relates to a filter mounting frame that is easy to install, and allows for the installation of each device in a new layout even if the above-mentioned devices are removed due to a layout change.
[考案の背景]
近年半導体産業を中心として高性能なクリーン
ルームが多く施工されている。そして、これから
のクリーンルームは粒子管理の高度化と共に、重
要なのは応用性、施工性および経済性が問題とな
つてくる。更に、これを具体的に言えば、生産機
器の進歩やレイアウトの変更等により頻繁にクリ
ーンルーム内の模様替えをする時、フイルターの
取付けフレームは天井から吊設固定されているた
め、これを取替えることなく、そのまま使用して
照明器具、火災感知器、前記電気機器用のケーブ
ル、パーテーシヨン等の再び取付けることができ
るようにしたフイルターの取付けフレームが応用
性、施工性および経済性の面から要求されてい
る。[Background of the idea] In recent years, many high-performance clean rooms have been constructed, mainly in the semiconductor industry. As particle management becomes more sophisticated in future clean rooms, the important issues will be applicability, ease of construction, and economy. Furthermore, to put this more specifically, when the interior of a clean room is frequently rearranged due to advances in production equipment or layout changes, the filter mounting frame is suspended and fixed from the ceiling, so there is no need to replace it. A filter mounting frame that can be used as is and reattached to lighting equipment, fire detectors, cables for the above-mentioned electrical equipment, partitions, etc. is required from the viewpoints of applicability, workability, and economy. There is.
[従来の技術および考案が解決しようとする課
題]
従来の全面層流型クリーンルームに於けるフイ
ルターの取付けフレームは、方形型鋼または凹型
鋼を使用し、主としてフイルターのみの設置に主
眼が置かれており、電灯や安定器等の付属機器は
単にフレーム下面に取付けたり、あるいは付属機
器用のスペースを新たに設けて、このスペースに
付属機器を取付けている。[Problems to be solved by conventional technology and ideas] Conventional filter mounting frames in full-surface laminar flow clean rooms use rectangular steel or concave steel, and are mainly focused on installing only filters. Accessory equipment such as electric lights and ballasts are simply attached to the underside of the frame, or a new space is created for the accessory equipment and the accessory equipment is installed in this space.
例えば、第4図に示すものは、方形型鋼21を
使用した取付けフレーム22を天井から吊りボル
ト23で吊設固定し、且つ取付けフレーム22上
にフイルター24を載置固定したものである。そ
して、この方形型鋼21を使用した取付けフレー
ム22下面に電灯25を取付けるには、図のよう
に取付けフレーム22下面に安定器等の付属機器
を収納したケーシング26を取付けると共に、該
ケーシング26の下面に電灯25を取付けてい
た。しかしながら、この第4図のように電灯25
を取付けた場合、これを側面から見ると第5図の
ように接続ケーブル27が露出して見苦しいとい
う問題点があり、またレイアウト変更によつて前
記ケーシング26を取去つて移設すると、ケーシ
ング26の取付けビス孔等がそのまま残つて、更
に見苦しいという問題点があつた。 For example, in the one shown in FIG. 4, a mounting frame 22 using rectangular steel 21 is suspended and fixed from the ceiling with hanging bolts 23, and a filter 24 is mounted and fixed on the mounting frame 22. In order to mount the electric light 25 on the lower surface of the mounting frame 22 using this rectangular steel 21, as shown in the figure, a casing 26 containing attached equipment such as a ballast is mounted on the lower surface of the mounting frame 22, and the lower surface of the casing 26 Electric light 25 was installed. However, as shown in Fig. 4, the electric light 25
When the casing 26 is installed, there is a problem that the connection cable 27 is exposed when viewed from the side as shown in FIG. Another problem was that the mounting screw holes remained as they were, making them unsightly.
また、第6図に示すものは前記方形型鋼21よ
り巾の広い凹型鋼28を所要個所に使用し、その
他は前記第4図と同じ方形型鋼21を使用して形
成された取付けフレーム22aの前記凹型鋼28
内部に安定器等の付属機器29を収納して取付
け、更に前記凹型鋼28の下面を蓋板30で遮蔽
して、該蓋板30の下面に電灯25を取付けたも
のである。 In addition, the one shown in FIG. 6 uses a concave steel 28 wider than the square steel 21 in the required places, and the mounting frame 22a is formed using the same square steel 21 as in FIG. 4 in other parts. Concave steel 28
Ancillary equipment 29 such as a ballast is housed and attached inside, the lower surface of the recessed steel 28 is shielded with a cover plate 30, and an electric light 25 is attached to the lower surface of the cover plate 30.
しかしながら、この第6図のように付属機器2
9を収納して取付けた場合、市販の付属機器29
をそのまま取付けフレーム22aの凹型鋼28内
に収納でき、更に接続ケーブル等も内部に収納で
きるのでよいが、レイアウト変更時に付属機器2
9を開口部のない方形型鋼21に移設することが
できないという問題点があつた。 However, as shown in Fig. 6, the attached equipment 2
If 9 is stored and installed, commercially available accessory equipment 29
can be stored as is in the recessed steel 28 of the mounting frame 22a, and connection cables etc. can also be stored inside, but when changing the layout, the attached equipment 2
9 could not be transferred to the rectangular steel 21 without an opening.
更に、第7図に示すものは前記第4図の場合と
同様に、方形型鋼21を使用した取付けフレーム
22bの下面に接続ケーブル27の収納スペース
を有する取付用凹型鋼31を取付け、且つ該取付
用凹型鋼31の下面に付属機器を収納したケーシ
ング26を取付けると共に、該ケーシング26の
下面に電灯25を取付けていた。 Furthermore, in the case shown in FIG. 7, as in the case of FIG. 4, a recessed steel for mounting 31 having a storage space for the connection cable 27 is attached to the lower surface of the mounting frame 22b using the rectangular steel 21, and the mounting A casing 26 housing accessory equipment was attached to the lower surface of the recessed steel 31, and an electric light 25 was attached to the lower surface of the casing 26.
しかしながら、この第7図のようにケーシング
26を取付けると、接続ケーブル27が露出せ
ず、見苦しさはないが、取付けフレーム22bの
高さが高くなるため、フイルター24の取付けに
当つて不便であり、またレイアウト変更によつて
ケーシング26を取去つて移設して、取付用凹型
鋼31を撤去すると、取付けフレーム22bの下
面に前記取付用凹型鋼31を取付けたビス孔がそ
のまま残り見苦しいという問題点があつた。 However, when the casing 26 is attached as shown in FIG. 7, the connection cable 27 is not exposed and is not unsightly, but the height of the attachment frame 22b increases, which is inconvenient when attaching the filter 24. Furthermore, when the casing 26 is removed and relocated due to a layout change and the recessed steel 31 for mounting is removed, the screw hole in which the recessed steel 31 was attached remains on the lower surface of the mounting frame 22b and is unsightly. It was hot.
更に、前記安定器等の付属機器以外の機器、例
えば煙や熱を関知する火災感知器やスピーカーや
TVカメラは、接続ケーブルが必要であるため、
第6図に示す凹型鋼28を使用した取付けフレー
ム22aの凹型鋼28部分に取付けられていた。 Furthermore, equipment other than the above-mentioned ballasts and other accessory equipment, such as fire detectors and speakers that detect smoke and heat,
TV cameras require connection cables, so
It was attached to a concave steel 28 portion of a mounting frame 22a using concave steel 28 shown in FIG.
従つて、レイアウト変更後方形型鋼21の部分
に前記火災感知器やスピーカーやTVカメラを移
設すると、接続ケーブルが露出してしまい見苦し
いという問題点があつた。 Therefore, when the fire detector, speaker, and TV camera were relocated to the rear section of the modified steel section 21, the connection cables were exposed, resulting in an unsightly appearance.
また、スプリンクラーを設置する場合、従来は
前記第6図に示す凹型鋼28を使用した取付けフ
レーム22aの凹型鋼28部分に取付けられてい
た。従つて、レイアウト変更後は方形型鋼21の
部分に前記スプリンクラーを移設することができ
ず、移設する場合は第6図に示す凹型鋼28を新
たに施工してからスプリンクラーを取付けねばな
らないという問題点があつた。 Furthermore, when installing a sprinkler, conventionally it has been attached to the concave steel 28 portion of the mounting frame 22a using the concave steel 28 shown in FIG. 6. Therefore, after changing the layout, it is not possible to relocate the sprinkler to the rectangular steel 21, and if it is relocated, the concave steel 28 shown in FIG. 6 must be newly installed before installing the sprinkler. It was hot.
また、更にパーテーシヨンやアイリツドは方形
型鋼の下場に直かに取付けるため、荷重的にも限
界があり、このパーテーシヨンやアイリツドの移
設後はこれらを取付けていたビス孔が露出してし
まい見苦しいという問題点があつた。 Furthermore, since partitions and eyelids are installed directly under the rectangular steel, there is a limit in terms of load, and after the partitions and eyelids are relocated, the screw holes that were used to install them will be exposed, making it unsightly. There was a problem.
従つて、前記各従来の取付けフレームには、フ
イルター以外の機器、例えば照明器具や火災感知
器、パーテーシヨン等を同時に取付けることは困
難であり、大巾なレイアウト変更時に於いてはフ
イルターの取付けフレームを全面撤去して新たに
再施工しなければならず、時間的、コスト的な損
害が非常に大きいという問題点があつた。 Therefore, it is difficult to simultaneously install devices other than the filter, such as lighting equipment, fire detectors, partitions, etc., on each of the conventional mounting frames, and when making a major layout change, it is difficult to install devices other than the filter at the same time. The problem was that the entire structure had to be completely removed and a new one had to be rebuilt, resulting in significant time and cost damage.
本考案は上記問題点を解決することを目的とす
る全面層流型クリーンルームに於けるフイルター
の取付けフレームを提供しようとするものであ
る。 The present invention aims to solve the above-mentioned problems by providing a frame for mounting a filter in a laminar flow clean room.
[課題を解決するための手段]
本考案は、電灯およびその他の機器が充分に取
付けられる巾を有する上板の両側端より下方へ折
曲片を垂設し、且つ該折曲壁の内側下面に夫々対
向して取付片を突設して下端に開口部を設けると
共に、該開口部上面に空〓部を設けて形成された
型鋼材を夫々枠状に接合固定して取付けフレーム
を形成する一方、電灯およびその他の機器の取付
け位置以外の開口部を、断面凸型をした化粧パネ
ル板の段部を前記取付片に当接固定して被覆する
という手段を採用することにより、上記問題点を
解決した。[Means for Solving the Problems] The present invention provides a structure in which bent pieces are hung downward from both ends of an upper plate having a width sufficient to attach electric lights and other equipment; A mounting frame is formed by protruding mounting pieces facing each other, providing an opening at the lower end, and forming a hollow part on the upper surface of the opening, and joining and fixing the shaped steel members into a frame shape. On the other hand, by adopting a method of covering the openings other than the mounting positions of electric lights and other equipment by fixing the step part of the decorative panel board having a convex cross section to the mounting piece, the above-mentioned problem can be solved. solved.
[作用]
上記構成より成る本考案によれば、取付けフレ
ームを構成する型鋼材が、電灯やその他の機器を
取付けるに充分な巾を有し、且つ下面に開口部を
備えたもので形成されているので、レイアウトの
変更によつても既設の取付けフレームはそのまま
使用され、更に露出部分は化粧パネル板によつて
遮蔽され、また化粧パネル板によつて遮蔽される
ことによつて、取付けフレームの下面は突起物が
全くない平板状に保持される。[Function] According to the present invention having the above-mentioned configuration, the shaped steel material constituting the mounting frame is formed of a material having a width sufficient for mounting electric lights and other equipment, and having an opening on the lower surface. Therefore, even if the layout is changed, the existing mounting frame can be used as is, and the exposed part is shielded by the decorative panel board, and by being shielded by the decorative panel board, the mounting frame can be The lower surface is held flat without any protrusions.
[実施例]
本考案の実施の一例を図に就いて詳細に説明す
るに、全面層流型クリーンルームに使用されるフ
イルター1の取付けフレーム2を構成する型鋼材
3は、取付け固定される電灯や安定器等の付属機
器および火災感知器、スプリンクラー等のその他
の機器が充分に取付けられる巾を有する上板4の
両側端より下方に夫々直角に折曲して折曲片5を
垂設し、且つ折曲片5の内側下面に夫々対向し
て、後述の化粧パネル板14および電灯10の保
持プレート13等を、下方よりビス等により固定
するための取付片6を突設して下端に開口部7を
設けると共に、該開口部7上面に空〓部8を設け
て形成された鋼材を使用する。[Example] An example of the implementation of the present invention will be described in detail with reference to the drawings. The steel molding material 3 constituting the mounting frame 2 of the filter 1 used in a full-surface laminar flow clean room is used for the electric light or the like to be installed and fixed. Bent pieces 5 are vertically bent at right angles downward from both ends of the top plate 4, which has a width sufficient to mount accessory equipment such as ballasts and other equipment such as fire detectors and sprinklers; In addition, mounting pieces 6 are provided protruding from the lower side of the bent pieces 5, facing each other on the inner lower surface thereof, for fixing a decorative panel plate 14, a holding plate 13 of the electric light 10, etc., which will be described later, from below with screws, etc., and openings are provided at the lower ends thereof. A steel material is used which is formed by providing a portion 7 and a hollow portion 8 on the upper surface of the opening portion 7.
そして、前記型鋼材3を夫々枠状に接合固定し
てフイルター1の取付けフレーム2を形成して、
該取付けフレーム2を吊りボルト9を介して天井
に吊設固定し、取付けフレーム2上にフイルター
1を載置固定すると共に、例えば電灯10を取付
ける場合、空〓部8内に接続ケーブル11や安定
器等の付属機器12を配設し、電灯10の保持プ
レート13を両側の取付片6に当接して図示して
いないビス等により固定し、第2図のように電灯
10を保持プレート13に装着した個所以外の前
記開口部7には、すべて化粧パネル板14を取付
片6に下方より当接した図示していないビス等に
より固定し、接続ケーブル11およびその他の開
口部7が露出しないようにするのである。 Then, the shaped steel materials 3 are joined and fixed in a frame shape to form the mounting frame 2 of the filter 1,
The mounting frame 2 is suspended and fixed to the ceiling via hanging bolts 9, and the filter 1 is placed and fixed on the mounting frame 2. For example, when installing a light 10, a connecting cable 11 or a stabilizer is placed inside the empty space 8. Attachment equipment 12 such as a lamp is arranged, and the holding plate 13 of the electric light 10 is brought into contact with the mounting pieces 6 on both sides and fixed with screws (not shown), and the electric lamp 10 is attached to the holding plate 13 as shown in FIG. The decorative panel board 14 is fixed to all of the openings 7 other than the places where it is installed using screws (not shown) that abut the mounting pieces 6 from below, so that the connecting cable 11 and other openings 7 are not exposed. It is to make it.
前記化粧パネル板14は、型鋼材3の開口部7
を下方より被覆するために使用するもので、好ま
しくは前記開口部7を被覆したとき底面が折曲片
5の下面と面一になるようにした断面凸型をした
化粧パネル板14を使用することが推奨され、化
粧パネル板14の中央突面15より低位に位置す
る両側の段部16の上面を前記取付片6の下面に
当接して、図示していないビス等により固定する
ことにより開口部7を被覆する共に、中央突面1
5の上面と取付片6の上面とが夫々面一になつて
保持固定される。前記化粧パネル板14の底面と
折曲片5の下面とが夫々面一になるように構成す
ることによつて、化粧パネル板14で開口部7を
被覆すると、取付けフレーム2は断面方形状とな
ると共に、下面は突起物が全くない平板状とな
り、パーテーシヨン等の取付けが容易である。 The decorative panel board 14 has an opening 7 in the shaped steel material 3.
Preferably, a decorative panel board 14 with a convex cross-section whose bottom surface is flush with the lower surface of the bent piece 5 when covering the opening 7 is used. It is recommended that the upper surfaces of the stepped portions 16 on both sides located lower than the central projecting surface 15 of the decorative panel board 14 be brought into contact with the lower surface of the mounting piece 6 and fixed with screws (not shown) to close the opening. At the same time as covering the central protruding surface 1
The top surface of the mounting piece 5 and the top surface of the mounting piece 6 are flush with each other and are held and fixed. By configuring the bottom surface of the decorative panel board 14 and the bottom surface of the bent piece 5 to be flush with each other, when the opening 7 is covered with the decorative panel board 14, the mounting frame 2 has a rectangular cross section. At the same time, the lower surface has a flat plate shape with no protrusions, making it easy to attach partitions and the like.
また、前記電灯10や安定器等の付属機器12
以外の火災感知器、スプリンクラー、スピーカ
ー、TVカメラ等も前記電灯10や付属機器12
と同様に取付け、開口部7が露出する部分は、す
べて前記同様の方法により化粧パネル板14で被
覆するのである。 In addition, the electric light 10 and accessory equipment 12 such as a ballast
Other fire detectors, sprinklers, speakers, TV cameras, etc. are also included in the electric light 10 and attached equipment 12.
It is attached in the same manner as above, and all parts where the opening 7 is exposed are covered with the decorative panel board 14 in the same manner as described above.
[考案の効果]
本考案は上述のようであるから、フイルターの
取付けフレームがすべて下面に開口部を備え、且
つ化粧パネル板の段部を開口部上面の取付片下面
に当接固定できるようにした型鋼材を使用してい
るために、レイアウトが変更になつて電灯やスプ
リンクラー、スピーカー、Tカメラ等のその他の
機器が移設が必要となつても、取付けフレームを
取替えたりすることなく、既設の取付けフレーム
を使用して電灯やその他の機器の移設できるの
で、応用性、施工性、経済性の面に於いて優れて
おり、然も露出部はすべて化粧パネル板で被覆す
ることができるので見苦しさもなく、然も化粧パ
ネル板で被覆した取付けフレームの下面は突起物
が全くない平板状であるために、パーテーシヨン
等の取付けが簡単にできるのである。[Effect of the invention] Since the present invention is as described above, all of the mounting frames for the filters are provided with an opening on the lower surface, and the stepped portion of the decorative panel board can be fixed in contact with the lower surface of the mounting piece on the upper surface of the opening. Because we use shaped steel, even if the layout changes and other equipment such as lights, sprinklers, speakers, T-cameras, etc. need to be relocated, there is no need to replace the mounting frame and the existing equipment can be moved. Since electric lights and other equipment can be relocated using the mounting frame, it is excellent in terms of applicability, workability, and economy.However, all exposed parts can be covered with decorative panels, so it is not unsightly. Moreover, since the lower surface of the mounting frame covered with the decorative panel board is flat with no protrusions, it is easy to attach partitions and the like.
第1図は本考案取付けフレームに電灯を取付け
た全体の縦断面図、第2図は同一部の下面図、第
3図は型鋼材と化粧パネル板の拡大分解縦断面
図、第4図は電灯を取付けた従来の取付けフレー
ムの縦断面図、第5図は同側面図、第6図は電灯
を取付けた他の従来の取付けフレームの縦断面
図、第7図は電灯を取付けた更に他の従来の取付
けフレームの縦断面図である。
図中、1はフイルター、2は取付けフレーム、
3は型鋼材、4は上板、5は折曲片、6は取付
片、7は開口部、8は空〓部、10は電灯、14
は化粧パネル板である。
Figure 1 is a vertical cross-sectional view of the entire electric light mounted on the mounting frame of the present invention, Figure 2 is a bottom view of the same part, Figure 3 is an enlarged exploded vertical cross-sectional view of the shaped steel material and decorative panel board, and Figure 4 is A vertical sectional view of a conventional mounting frame with an electric light attached, FIG. 5 is a side view of the same, FIG. 6 is a longitudinal sectional view of another conventional mounting frame with an electric light attached, and FIG. 7 is a still another one with an electric light attached. FIG. 2 is a longitudinal cross-sectional view of a conventional mounting frame of FIG. In the figure, 1 is the filter, 2 is the mounting frame,
3 is a shaped steel material, 4 is an upper plate, 5 is a bent piece, 6 is a mounting piece, 7 is an opening, 8 is a hollow part, 10 is an electric light, 14
is a decorative panel board.
Claims (1)
巾を有する上板の両側端より下方へ折曲片を垂設
し、且つ該折曲片の内側下面に夫々対向して取付
片を突設して下端に開口部を設けると共に、該開
口部上面に空〓部を設けて形成された型鋼材を
夫々枠状に接合固定して取付けフレームを形成す
る一方、電灯およびその他の機器の取付け位置以
外の開口部を、断面凸型をした化粧パネル板の段
部を前記取付片に当接固定して被覆して成る全面
層流型クリーンルームに於けるフイルターの取付
けフレーム。 Bent pieces are hung downward from both ends of the upper plate having a width sufficient to mount electric lights and other equipment, and mounting pieces are protruded from the inner lower surface of each of the bent pieces to face the lower end. An opening is provided at the top of the opening, and a hollow section is provided on the upper surface of the opening, and the formed steel members are joined and fixed in a frame shape to form a mounting frame. 1. A mounting frame for a filter in a full-surface laminar flow clean room, which is covered by a stepped portion of a decorative panel board having a convex cross section that is abutted against and fixed to the mounting piece.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988130961U JPH0510903Y2 (en) | 1988-10-07 | 1988-10-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988130961U JPH0510903Y2 (en) | 1988-10-07 | 1988-10-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0253118U JPH0253118U (en) | 1990-04-17 |
JPH0510903Y2 true JPH0510903Y2 (en) | 1993-03-17 |
Family
ID=31386592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988130961U Expired - Lifetime JPH0510903Y2 (en) | 1988-10-07 | 1988-10-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0510903Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0711778Y2 (en) * | 1991-05-13 | 1995-03-22 | 近藤工業株式会社 | Filter device and mounting frame used for the device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62248735A (en) * | 1986-04-21 | 1987-10-29 | 鹿島建設株式会社 | Hepa frame for clean room |
-
1988
- 1988-10-07 JP JP1988130961U patent/JPH0510903Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62248735A (en) * | 1986-04-21 | 1987-10-29 | 鹿島建設株式会社 | Hepa frame for clean room |
Also Published As
Publication number | Publication date |
---|---|
JPH0253118U (en) | 1990-04-17 |
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