JPH05108798A - Picture processing method and picture processor - Google Patents

Abstract

PURPOSE:To improve the accuracy of an inspection and a decision by storing the first picture data of an object to be inspected before a machining process in a first storage means, storing the second picture data after the machining in a second storage means, comparing the second picture data with the first picture data and deciding the object to be inspected after the machining process. CONSTITUTION:The first picture data of an object to be inspected 14 is stored in a first storage means 20a via an input means 10a before a machining process. Next, after the machining process, the second picture data of the object to be inspected 14 is stored in the second storage means 20b via an input means 10b. The second picture data is compared with the first picture data and a control means 22 deciding the object to be inspected 14 after the machining process is provided. Thus, as an inspection and a decision are performed for the same object to be inspected 14 before and after the machining process, the inspection and decision can be performed by defining an individual difference allowable error as zero.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image processing method and an image processing apparatus, and more particularly to an image processing method for comparing the state of a sample before and after a processing step, and an image processing suitable for the image processing method. Regarding the device.

[0002]

2. Description of the Related Art Conventionally, for example, an image processing apparatus utilizing a computer has been used for shape inspection of a lead frame (specimen). When inspecting a change in a lead frame after a processing step, in a conventional image processing apparatus, reference image data, which is an image of an ideal lead frame, which is stored in a memory in advance before the processing step, and an input means of an input unit. Image pattern matching is performed by superimposing image data, which is the data for each pixel forming the image of the lead frame being inspected in the field of view, on a virtual (logical) plane, and after the processing step, another reference image data and after processing The image pattern matching of the image data of the lead frame is performed. In such an image processing apparatus, as a result of image pattern matching before and after the processing step, for example, when the reference image data and the image data match (or are within an allowable error range), the inspected lead frame is determined to be a good product, If they do not match (or are out of the allowable error range), it is determined as a defective product.

[0003]

However, the above-mentioned conventional image processing apparatus has the following problems. In the image pattern matching inspection before and after the processing process, individual error tolerances are set that define the allowable range of individual error in lead frame size and shape. An error of the sum of the errors is allowed, and there is a problem that the determination accuracy is reduced. In addition, even if the image processing apparatus detects an abnormality, the defective item may be resolved by the processing in the next step, so that a erroneous determination that even a good product is determined as a defective product There is also a problem that occurs. Therefore, it is an object of the present invention to provide an image processing method and an image processing apparatus capable of inspecting a sample before and after a processing step without lowering the determination accuracy.

[0004]

In order to solve the above problems, the present invention has the following constitution. First, in the image processing method, the first image data that is the image data of the sample before the processing step is loaded, the first image data is stored, and the second image data that is the image data of the sample after the processing step is stored. Is stored, the second image data is stored, the second image data is compared with the first image data, and the sample after the processing step is determined. An image processing apparatus suitable for use in this method has the following configuration. Input means for creating voltage data for each pixel forming an image of the sample in the visual field, and a first image which is image data created based on the voltage data of the sample before processing step created by the input means. A first storage means for storing data, and a second storage means for storing second image data which is image data created based on the voltage data after the processing step of the sample created by the input means. Storage means and the first image data of the sample via the input means before the processing step are stored in the first storage means, and after the processing step, the second image of the sample via the input means. The control means stores the data in the second storage means, compares the second image data with the first image data, and determines the sample after the processing step.

[0005]

[Operation] The operation will be described. In the present invention, before the processing step, the first image data of the sample is stored in the first storage means via the input means, and after the processing step, the second image data of the sample is stored in the second image data via the input means. The second image data is compared with the first image data to determine the sample after the processing step. Therefore, the same sample is tested and determined before and after the processing step. It is possible to perform the inspection and the determination with the error being zero.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. First, the configuration of the image processing apparatus of this embodiment will be described with reference to FIG. The image processing apparatus of the present embodiment is an apparatus that inspects the shape of a lead frame before and after the processing step, which is an example of a sample, and determines whether the shape after the processing step is appropriate (pass or fail). ..

Reference numeral 10a is a first CCD which is a first input means.
It is a camera (area sensor). The first camera 10a
It is installed above a predetermined position of the first inspection stage 12a before the processing step. The first camera 10a is the inspection stage 1
The shape of the lead frame 14 that has been transported is partially captured by a transport mechanism (not shown) at the predetermined position on 2a. CCD device group (not shown) built in the first camera 10a
Is emitted from below the stage 12a formed of a transparent member, and outputs a voltage corresponding to the intensity of the light (transmitted light) 15a transmitted through the stage 12a to enter the lead frame 14 in the visual field 16a. It is possible to output voltage data for each pixel forming the image. It should be noted that the first input means is not an area sensor such as the first camera 10a, but a line sensor composed of a CCD element group, and the lead frame 14 and the line sensor are relatively moved to obtain voltage data in the visual field 16a. May be created. As for illumination, the transmitted light 15 as in this embodiment is used.
When a is adopted, it is suitable for the contour inspection of the lead frame 14, and on the other hand, when the reflected light of the light irradiated on the surface of the lead frame 14 is adopted, it is also suitable for the surface inspection.

A second CCD 10b is a second input means.
It is a camera (area sensor). The second camera 10b is
It is installed after the processing step, that is, above the predetermined position of the second inspection stage 12b installed in the latter stage of the processing machine 17. The second camera 10b partially captures the shape of the lead frame 14 conveyed from the processing machine 17 to the predetermined position on the inspection stage 12b by a conveyance mechanism (not shown). CCD device group (not shown) built in the second camera 10b
Is emitted from below the stage 12b formed of a transparent member, and outputs a voltage according to the intensity of the light (transmitted light) 15b which is transmitted through the stage 12b and enters the lead frame 14 in the visual field 16b. It is possible to output voltage data for each pixel forming the image. As with the first input means, a line sensor made up of a CCD element group may be used as the second input means instead of the area sensor. Further, the illumination is not limited to the transmitted light 15b, and reflected light of the light applied to the surface of the lead frame 14 can be used. Reference numeral 18 denotes a ROM, which stores an operating system of a microprocessor that controls the image processing apparatus, a pattern matching control program, and the like. The control program of the ROM 18 and control data such as reference image data may be stored in an external memory such as an IC memory card or a flexible disk.

Reference numeral 20 denotes a RAM, which has a first memory area.
Memory 20a, second memory 20b, third memory 20c,
It is divided into ... A binary or multi-valued image created based on voltage data for each pixel forming the image of the unprocessed lead frame 14 created by the first camera 10a is stored in the first memory 20a which is the first storage means. The first image data, which is data, is stored. A binary or multi-valued image created based on voltage data for each pixel forming the image of the processed lead frame 14 created by the second camera 10b in the second memory 20b which is the second storage means. The second image data, which is data, is stored. The third memory 20c, which is the third storage unit, is used when inspecting a specific position of the lead frame 14 that is determined to have an abnormality before processing, and stores position data indicating the specific position. .. In addition, the RAM 20 stores data to be output, an input command, a calculation result, a determination result to be output, and the like. In addition to the RAM 20, an IC memory card, a flexible disk, or the like may be used as the first storage unit.

Reference numeral 22 denotes an MP having a function as control means.
U. As the control means, the MPU 22 is the first camera 1
Voltage data from 0a, creates the first image data and stores it in the first memory 20a of the RAM 20, and after processing, reads voltage data from the second camera 10b to create the second image data. The second image data is stored in the second memory 20b of the RAM 20, the second image data is compared with the first image data, and the shape and the shape of the lead frame 14 after the working process are checked to determine whether the size and shape of the lead frame 14 are pass or fail. judge. Further, when performing a process of inspecting only a specific position of the lead frame 14 which is determined to have an abnormality before processing, the MPU 22 inspects the lead frame 14 based on the first image data, Position data indicating a position where there is a possibility of abnormality above is stored in the third memory 20c, and the second image data of the portion corresponding to the position data after processing is compared with the first image data, and after the processing step Regarding the shape of the lead frame 14, it is determined whether the size and the shape of the lead frame 14 are pass or fail. When performing the image pattern matching for the above two types of inspection and determination, it is not necessary to set the individual difference allowable error. This is because the same lead frame 14 is compared. Other than the individual difference allowable error, for example, an allowable error for absorbing an error caused by variations in the performance of CCD elements may be set. In addition, the MPU 22 performs calculation and control of each part of the apparatus according to a control program and instructions of an operator.

A keyboard 24 is an example of an input device, and an operator inputs various commands and data to the MPU 22. The input device is not limited to the keyboard 24, and various items such as a mouse may be used. Reference numeral 26 denotes a display (CRT or LCD) which is an example of an output device, and M
It outputs commands and data input to the PU 22, information processed by the MPU 22 by calculation, and the like. The output device is not limited to the display 26, and various devices such as a printer, a buzzer for alarm notification, and a blinkable LED are used. In the above configuration, the first camera 10a and the second camera 10a serve as input means.
Although the camera 10b is provided, the number of CCD cameras may be one, and in this case, the voltage data may be created by moving the camera and the sample before and after the processing step relatively. Further, when the voltage data of the sample before the processing step is created by the first input means and the voltage data after the processing step is created by the second input means as in the above embodiment, the control means is used. Is processed by one MPU 22,
The first input means, the first storage means and the third storage means are controlled by the first control means (MPU), and the second input means and the second storage means are the second control means (other MP
The control by U) and the comparison and determination of the second image data and the first image data may be executed by the first control means or the second control means.

Next, referring to the flowchart of FIG.
The operation of the shape inspection of the lead frame 14 will be described in detail. The lead frame 14 before processing is placed at a predetermined position of the first inspection stage 12a within the visual field 16a of the camera 10a.
Is sent and an instruction to start the image pattern matching inspection is input (step 100), the MPU 22 sends R
A control program or the like is read from the OM 18 and each memory of the RAM 20 is cleared. (Step 102). Then M
The PU 22 is connected to the lead frame 1 via the first camera 10a.
The voltage data of No. 4 is fetched (step 104), and the first image data is created (step 106). MPU22
Stores the first image data in the first memory 20a of the RAM 20 (step 108). After that, the lead frame 14 is sent to the processing machine 17 by a transport mechanism (not shown) and processed by the processing machine 17.

After processing, image processing is performed again, so that the lead frame 14 is moved to the second inspection stage 1 by a transport mechanism (not shown).
When the MPU 22 detects that the lead frame 14 has been sent to a predetermined position of the lead frame 2b (step 110), the MPU 22 takes in the voltage data of the lead frame 14 via the second camera 10b (step 1).
12) and create second image data (step 11)
4). The MPU 22 stores the second image data in the second memory 20b of the RAM 20 (step 116). After storing the second image data, the MPU 22 logically compares the second image data with the first image data (step 11).
8). At that time, since the individual difference allowable error is not set, it is possible to perform comparative inspection with extremely high accuracy. Step 1
If it is determined in 18 that the second image data matches the first image data, the size and shape of the inspected lead frame 14 are proper, and in the processing step,
Since no deformation or the like has occurred, it is judged as "pass" and is output to the display 26 and the like (step 120). On the other hand, when it is determined in step 118 that the second image data does not match the first image data, the size and shape of the inspected lead frame 14 are incorrect, and deformation or the like occurs in the processing step. Since it has occurred, it is judged as "fail" and is output to the display 26 and the like (step 124). In this way, a pass / fail judgment is made and output, and the judgment of one sequence is completed (step 116).

Next, an operation for inspecting a specific position of the lead frame 14 which is determined to have a possibility of abnormality before processing will be described with reference to FIGS. Note that FIG.
2, the same operations as those in the flowchart of FIG. 2 are designated by the same step numbers, and description thereof will be omitted. Here, an example will be described in which the lead frame 14 is sent to the plating process after the etching process is completed and an abnormality is detected after the plating process. Step 108
In the lead frame 14 after the etching process,
4 shows a part of the image of the first image data stored in the first memory 20a in FIG. The stage portion 14a of the lead frame 14, the inner leads 14b, 1
On the surface of 4c, there are locations 28a, 28b, 28c, 28d that may be judged to be abnormal before plating. After step 108, the MPU 22 inspects the first image data in the first memory 20a in order to search the places 28a, 28b, 28c, 28d that may be determined to be abnormal (step 200). Since the image data of the portions 28a, 28b, 28c, 28d that may be determined to be abnormal are different from the image data determined to be normal, the MPU
22 stores the position data indicating the positions of the places 28a, 28b, 28c, 28d in the third memory 20c (step 202).

The MPU 22 stores the second image data in the second memory 20b (step 116), and then the third memory 20c determines that there is a possibility that it may be determined to be abnormal 28.
The position data of a, 28b, 28c, 28d is read, and the second image data is inspected for the abnormal position indicated by the position data (step 204). This inspection may be compared with the first image data, or it may be inspected whether the image data in the vicinity of the relevant portion of the second image data is different from the image data judged to be normal. At that time, the pattern matching inspection of the shape and size performed in the flowchart of FIG. 2 is also performed. As a result of the inspection in step 204, when a part of the image of the second image data in the lead frame 14 after the plating process is as shown in FIG. 5, only the parts 28b and 28d exist, and the part before the plating process is performed. 28
a and 28c have disappeared. Therefore, the points 28b, 28
Reference numeral d is an abnormal portion, and those present at the portions 28a and 28c are considered to have been removed in the plating process due to etching residue or the like.

In step 204, the abnormal point 28
When b and 28d are detected, the MPU 22 determines "fail" even if the shape and size are acceptable. Although various preferred embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and it goes without saying that many modifications can be made without departing from the spirit of the invention. is there.

[0017]

When the image processing apparatus according to the present invention is used,
Before the processing step, the first image data of the sample is stored in the first storage means via the input means, and after the processing step, the second image data of the sample is stored in the second storage means via the input means. Store and compare the second image data with the first image data,
Since the sample after the processing step is determined, the same sample is tested and determined before and after the processing step, so that it is possible to perform the inspection and the determination with the individual difference tolerance being zero. It has a remarkable effect that it can be improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of an embodiment of an image processing apparatus according to the present invention.

FIG. 2 is a flowchart showing the operation of the image processing apparatus.

FIG. 3 is a flowchart showing an operation in the case of inspecting a specific position of a sample which is determined to have a possibility of abnormality before processing.

FIG. 4 is an explanatory view showing an image of a lead frame before processing.

FIG. 5 is an explanatory view showing an image of a lead frame after processing.

[Explanation of symbols]

 10a First CCD camera 10b Second CCD camera 14 Lead frames 16a, 16b Field of view 17 Processing machine 20a First memory 20b Second memory 20c Third memory 22 MPU

Claims (6)

[Claims] 1. The first image data, which is the image data of the sample before the processing step, is loaded, the first image data is stored, and the second image data, which is the image data of the sample after the processing step, is loaded. An image processing method, characterized in that the second image data is stored, the second image data is compared with the first image data, and the sample after the processing step is determined. 2. The first image data, which is the image data of the sample before the processing step, is loaded, the first image data is stored, and the sample is inspected based on the first image data. Position data indicating a position in which there is a possibility of anomaly is stored, the second image data which is the image data of the sample after the processing step is loaded, the second image data is stored, and the position data is stored. An image processing method, wherein the second image data of a part is compared with the first image data, and the specimen after the processing step is determined. 3. Input means for creating voltage data for each pixel forming an image of a sample in a field of view, and image data created based on the voltage data of the sample before processing step created by the input means. First storage means for storing certain first image data, and second image data that is image data created based on the voltage data after the processing step of the sample created by the input means is stored. A second storage means for storing the first image data of the sample in the first storage means via the input means before the processing step, and after the processing step,
Control means for storing the second image data of the sample in the second storage means via the input means, comparing the second image data with the first image data, and determining the sample after the processing step. An image processing apparatus comprising: 4. A third storage unit is provided for storing position data indicating a position where there is a possibility of abnormality on the sample before the processing step, and the control unit is based on the first image data. A sample is inspected, position data indicating a position where there is a possibility of abnormality on the sample is stored in the third storage unit, and the second image data of a portion corresponding to the position data is processed into a first position after the processing step. The image processing apparatus according to claim 3, wherein the sample after the processing step is compared with the image data to determine the sample. 5. The voltage data before the processing step of the sample is created by the first input means, and the voltage data after the processing step is created by the second input means. The image processing device described. 6. The first input means, the first storage means and the third storage means are controlled by a first control means, and the second input means and the second storage means are controlled by a first control means. 6. The second control means controls the second image data and the first image data, and the comparison and determination are performed by the first control means or the second control means. Image processing device.