JPH05107213A - Detecting apparatus of gas - Google Patents

Abstract

PURPOSE:To make it easy to check whether an indicated value of an indicating- alarming part is due to a real gas leakage or on a failure or a malfunction, in a detecting apparatus of gas. CONSTITUTION:A selector valve 10 for changing over a collected gas from a detecting point 4 and a reference gas, and making them be sucked by a collected gas sucking section 6 of a gas detecting part 2, and a valve controller 11 for remotecontrolling a changeover operation of this selector valve 10 arbitrarily, are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas detection device, and more particularly to a gas detection device having a function of determining whether a gas leak is output.

[0002]

2. Description of the Related Art A general structure of a conventional gas detector installed in a power room and a method of confirming an instruction value of an instruction alarm unit in a clean room will be described with reference to FIG.

FIG. 3 is a block diagram of an example in which a gas detector 2 and the like are attached to a gas cylinder cabinet 1 in which a gas cylinder and the like are installed. Since the inside of the gas cylinder cabinet 1 is normally exhausted from the exhaust duct 3, if there is a gas leak, the leaked gas flows toward the exhaust duct 3. Therefore, the detection point 4 which is the gas sampling position of the exhaust duct 3 is provided in the exhaust duct 3 as close to the gas cylinder cabinet 1 as possible. The sampled gas from the detection point 4 passes through the sampling tube 5 and is sucked by the sampled gas suction section 6 to the gas detection section 2.

The sampled gas after detection passes through the tube 7 for returning the sampled gas and is discharged to the downstream side of the exhaust duct 3.
The gas leak signal 8 detected by the gas detection unit 2 is transmitted to an instruction / alarm unit 9 installed in a clean room or the like to display its concentration, and when the concentration is higher than a set value, an alarm such as a buzzer is generated. However, the gas from the gas cylinder is configured to stove automatically.

The confirmation of whether the indicated value of the instruction warning unit 9 is due to a true gas leak or due to a malfunction or malfunction of the gas detection unit 2 is usually performed as follows. That is, the worker actually goes near the gas detection unit 2, removes the sampling tube 5 from the sampling gas suction unit 6, and sucks the atmosphere from the sampling gas suction unit 6. At that time, if the instruction value of the instruction alarm unit 9 falls to a normal value, it is determined that gas has leaked, and if the instruction value does not change, it is determined that the gas detection unit 2 or the like has failed or malfunctions.

[0006]

In the above-described conventional gas detection device, it is necessary to confirm whether the indication value of the indication alarm unit is due to gas leakage, or the malfunction or malfunction of the gas detection unit. It was necessary for a person to actually go near the gas detection part, remove the sampling tube, and let the gas detection part suck the atmosphere.

However, in general, the gas detection device shortens the sampling tube to increase the reaction speed, so that the distance between the detection point and the gas detection portion is made as short as possible. In the case of the gas cylinder cabinet 1 described above, the gas detector 2 is usually mounted on the gas cylinder cabinet itself or on a wall in the vicinity of the gas cylinder cabinet 1. Therefore, when performing the above-mentioned confirmation work, it is very dangerous to approach the gas cylinder cabinet where gas may leak.

Further, if the sampling tube is displaced when gas is leaking, there is a risk that the gas diffuses from the sampling tube and is inhaled by an operator or reacts with the atmosphere to cause ignition.

Furthermore, when the sampling tube that has been removed once is checked and then reconnected to the gas detection section, if the fitting etc. are not fully inserted, the atmosphere will be sucked from that part and the original detection point There is also a possibility that a sufficient amount of collected gas cannot be sucked. Furthermore, when the gas detection unit itself is attached to a high place, there is a problem that the work itself for removing the sampling tube is dangerous.

[0010]

A gas detector according to the present invention comprises a gas detector, a sampling tube for collecting gas from a detection point of an exhaust duct provided in a gas cylinder cabinet and sending the gas to the gas detector, In a gas detection device having an instruction and alarm unit that indicates the concentration of the sampled gas by a signal from the gas detection unit and issues an alarm when the reference value is exceeded, by switching the sampled gas from the detection point and the reference gas. A switching valve for sending to the gas detection unit and a valve controller for remotely controlling the switching valve are provided.

[0011]

The present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a gas detection device according to a first embodiment of the present invention.

In FIG. 1, the gas detection device collects gas from a gas detection unit 2 and a detection point 4 of an exhaust duct 3 provided in a gas cylinder cabinet 1 in which a gas cylinder for a sample is installed and sends it to the gas detection unit 2. A sampling tube 5, an instruction / alarm unit 9 including a meter and a buzzer for indicating the concentration of the collected gas by a signal 8 from the gas detection unit 2 and issuing an alarm when the reference value is exceeded, and a gas collected from the detection point 4. A switching valve 10 that switches between the reference gas and the reference gas and sends the gas to the gas detection unit 2, and a valve controller 11 that remotely operates the switching valve. Reference numeral 7 is a gas return tube.

In the first embodiment, the confirmation as to whether the indicated value of the instruction warning unit 9 is due to a true gas leak or due to a malfunction or malfunction of the gas detection unit 2 is performed as follows.

Normally, it is switched so that the sampled gas from the detection point 4 is directly sucked into the gas detection section 2. At the time of the above confirmation work, the switching valve controller 11 closes the sampling gas suction unit 6 side of the switching valve 10, opens the reference gas (for example, atmospheric air) suction unit 12 side, and causes the gas detection unit 2 to suck atmospheric air. Judgment as to whether there is a true gas leak, a failure, or a malfunction is based on the meter reading as before. After the confirmation, the valve controller 11 again closes the reference gas suction part 12 side of the switching valve 10 and opens the sampled gas suction part 6 side to restore the normal state.

FIG. 2 is a block diagram of a gas detector of the second embodiment of the present invention.

In the second embodiment, when the air is sucked into the gas detection unit 2, the air pack 13 is used instead of the air in the power chamber.
Aspirate the fresh air inside. For example, when the air itself in the utility chamber is contaminated with the gas to be detected by the gas detection unit 2, if the air is directly sucked into the gas detection unit 2, the value indicated by the meter of the instruction alarm unit 9 will decrease. It is not a confirmation of whether or not. However, this danger does not occur in the second embodiment.

As the gas to be put into the air pack 13, the case has been described where the air does not contain the gas to be used, but in order to check the detector 2, a used gas having a constant concentration, for example, 10 PPM silane or the like is used. You may use.

[0018]

As described above, according to the present invention, it is necessary for the operator to confirm whether the indication value of the indication alarm unit is due to a true gas leak or due to a failure or malfunction of the gas detection unit. It has an effect that it can be easily performed by operating the valve controller installed in the safe clean room side.

Therefore, unlike the conventional case, the worker does not inhale the gas diffused from the sampling tube,
Also, there is no risk that the leaked gas will react with the atmosphere and ignite.
Furthermore, since it is not necessary to reconnect the sampling tube to the gas detection section again, the fitting method such as fitting is not sufficient, and the atmosphere may be sucked from that part, and it may not be possible to suck sufficient sampled gas from the original detection point. Absent. Further, it is not necessary to work near the gas detection unit attached to a dangerous place such as a high place.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a gas detection device according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of a gas detection device according to a second embodiment of the present invention.

FIG. 3 is a configuration diagram of an example of a conventional gas detection device.

[Explanation of symbols]

 1 Gas Cylinder Cabinet 2 Gas Detection Section 3 Exhaust Duct 4 Detection Point 5 Sampling Tube 6 Sampling Gas Sampling Section 7 Gas Return Tube 8 Gas Leakage Signal 9 Indication Alarm Section 10 Switching Valve 11 Valve Controller 12 Reference Gas Suction Section 13 Air Pack

Claims (2)

[Claims] 1. A gas detection unit, a sampling tube for collecting gas from a detection point of an exhaust duct provided in a gas cylinder cabinet and sending the gas to the gas detection unit, and a concentration of gas collected by a signal from the gas detection unit. A switching valve for switching between the sampled gas from the detection point and the reference gas and sending the gas to the gas detection unit, and a gas detection apparatus having an instruction and alarm unit that issues an alarm when the reference value is exceeded. A gas detection device comprising a valve controller for remotely operating a valve. 2. The gas detection device according to claim 1, wherein the reference gas is gas in the atmosphere or air pack.