JPH0499830U - - Google Patents
Info
- Publication number
- JPH0499830U JPH0499830U JP1051991U JP1051991U JPH0499830U JP H0499830 U JPH0499830 U JP H0499830U JP 1051991 U JP1051991 U JP 1051991U JP 1051991 U JP1051991 U JP 1051991U JP H0499830 U JPH0499830 U JP H0499830U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1051991U JPH0499830U (enExample) | 1991-02-05 | 1991-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1051991U JPH0499830U (enExample) | 1991-02-05 | 1991-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0499830U true JPH0499830U (enExample) | 1992-08-28 |
Family
ID=31743624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1051991U Pending JPH0499830U (enExample) | 1991-02-05 | 1991-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0499830U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57180132A (en) * | 1981-04-30 | 1982-11-06 | Fujitsu Ltd | Washing method of substrate |
| JPS63120425A (ja) * | 1986-11-10 | 1988-05-24 | Mitsubishi Electric Corp | ウエハ処理薬品槽 |
-
1991
- 1991-02-05 JP JP1051991U patent/JPH0499830U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57180132A (en) * | 1981-04-30 | 1982-11-06 | Fujitsu Ltd | Washing method of substrate |
| JPS63120425A (ja) * | 1986-11-10 | 1988-05-24 | Mitsubishi Electric Corp | ウエハ処理薬品槽 |