JPH0498732A - Microwave tube device - Google Patents

Microwave tube device

Info

Publication number
JPH0498732A
JPH0498732A JP21494190A JP21494190A JPH0498732A JP H0498732 A JPH0498732 A JP H0498732A JP 21494190 A JP21494190 A JP 21494190A JP 21494190 A JP21494190 A JP 21494190A JP H0498732 A JPH0498732 A JP H0498732A
Authority
JP
Japan
Prior art keywords
pump
ion pump
power source
electron gun
high voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21494190A
Other languages
Japanese (ja)
Inventor
Kiyoshi Momota
百田 清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21494190A priority Critical patent/JPH0498732A/en
Publication of JPH0498732A publication Critical patent/JPH0498732A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To keep the degree of vacuum of an electron gun part at a satisfactorily proper level by fixing an evacuating ion pump to a heater terminal board via a pipe and providing a high voltage power source nearby this ion pump. CONSTITUTION:A pair of heater terminal boards 3, 4 are provided on an end part of an electron gun part 1 and an evacuating ion pump 6 is fixed to the terminal board 3 via a metal pipe 5. Further a high voltage power source 7 is provided near the pump 6 and the input side of the power source 7 is connected via a lead wire 8 to the heater terminal board 4, and the output side positive electrode of the power source 7 steps up a heater voltage to a high voltage, rectifies and supplies it to the pump 6. And an evacuation by the pump 6 is performed via an evacuation port 17 which is bored in a metal cylinder 12. Thereby the degree of vacuum of the electron gun part is kept at a good enough level and the whole device can be simplified and be made compact.

Description

【発明の詳細な説明】 [発明の目的コ (産業上の利用分野) この発明はマイクロ波管装置に係り、特に動作時の真空
度維持のためのイオンポンプの取付は位置及び駆動電源
の供給手段に関する。
[Detailed Description of the Invention] [Purpose of the Invention (Industrial Application Field) This invention relates to a microwave tube device, and in particular, the installation of an ion pump for maintaining the degree of vacuum during operation depends on the position and drive power supply. Concerning means.

(従来の技術) 一般にマイクロ波管装置は、電子銃部、入力導波管部、
高周波作用部、出力導波管部、コレクタ部、イオンポン
プ等から構成されている。
(Prior art) Generally, a microwave tube device includes an electron gun section, an input waveguide section,
It consists of a high frequency acting part, an output waveguide part, a collector part, an ion pump, etc.

このようなマイクロ波管装置において、陰極の加熱や各
電極表面への電子衝撃により電子銃部から発生するガス
分子はドリフト管を通って、高周波作用部、コレクタ部
、出力導波管部のマイクロ波出力窓などから発生するガ
ス分子と共に、出力導波管部やコレクタ部とボディ一部
の間などの接地電位にある真空外囲器に取付けられたイ
オンポンプにより排気されている。そして、電子銃部内
の真空度は、陰極の動作や真空中における高電圧印加に
差支えがない水準に保たれている。
In such a microwave tube device, gas molecules generated from the electron gun section due to heating of the cathode and electron bombardment on the surface of each electrode pass through the drift tube to the microwaves in the high frequency acting section, collector section, and output waveguide section. Together with gas molecules generated from the wave output window, etc., the ion pump is evacuated by an ion pump attached to a vacuum envelope at ground potential, such as between the output waveguide section, collector section, and part of the body. The degree of vacuum within the electron gun section is maintained at a level that does not pose a problem for the operation of the cathode or the application of high voltage in vacuum.

ところで、マイクロ波管装置のうち例えばパルス争クラ
イストロンやジャイロトロンなどにおいては、最近より
高い周波数でより大きなマイクロ波電力を安定に出力す
ることが求められている。
Incidentally, among microwave tube devices, for example, pulse fighting klystrons and gyrotrons, there has recently been a demand for stably outputting larger microwave power at higher frequencies.

このためには、電子銃部は高電圧、大電流の電子ビーム
を供給出来るものでなければならず、陰極などの大形化
によりガス放出量か増大すると共に、高い真空度が必要
になっている。一方、短波長化に伴ない、マイクロ波共
振器の共振周波数の制約からドリフト管は内径が小さく
ならざるを得ず、排気コンダクタンスは著しく低下する
。このため、電子銃部からの放出ガスをドリフト管を経
由して排気するという従来の方式では、電子銃部内の真
空度を十分に良い水準に保つことが出来なくなり、これ
らのマイクロ波管装置では、ドリフト管軸を中心軸とし
て同心円筒状に形成された空胴部あるいはボディ一部と
は独立に設けられたパイプを排気経路として用いている
To achieve this, the electron gun must be capable of supplying a high-voltage, large-current electron beam, and as the cathode becomes larger, the amount of gas emitted increases, and a high degree of vacuum becomes necessary. There is. On the other hand, as wavelengths become shorter, the internal diameter of the drift tube must become smaller due to restrictions on the resonant frequency of the microwave resonator, resulting in a significant drop in exhaust conductance. For this reason, with the conventional method of exhausting the gas emitted from the electron gun via the drift tube, it is no longer possible to maintain the degree of vacuum inside the electron gun at a sufficiently good level, and these microwave tube devices , a pipe provided independently of a hollow part or a part of the body formed in a concentric cylindrical shape with the drift tube axis as the central axis is used as an exhaust path.

(発明が解決しようとする課題) 上記のような従来のマイクロ波管装置における構成では
、部品点数が増大すると共に、部品形状、組立て工程が
複雑化し、コストアップの要因になるばかりでなく、真
空不良などの原因になるという欠点がある。又、このよ
うな排気経路は排気コンダクタンスを大きくする必要か
ら断面積を大きくする必要があり、マイクロ波に対する
カットオフ周波数かドリフト管のそれよりも低くなるた
め、広い周波数帯に亘ってマイクロ波のフィードバック
経路を構成して発振の原因となる可能性がある。
(Problems to be Solved by the Invention) In the configuration of the conventional microwave tube device as described above, the number of parts increases, the shape of the parts and the assembly process become complicated, which not only causes an increase in cost but also It has the disadvantage of causing defects. In addition, such an exhaust path needs to have a large cross-sectional area because it is necessary to increase the exhaust conductance, and the cutoff frequency for microwaves is lower than that of the drift tube. It may form a feedback path and cause oscillation.

更に、ボディ一部の外径が大きくなるために集束用の電
磁石が大形化し、その製作費のみならず、運転費用も増
大する。この影響は、超伝導電磁石を用いるジャイロト
ロンにおいては特に大きい。
Furthermore, since the outer diameter of a portion of the body becomes larger, the focusing electromagnet becomes larger, which increases not only the manufacturing cost but also the operating cost. This effect is particularly large in gyrotrons that use superconducting electromagnets.

この発明は、電子銃部の真空度を十分良い水準に保ち従
来技術の問題点を解決したマイクロ波管装置を提供する
ことを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a microwave tube device that maintains the degree of vacuum in the electron gun section at a sufficiently good level and solves the problems of the prior art.

[発明の構成] (課題を解決するための手段) この発明は、ヒータ端子板にパイプを介して排気用イオ
ンポンプが取付けられ、このイオンポンプの近傍に高電
圧電源が設けられ、この高電圧電源はヒータ端子板に供
給されるヒータ電圧を昇圧・整流してイオンポンプに供
給するように構成されたマイクロ波管装置である。
[Structure of the Invention] (Means for Solving the Problems) In this invention, an ion pump for evacuation is attached to a heater terminal plate via a pipe, a high voltage power supply is provided near the ion pump, and the high voltage The power source is a microwave tube device configured to boost and rectify the heater voltage supplied to the heater terminal plate and supply it to the ion pump.

(作用) この発明によれば、電子銃部から放出されるガス分子を
最も効果的に排気することか出来、電子銃部の真空度が
十分良い水準に保たれる。又、わざわざ外部からイオン
ポンプへの電源を導入する必要かなく、装置全体を簡略
化、コンパクト化することが出来る。
(Function) According to the present invention, gas molecules emitted from the electron gun section can be exhausted most effectively, and the degree of vacuum in the electron gun section can be maintained at a sufficiently good level. Furthermore, there is no need to take the trouble to introduce a power source to the ion pump from the outside, and the entire device can be simplified and made more compact.

(実施例) 以下、図面を参照して、この発明の一実施例を詳細に説
明する。
(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

この発明によるマイクロ波管装置は第1図に示すように
構成され、電子銃部1、入力導波管部、高周波作用部2
、出力導波管部、コレクタ部を備えてなっている。但し
、図では入力導波管部、出力導波管部、コレクタ部を省
略しである。電子銃部lの端部には一対のヒータ端子板
3.4が設けられ、外方のヒータ端子板3には金属パイ
プ5を介して排気用イオンポンプ6が取付けられている
The microwave tube device according to the present invention is constructed as shown in FIG.
, an output waveguide section, and a collector section. However, the input waveguide section, output waveguide section, and collector section are omitted in the figure. A pair of heater terminal plates 3.4 are provided at the ends of the electron gun section 1, and an exhaust ion pump 6 is attached to the outer heater terminal plate 3 via a metal pipe 5.

更に、このイオンポンプ6の近傍にボックスに収納され
た高電圧電源7が設けられ、この高電圧電源7の入力側
はリード線8を介してヒータ端子板4に接続され、高電
圧電源7の出力側の正電極はリート線9を介してイオン
ポンプ6の正電極端子10に接続されている。つまり、
高電圧電源7てはヒータ端子板3.4からリード線及び
パイプを通して導かれたヒータ電圧を高電圧に昇圧・整
流し、それをイオンポンプ6に供給している。例えばヒ
ータ電圧が6.3〜1o数Vの交流を、この高電圧電源
7で3〜4KVの直流に昇圧・整流して供給しているの
である。又、電子銃部1の陰極11は金属円筒12に支
持されているが、この陰極11を加熱するヒータ(図示
せず)はその一端が金属棒13を介してヒータ端子板3
に接続され、他端は金属円筒12を介してヒータ端子板
4に接続されている。尚、図中の符号14は排気管、1
5は永久磁石、16は磁性金属からなるシールドケース
である。そして、イオンポンプ6による排気は、金属円
筒12に穿たれた排気口17を通して行なわれる。この
ようなマイクロ波管装置は、絶縁油タンク内に収めて使
用される。
Further, a high voltage power supply 7 housed in a box is provided near the ion pump 6, and the input side of the high voltage power supply 7 is connected to the heater terminal plate 4 via a lead wire 8. The positive electrode on the output side is connected to a positive electrode terminal 10 of the ion pump 6 via a Riet wire 9. In other words,
The high voltage power source 7 boosts and rectifies the heater voltage led from the heater terminal plate 3.4 through lead wires and pipes to a high voltage, and supplies it to the ion pump 6. For example, alternating current with a heater voltage of 6.3 to 10V is boosted and rectified into direct current of 3 to 4 kV by the high voltage power supply 7 and then supplied. Further, the cathode 11 of the electron gun section 1 is supported by a metal cylinder 12, and one end of a heater (not shown) for heating the cathode 11 is connected to the heater terminal plate 3 via a metal rod 13.
The other end is connected to the heater terminal plate 4 via the metal cylinder 12. In addition, the code 14 in the figure is an exhaust pipe, 1
5 is a permanent magnet, and 16 is a shield case made of magnetic metal. Evacuation by the ion pump 6 is performed through an exhaust port 17 bored in the metal cylinder 12. Such a microwave tube device is used by being housed in an insulating oil tank.

[発明の効果コ 以上説明したようにこの発明によれば、ヒータ端子板に
パイプを介して排気用イオンポンプが取付けられている
ので、電子銃部から放出されるガス分子を最も近いとこ
ろで効果的に排気することが出来、電子銃部の真空度が
十分良い水準に保たれる。又、イオンポンプの近傍に高
電圧電源が設けられ、この高電圧電源はヒータ端子板に
供給される電圧を導いて整流・昇圧してイオンポンプに
供給しているので、わざわざ外部からイオンポンプへの
電源を導入する必要がなく、装置全体を簡略化出来、コ
ンパクト化することが出来る。
[Effects of the Invention] As explained above, according to the present invention, since the exhaust ion pump is attached to the heater terminal plate via a pipe, the gas molecules emitted from the electron gun are effectively pumped to the nearest point. This allows the electron gun to be evacuated to a sufficiently high level. In addition, a high voltage power supply is installed near the ion pump, and this high voltage power supply guides the voltage supplied to the heater terminal board, rectifies and boosts it, and supplies it to the ion pump. There is no need to introduce a power source, and the entire device can be simplified and made more compact.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例に係るマイクロ波管装置を
示す縦断面図である。 1・・・電子銃部、2・・・高周波作用部、3.4・・
・ヒータ端子板、6・・・イオンポンプ、7・・・高1
[E 圧電源。 出願人代理人 弁理士 鈴江武彦
FIG. 1 is a longitudinal sectional view showing a microwave tube device according to an embodiment of the present invention. 1...Electron gun section, 2...High frequency action section, 3.4...
・Heater terminal board, 6...Ion pump, 7...High 1
[E Voltage power supply. Applicant's agent Patent attorney Takehiko Suzue

Claims (1)

【特許請求の範囲】 ヒータ端子板を有する電子銃部、高周波作用部、コレク
タ部を備えてなるマイクロ波管装置において、 上記ヒータ端子板にパイプを介して排気用イオンポンプ
が取付けられ、このイオンポンプの近傍に高電圧電源が
設けられ、この高電圧電源は上記ヒータ端子板に供給さ
れるヒータ電圧を昇圧・整流して上記イオンポンプに供
給してなることを特徴とするマイクロ波管装置。
[Claims] In a microwave tube device comprising an electron gun section, a high frequency acting section, and a collector section each having a heater terminal plate, an ion pump for evacuation is attached to the heater terminal plate via a pipe, and the ion pump is attached to the heater terminal plate through a pipe. A microwave tube device characterized in that a high voltage power source is provided near the pump, and the high voltage power source boosts and rectifies the heater voltage supplied to the heater terminal plate and supplies the same to the ion pump.
JP21494190A 1990-08-16 1990-08-16 Microwave tube device Pending JPH0498732A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21494190A JPH0498732A (en) 1990-08-16 1990-08-16 Microwave tube device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21494190A JPH0498732A (en) 1990-08-16 1990-08-16 Microwave tube device

Publications (1)

Publication Number Publication Date
JPH0498732A true JPH0498732A (en) 1992-03-31

Family

ID=16664107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21494190A Pending JPH0498732A (en) 1990-08-16 1990-08-16 Microwave tube device

Country Status (1)

Country Link
JP (1) JPH0498732A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5550462A (en) * 1993-06-29 1996-08-27 Sharp Kabushiki Kaisha Regulated power supply circuit and an emitter follower output current limiting circuit
US5563407A (en) * 1993-09-20 1996-10-08 Kabushiki Kaisha Toshiba X-ray image intensifier tube with an ion pump to maintain a high vacuum in the tube
US6607417B2 (en) * 2001-11-05 2003-08-19 Air Asia Technology Inc. Suction device used in aging process of a microwave tube

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5550462A (en) * 1993-06-29 1996-08-27 Sharp Kabushiki Kaisha Regulated power supply circuit and an emitter follower output current limiting circuit
US5563407A (en) * 1993-09-20 1996-10-08 Kabushiki Kaisha Toshiba X-ray image intensifier tube with an ion pump to maintain a high vacuum in the tube
US6607417B2 (en) * 2001-11-05 2003-08-19 Air Asia Technology Inc. Suction device used in aging process of a microwave tube

Similar Documents

Publication Publication Date Title
US8258725B2 (en) Hollow beam electron gun for use in a klystron
JP3614478B2 (en) Linear electron beam tube structure
US20030218430A1 (en) Ion source with external RF antenna
US6133786A (en) Low impedance grid-anode interaction region for an inductive output amplifier
US3346766A (en) Microwave cold cathode magnetron with internal magnet
JPH0498732A (en) Microwave tube device
US2843790A (en) Traveling wave amplifier
EP0018402A1 (en) Zero-bias gridded gun.
US4087720A (en) Multi-beam, multi-aperture ion sources of the beam-plasma type
JPS63119198A (en) Plasma generator
KR940009316B1 (en) Magnetron cathode of electric range
US3331984A (en) Magnetic field shaping cylinder for confined flow electron guns
RU2278439C1 (en) Klystron
JP3258059B2 (en) Klystron equipment
JP7385076B1 (en) magnetron
RU2046439C1 (en) Microelectronic s h f triode
JPH11354298A (en) High frequency type accelerating tube
JPS5740845A (en) Ion beam generator
RU2306685C1 (en) Charged particle accelerator
KR20020004934A (en) Plasma source of linear beam ions
US5457361A (en) Ion removing device, ion removing method and electron accumulating ring having ion removing device
JP3401821B2 (en) Electron gun for hollow electron beam emission
US2846618A (en) Magnetron
US3368100A (en) Vacuum pump having a radially segmented, annular anode
RU2281621C1 (en) Emitter of electrons