JPH0498211A - Method for adjusting parallelism of fabry-perot resonator - Google Patents
Method for adjusting parallelism of fabry-perot resonatorInfo
- Publication number
- JPH0498211A JPH0498211A JP21657890A JP21657890A JPH0498211A JP H0498211 A JPH0498211 A JP H0498211A JP 21657890 A JP21657890 A JP 21657890A JP 21657890 A JP21657890 A JP 21657890A JP H0498211 A JPH0498211 A JP H0498211A
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- axis
- semi
- piezo
- parallel
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Links
- 238000000034 method Methods 0.000 title description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
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Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
この発明は、フアブリ・ペロー共振器（以下、単に共振
器という。）の′Ｘ１１行度調整方法についてのもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for adjusting the 'X11 degree of a Fabry-Perot resonator (hereinafter simply referred to as a resonator).
［従来の技術］ 次に、共振器の構成を第２図により説明する。[Conventional technology] Next, the structure of the resonator will be explained with reference to FIG.
第２図の１と２は半透過鏡、３〜５はピエゾ素子、１１
は光である。１〜５で共振器１０を構成する。1 and 2 in Figure 2 are semi-transparent mirrors, 3 to 5 are piezo elements, 11
is light. 1 to 5 constitute a resonator 10.
半透過鏡１は光１１に直角に配置される。半透過鏡２は
、半透過鏡１と平行に配置される。ピエゾ素子３〜５は
、半透過鏡２に接続され、電圧を加えることにより、半
透過鏡２の位置を移動させ、半透過鏡１と半透過鏡２の
距離を変化させる。The semi-transparent mirror 1 is arranged at right angles to the light 11. The semi-transmissive mirror 2 is arranged parallel to the semi-transmissive mirror 1. The piezo elements 3 to 5 are connected to the semi-transmissive mirror 2, and by applying a voltage, the position of the semi-transmissive mirror 2 is moved and the distance between the semi-transmissive mirror 1 and the semi-transmissive mirror 2 is changed.
半透過鏡１に入射した光１１は、半透過鏡１と半透過鏡
２の間で多重反射を起こし、反射のたびに、光１．１の
一部は反射しないで、半透過鏡２を透過する。光１１の
透過成分の位相が一致すると、透過成分を合計した光強
度が最大となる。それ以外の波長をもつ光の場合は、透
過成分の位相が一致しないので、透過成分を合計した光
強度は小さい。いいかえると、特定の波長成分だけが高
い透過率をもつことになる。The light 11 incident on the semi-transmissive mirror 1 causes multiple reflections between the semi-transmissive mirror 1 and the semi-transmissive mirror 2, and at each reflection, a part of the light 1.1 is not reflected and passes through the semi-transmissive mirror 2. To Penetrate. When the phases of the transmitted components of the light 11 match, the total light intensity of the transmitted components becomes maximum. In the case of light having other wavelengths, the phases of the transmitted components do not match, so the total light intensity of the transmitted components is small. In other words, only specific wavelength components have high transmittance.
ピエゾ素子３〜５は、印加電圧に比例して全長が増減す
る素子である。ピエゾ素子３〜５に電圧を加えると、電
圧に比例した伸縮がピエゾ素子３〜５に生じ、半透過鏡
１・２の間の距離が変化する。その結果、透過率が最大
になる波長を変えることができる。The piezo elements 3 to 5 are elements whose total length increases or decreases in proportion to the applied voltage. When a voltage is applied to the piezo elements 3 to 5, the piezo elements 3 to 5 expand and contract in proportion to the voltage, and the distance between the semi-transparent mirrors 1 and 2 changes. As a result, the wavelength at which the transmittance is maximum can be changed.
次に、第２図の共振器１０を使用した装置の構成を第３
図より説明する。第３図の６は駆動回路、７は制御回路
、８は光検出器、９は波形表示器である。Next, the configuration of the device using the resonator 10 shown in FIG.
This will be explained from the diagram. In FIG. 3, 6 is a drive circuit, 7 is a control circuit, 8 is a photodetector, and 9 is a waveform display.
共振器」０を透過した光１１は、光検出器８によって、
光の強さに比例した電圧に変換される。The light 11 transmitted through the resonator 0 is detected by the photodetector 8,
It is converted into a voltage proportional to the intensity of light.
光検出器８の出力は、波形表示器９のＹ軸入力に接続さ
れる。また、制御回路７の出力は波形表示器９のＸ軸入
力に接続される。The output of photodetector 8 is connected to the Y-axis input of waveform display 9. Further, the output of the control circuit 7 is connected to the X-axis input of the waveform display 9.
制御回路７は駆動回路６を制御し、ピエゾ素子３〜５に
繰り返し掃引するのこぎり波を加えれば、半透過鏡２が
半透過鏡１に対し平行なままでＪｉｉ）弓電圧にしたが
って移動するので、共振器１０の透過率が最大になる波
長が連続的に変化し、各波長に対応する透過光の強さが
光検出器８によって電気信号に変換される。したがって
、光１１の波長対レベル特性が波形表示器９上に描き出
される。The control circuit 7 controls the drive circuit 6 and applies a repetitively sweeping sawtooth wave to the piezo elements 3 to 5, so that the semi-transparent mirror 2 remains parallel to the semi-transparent mirror 1 and moves according to the bow voltage. , the wavelength at which the transmittance of the resonator 10 is maximum changes continuously, and the intensity of transmitted light corresponding to each wavelength is converted into an electrical signal by the photodetector 8. Therefore, the wavelength versus level characteristic of the light 11 is depicted on the waveform display 9.
［発明が解決しようとする課題］
共振器１０は、２個の半透過鏡１・２の間で起こる多重
反射を利用したものであり、２個の半透過鏡］・２が完
全に平行に対向していないと、十分な分ｙｔ、特性を得
ることができない。[Problem to be solved by the invention] The resonator 10 utilizes multiple reflections that occur between two semi-transmissive mirrors 1 and 2, and the two semi-transmissive mirrors] and 2 are completely parallel to each other. If they are not opposed, sufficient characteristics cannot be obtained.
次に、共振器１０を透過した光１１の波長特性を第４図
により説明する。Next, the wavelength characteristics of the light 11 transmitted through the resonator 10 will be explained with reference to FIG.
第４図の実線で示す］、ＩＡは半透過鏡１・２が完全に
平行に対向しているときの透過特性であり、点線で示す
ｉｌＢは２個の半透過鏡１・２が平行でないどきの透過
特性である。１１Ｂのように、半透過鏡１・２の平行度
が十分でないときは、十分な分解能が得られない。そこ
で、半透過鏡１・２の平行度ＭＯＷが不可欠なものとな
っている。[shown by the solid line in Figure 4], IA is the transmission characteristic when the semi-transmissive mirrors 1 and 2 are completely parallel to each other, and ilB, shown by the dotted line, is the transmission characteristic when the two semi-transmissive mirrors 1 and 2 are not parallel. This is an amazing transmission characteristic. When the parallelism of the semi-transmissive mirrors 1 and 2 is insufficient, as in 11B, sufficient resolution cannot be obtained. Therefore, the parallelism MOW of the semi-transparent mirrors 1 and 2 is essential.
次に、従来技術による平行度調整の方法を説明する。１
分スペクトル線幅の細い基準光を入射しておいて、制御
回路７により繰り返し掃引するのこぎり波を発生し、波
形表示器９に基準光の波長対レベル特性を表示させる。Next, a method of parallelism adjustment according to the prior art will be explained. 1
A reference light having a narrow spectral linewidth is input, and a control circuit 7 generates a sawtooth wave that repeatedly sweeps, causing a waveform display 9 to display the wavelength versus level characteristics of the reference light.
このとき基準光源の線幅が十分細ければ、観測されるス
ペクトルの線幅はそのまま共振器１．０の分解能を示す
。そこで、まずピエゾ素子３に加える電圧にオフセット
電圧Ｖを加える。オフセット電圧■を変えると、ピエゾ
素子コ３はピエゾ素子４・５に対し相対的な長さが変わ
るので、半透過鏡１に対する半透過鏡２の角度を変える
ことができる。波形を観測しながら、最もよい分解能が
得られる値にオフセット電圧Ｖを設定する。次に、ピエ
ゾ素子４・５に対しても順次同じＪ、うにオフセット電
圧を加え、分解能が最もよくなった状態に各オフセット
電圧を保持し、調整を完了する。At this time, if the line width of the reference light source is sufficiently thin, the line width of the observed spectrum directly indicates the resolution of the resonator 1.0. Therefore, first, an offset voltage V is added to the voltage applied to the piezo element 3. By changing the offset voltage (2), the relative length of the piezo element 3 to the piezo elements 4 and 5 changes, so the angle of the semi-transmitting mirror 2 with respect to the semi-transmitting mirror 1 can be changed. While observing the waveform, set the offset voltage V to a value that provides the best resolution. Next, the same offset voltages are sequentially applied to the piezo elements 4 and 5, and each offset voltage is maintained in the state where the resolution is the best, completing the adjustment.
次に、従来技術のオフセット電圧による調整方法を第５
図により説明する。Next, the adjustment method using the offset voltage of the prior art will be explained in the fifth section.
This will be explained using figures.
第５図のように、ピエゾ素子３〜５は、半透過ｌｌ１Ｉ
！２に対して１２０°聞隔で配置されている。したがっ
て、ピエゾ素子；３のオフセット電圧を変えると、！１
′、透過鏡２はＡ軸に対して回転する。また、ピエゾ素
子４のオフセット電圧を変えると、半透過鏡２はＢ軸に
対して回転する。ピエゾ素子５のオフセット電圧を変え
ると、半透過鏡はＣ軸に対して回転する。Ａ軸・Ｂ軸・
Ｃ軸は、互いに直行しておらず、１２０°の角で交わっ
ているので、１個のピエゾ素子を動かすと、対応する軸
方向に回転するが、その中には他の２個の軸に沿った目
脂成分が含ま扛ていることになる。したがって、１個の
ピエゾ素子を調整すると、他のピエゾ素子の最適点が変
化してしまうので、３個のピエゾ素子３〜５をそれぞれ
１回ずつ調整しただけでは、十分な平行度が得られず、
分解能が最適にならない。１・分な調整をするためには
、３個のピエゾ素子の調整を、１本ずつ順番に、何回も
行わなければならない。このため、調整に時間がかかる
という問題がある。As shown in FIG. 5, the piezo elements 3 to 5 are semi-transparent
! They are arranged at 120° intervals relative to 2. Therefore, if you change the offset voltage of piezo element 3, ! 1
', the transmitting mirror 2 rotates about the A axis. Furthermore, when the offset voltage of the piezo element 4 is changed, the semi-transmissive mirror 2 rotates about the B axis. When the offset voltage of the piezo element 5 is changed, the semi-transparent mirror rotates about the C-axis. A-axis, B-axis,
The C-axes are not perpendicular to each other, but intersect at an angle of 120°, so when one piezo element is moved, it rotates in the corresponding axis direction, but some of the C-axes are not perpendicular to each other. This means that it contains eye oil components. Therefore, adjusting one piezo element will change the optimum point of the other piezo elements, so adjusting each of the three piezo elements 3 to 5 once will not provide sufficient parallelism. figure,
Resolution is not optimal. In order to make a one-minute adjustment, the three piezo elements must be adjusted one by one several times. Therefore, there is a problem that adjustment takes time.
この発明は、［整回数が２回ですみ、調整に要する時間
を短くすることができる共振器の平行度調整方法の提供
を目的とする。An object of the present invention is to provide a method for adjusting the parallelism of a resonator, which requires only two integers and can shorten the time required for adjustment.
［課題を解決するための手段］
この目的を達成するため、この発明では、光１１に直角
に配置される第１の半透過鏡１と、第１の半透過鏡１．
と平行に配置される第２の半透過鏡２と、第２の半透過
鏡２に接続され、電圧を加えることにより、第２の半透
過鏡２の位置を移動させ、第、ｌの半透過鏡１と第２の
半透過鏡２の距離を変化させる複数のピエゾ素子とを備
えるファブリ・ベロー共振器に対し、前記複数のピエゾ
素子に同時に制御電圧を加え、第２の半透過鏡２に平行
な第１の基準軸に沿って回転させ、分解能が最もよくな
る角度に設定し、次に第２の半透過鏡２に平行で第１．
の基準軸に対し直交する第２の基準軸に沿って回転をさ
せ、分解能が最もよくなる角度に設定する。[Means for Solving the Problems] In order to achieve this object, the present invention includes a first semi-transmitting mirror 1 disposed perpendicular to the light 11, a first semi-transmitting mirror 1.
A second half-transmitting mirror 2 is connected to the second half-transmitting mirror 2, which is arranged in parallel with For a Fabry-Bello resonator that includes a plurality of piezo elements that change the distance between the transmitting mirror 1 and the second semi-transmitting mirror 2, a control voltage is simultaneously applied to the plurality of piezo elements to change the distance between the second semi-transmitting mirror 2. The first reference axis is rotated along the first reference axis parallel to the mirror 2 and set at an angle that provides the best resolution, and then the second semi-transparent mirror 2 is rotated along the first reference axis.
The rotation is performed along a second reference axis perpendicular to the reference axis of , and the angle is set at an angle that provides the best resolution.
［作用］
欣に、この発明による共振器の平行度調整方法を第１図
により説明する。[Function] The method for adjusting the parallelism of a resonator according to the present invention will now be explained with reference to FIG.
第１図のＹ軸は半透過鏡２に平行で半透過鏡２の中心と
ピエゾ素子３の取付位置を通る第１．の基準軸であり、
Ｘ軸は半透過鏡２に平行で半透過鏡２の中心を通り、Ｙ
軸に直角な第２の基準軸である。The Y axis in FIG. 1 is parallel to the semi-transmissive mirror 2 and passes through the center of the semi-transmissive mirror 2 and the mounting position of the piezo element 3. is the reference axis of
The X axis is parallel to the semi-transparent mirror 2 and passes through the center of the semi-transparent mirror 2, and the Y axis
A second reference axis perpendicular to the axis.
第１図のピエゾ素子４・５に加えている電圧に、オフセ
ット電圧■８を加え、同時に、ピエゾ素子３に、オフセ
ット電圧−２ｘＶｘを加えると、半透過鏡２は、Ｘ軸に
沿って一定角度だけ回転するが、Ｙ軸に沿った方向に対
してはほとんど回転しない。また、ピエゾ素子４にオフ
セット電圧■７を加え、同時にピエゾ素子５にオフセッ
ト電圧−ｖＹを加え、ピエゾ素子３の電圧はそのままに
しておくと、半透過鏡２は、Ｙ軸に沿って一定角度だけ
回転するが、Ｘ軸に沿った方向に対してはほとんど回１
転しない。When an offset voltage (8) is added to the voltage applied to the piezo elements 4 and 5 in Fig. 1, and at the same time an offset voltage of -2xVx is applied to the piezo element 3, the semi-transparent mirror 2 becomes constant along the X axis. It rotates by an angle, but hardly rotates in the direction along the Y axis. Also, if an offset voltage 7 is applied to the piezo element 4, and an offset voltage -vY is simultaneously applied to the piezo element 5, and the voltage of the piezo element 3 is left as is, the semi-transparent mirror 2 will move at a constant angle along the Y axis. , but almost 1 rotation in the direction along the X axis.
Doesn't roll.
そこで、平行度を調整するときは、ピエゾ素子３〜５の
オフセット電圧を変化させることにより半透過鏡２をＸ
軸に沿った方向に対して回転させながら、分解能が最も
よくなる角度を検出し、その状態に各オフセット電圧を
保持する。この状態の掃引電圧をＶとすると、ピエゾ素
子３に加えられる電圧はＶ−２ＸＶ、、ピエゾ素子４・
５に加えられる電圧はＶ 十Ｖｘである。Therefore, when adjusting the parallelism, by changing the offset voltage of the piezo elements 3 to 5, the semi-transparent mirror 2 is
While rotating in the direction along the axis, the angle that provides the best resolution is detected, and each offset voltage is maintained at that state. If the sweep voltage in this state is V, then the voltage applied to the piezo element 3 is V-2XV, and the piezo element 4.
The voltage applied to 5 is V + Vx.
次に、ピエゾ素子３〜５のオフセット電圧を変化させる
ことにより半透過鏡２をＹ軸に沿った方向に対して回転
させながら、分解能が最もよくなる角度を検出し、その
状態に各オフセット電圧を保持する。Next, while rotating the semi-transmissive mirror 2 in the direction along the Y-axis by changing the offset voltages of the piezo elements 3 to 5, the angle at which the resolution is the best is detected, and each offset voltage is applied to that state. Hold.
ピエゾ素子３の印加電圧はＶ−２ＸＶケ、ピエゾ素子４
の印加電圧はＶ＋Ｖｘ ＋ＶＹ、ピエゾ素子５の印加電
圧はＶ＋Ｖｘ Ｖｙになる。The voltage applied to piezo element 3 is V-2XV, piezo element 4
The voltage applied to the piezo element 5 is V+Vx +VY, and the voltage applied to the piezo element 5 is V+Vx Vy.
Ｘ軸とＹ軸は互いに直角なので、Ｙ軸に沿って回転さぜ
るとき、Ｘ軸に沿った方向の回転成分はほとんど発生せ
ず、Ｘ軸方向の最適角度はほとんど変化しない。したが
って、Ｙ軸に沿って調整をした後で、Ｘ軸方向の調整を
再度行う必要がない。Since the X-axis and the Y-axis are perpendicular to each other, when rotating along the Y-axis, almost no rotation component occurs along the X-axis, and the optimum angle in the X-axis direction hardly changes. Therefore, after adjusting along the Y-axis, there is no need to perform adjustment in the X-axis direction again.
したがって調整の回数が２回ですみ、調整に要する時間
が短＜ ”（すむ。Therefore, the number of adjustments is only two, and the time required for adjustment is short.
第１図では、ピエゾ素子が３個の場合を説明しているが
、ピエゾ素子の数が３個でなくても、複数のピエゾ素子
を同時に制御することによりＸ軸とＹ軸に沿った方向に
回転させることにより、この発明を適用することができ
る。Fig. 1 explains the case where there are three piezo elements, but even if the number of piezo elements is not three, it is possible to control multiple piezo elements at the same time in the direction along the X and Y axes. This invention can be applied by rotating it.
［発明の効果］
この発明によれば、共振器の平行度を調整をするときに
、複数のピエゾ素子を同時に制御することにより、半透
過鏡に平行な第１の基準軸に沿って回転をさせながら分
解能が最もよくなる角度に設定し、次に半透過鏡に平行
で第１の基準軸に対し直交する第２の基準軸に沿って回
転をさせながら分解能が最もよくなる角度に設定するの
で、調整回数が２回ですみ、調整に要する時間を短くす
ることができる。[Effects of the Invention] According to the present invention, when adjusting the parallelism of the resonator, by controlling a plurality of piezo elements at the same time, rotation is performed along the first reference axis parallel to the semi-transparent mirror. The angle that gives the best resolution is set while rotating, and then the angle that gives the best resolution is set while rotating along the second reference axis that is parallel to the semi-transmissive mirror and orthogonal to the first reference axis. The number of adjustments required is only two, and the time required for adjustment can be shortened.
第１図はこの発明による共振器の平行度調整方法の説明
図、第２図は共振器の構成図、第３図は一
第２図の共振器１０を使用した装置の構成図、第４図は
共振器１０を透過した光１１の波長特性図、第５図は従
来技術のオフセット電圧による調整方法の説明図である
。
１・２・・・・・・半透過鏡、３〜５・・・・・・ピエ
ゾ素子、６・・・・・・駆動回路、７・・・・・・制御
回路、８・・・・・・光検出器、９・・・・・・波形表
示器、１０・・・・・・共振器、１１・・・・・・光。
代理人 弁理士 小 俣 欽 司FIG. 1 is an explanatory diagram of a method for adjusting the parallelism of a resonator according to the present invention, FIG. 2 is a configuration diagram of the resonator, FIG. 3 is a configuration diagram of a device using the resonator 10 shown in FIGS. The figure is a wavelength characteristic diagram of the light 11 transmitted through the resonator 10, and FIG. 5 is an explanatory diagram of a conventional adjustment method using an offset voltage. 1, 2...Semi-transparent mirror, 3-5...Piezo element, 6...Drive circuit, 7...Control circuit, 8... ...Photodetector, 9...Waveform display, 10...Resonator, 11...Light. Agent Patent Attorney Kinji Komata
Claims (1)
）と、 第１の半透過鏡（１）と平行に配置される第２の半透過
鏡（２）と、 第２の半透過鏡（２）に接続され、電圧を加えることに
より、第２の半透過鏡（２）の位置を移動させ、第１の
半透過鏡（１）と第２の半透過鏡（２）の距離を変化さ
せる複数のピエゾ素子とを備えるフアブリ・ペロー共振
器に対し、 前記複数のピエゾ素子を同時に制御電圧を 加え、第２の半透過鏡（２）に平行な第１の基準軸に沿
って回転をさせ、分解能が最もよくなる角度に設定し、
次に第２の半透過鏡（２）に平行で第１の基準軸に対し
直交する第２の基準軸に沿って回転をさせ、分解能が最
もよくなる角度に設定することを特徴とするフアブリ・
ペロー共振器の平行度調整方法。[Claims] 1. A first semi-transparent mirror (11) disposed at right angles to the light (11);
), a second semi-transmissive mirror (2) arranged parallel to the first semi-transmissive mirror (1), and a second semi-transmissive mirror (2) connected to the second semi-transparent mirror (2), A Fabry-Perot resonator comprising a plurality of piezo elements for moving the position of the semi-transmitting mirror (2) and changing the distance between the first semi-transmitting mirror (1) and the second semi-transmitting mirror (2). On the other hand, applying a control voltage to the plurality of piezo elements at the same time, rotating them along the first reference axis parallel to the second semi-transmissive mirror (2), and setting the angle at which the resolution is the best;
The Fabry mirror is then rotated along a second reference axis that is parallel to the second semi-transparent mirror (2) and perpendicular to the first reference axis, and is set at an angle that provides the best resolution.
How to adjust the parallelism of a Perot resonator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21657890A JP3039969B2 (en) | 1990-08-17 | 1990-08-17 | Parallelism adjustment method of Fabry-Perot resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21657890A JP3039969B2 (en) | 1990-08-17 | 1990-08-17 | Parallelism adjustment method of Fabry-Perot resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0498211A true JPH0498211A (en) | 1992-03-30 |
| JP3039969B2 JP3039969B2 (en) | 2000-05-08 |
Family
ID=16690615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21657890A Expired - Lifetime JP3039969B2 (en) | 1990-08-17 | 1990-08-17 | Parallelism adjustment method of Fabry-Perot resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3039969B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008047773A1 (en) * | 2006-10-18 | 2008-04-24 | Olympus Corporation | Variable spectral element and endoscope system using the same |
| JP2010224265A (en) * | 2009-03-24 | 2010-10-07 | Olympus Corp | Inclination angle control method for fabry-perot variable interference filter |
| JP2012187242A (en) * | 2011-03-10 | 2012-10-04 | Hoya Corp | Filter calibration device and electronic endoscope system |
-
1990
- 1990-08-17 JP JP21657890A patent/JP3039969B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008047773A1 (en) * | 2006-10-18 | 2008-04-24 | Olympus Corporation | Variable spectral element and endoscope system using the same |
| JP2008102269A (en) * | 2006-10-18 | 2008-05-01 | Olympus Corp | Variable spectroscopic element and endoscope system equipped with the same |
| US8194252B2 (en) | 2006-10-18 | 2012-06-05 | Olympus Corporation | Variable spectroscopic element and endoscope system having the same |
| JP2010224265A (en) * | 2009-03-24 | 2010-10-07 | Olympus Corp | Inclination angle control method for fabry-perot variable interference filter |
| US8649097B2 (en) | 2009-03-24 | 2014-02-11 | Olympus Corporation | Method of controlling inclination angle of Fabry-Perot tunable filters |
| JP2012187242A (en) * | 2011-03-10 | 2012-10-04 | Hoya Corp | Filter calibration device and electronic endoscope system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3039969B2 (en) | 2000-05-08 |
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