JPH0497729U - - Google Patents
Info
- Publication number
- JPH0497729U JPH0497729U JP159091U JP159091U JPH0497729U JP H0497729 U JPH0497729 U JP H0497729U JP 159091 U JP159091 U JP 159091U JP 159091 U JP159091 U JP 159091U JP H0497729 U JPH0497729 U JP H0497729U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drilling And Boring (AREA)
- Relays Between Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP159091U JPH0497729U (en) | 1991-01-23 | 1991-01-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP159091U JPH0497729U (en) | 1991-01-23 | 1991-01-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0497729U true JPH0497729U (en) | 1992-08-24 |
Family
ID=31729043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP159091U Pending JPH0497729U (en) | 1991-01-23 | 1991-01-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0497729U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006096498A (en) * | 2004-09-29 | 2006-04-13 | Shimadzu Corp | Substrate conveying device and vacuum processing device with the same |
-
1991
- 1991-01-23 JP JP159091U patent/JPH0497729U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006096498A (en) * | 2004-09-29 | 2006-04-13 | Shimadzu Corp | Substrate conveying device and vacuum processing device with the same |
JP4581602B2 (en) * | 2004-09-29 | 2010-11-17 | 株式会社島津製作所 | Vacuum processing equipment |