JPH0497336U - - Google Patents

Info

Publication number
JPH0497336U
JPH0497336U JP7985491U JP7985491U JPH0497336U JP H0497336 U JPH0497336 U JP H0497336U JP 7985491 U JP7985491 U JP 7985491U JP 7985491 U JP7985491 U JP 7985491U JP H0497336 U JPH0497336 U JP H0497336U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7985491U
Other languages
Japanese (ja)
Other versions
JPH071795Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1991079854U priority Critical patent/JPH071795Y2/ja
Publication of JPH0497336U publication Critical patent/JPH0497336U/ja
Application granted granted Critical
Publication of JPH071795Y2 publication Critical patent/JPH071795Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1991079854U 1990-09-10 1991-09-05 浸漬型基板洗浄装置 Expired - Lifetime JPH071795Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991079854U JPH071795Y2 (ja) 1990-09-10 1991-09-05 浸漬型基板洗浄装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2-95381 1990-09-10
JP9538190 1990-09-10
JP1991079854U JPH071795Y2 (ja) 1990-09-10 1991-09-05 浸漬型基板洗浄装置

Publications (2)

Publication Number Publication Date
JPH0497336U true JPH0497336U (cs) 1992-08-24
JPH071795Y2 JPH071795Y2 (ja) 1995-01-18

Family

ID=31948714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991079854U Expired - Lifetime JPH071795Y2 (ja) 1990-09-10 1991-09-05 浸漬型基板洗浄装置

Country Status (1)

Country Link
JP (1) JPH071795Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07106408A (ja) * 1993-10-05 1995-04-21 Kaijo Corp 基板保持カセット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125136A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 処理槽
JPS63271937A (ja) * 1987-04-28 1988-11-09 Matsushita Electric Ind Co Ltd 洗浄装置
JPH0276837U (cs) * 1988-11-30 1990-06-13

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125136A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 処理槽
JPS63271937A (ja) * 1987-04-28 1988-11-09 Matsushita Electric Ind Co Ltd 洗浄装置
JPH0276837U (cs) * 1988-11-30 1990-06-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07106408A (ja) * 1993-10-05 1995-04-21 Kaijo Corp 基板保持カセット

Also Published As

Publication number Publication date
JPH071795Y2 (ja) 1995-01-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term