JPH0497296U - - Google Patents

Info

Publication number
JPH0497296U
JPH0497296U JP131791U JP131791U JPH0497296U JP H0497296 U JPH0497296 U JP H0497296U JP 131791 U JP131791 U JP 131791U JP 131791 U JP131791 U JP 131791U JP H0497296 U JPH0497296 U JP H0497296U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP131791U
Other languages
Japanese (ja)
Other versions
JP2561859Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP131791U priority Critical patent/JP2561859Y2/ja
Publication of JPH0497296U publication Critical patent/JPH0497296U/ja
Application granted granted Critical
Publication of JP2561859Y2 publication Critical patent/JP2561859Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Tunnel Furnaces (AREA)
JP131791U 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉 Expired - Lifetime JP2561859Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP131791U JP2561859Y2 (ja) 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP131791U JP2561859Y2 (ja) 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉

Publications (2)

Publication Number Publication Date
JPH0497296U true JPH0497296U (enrdf_load_stackoverflow) 1992-08-24
JP2561859Y2 JP2561859Y2 (ja) 1998-02-04

Family

ID=31728596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP131791U Expired - Lifetime JP2561859Y2 (ja) 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉

Country Status (1)

Country Link
JP (1) JP2561859Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JP2561859Y2 (ja) 1998-02-04

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