JPH049634U - - Google Patents
Info
- Publication number
- JPH049634U JPH049634U JP5047790U JP5047790U JPH049634U JP H049634 U JPH049634 U JP H049634U JP 5047790 U JP5047790 U JP 5047790U JP 5047790 U JP5047790 U JP 5047790U JP H049634 U JPH049634 U JP H049634U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- filter
- porous plate
- silicon
- porosity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例を示す説明図、第２
図は同上実施例において使用しているフイルター
エレメントを示す説明図である。
Ａ……シリコン単結晶の多孔質板。
Fig. 1 is an explanatory diagram showing one embodiment of the present invention;
The figure is an explanatory diagram showing a filter element used in the above embodiment. A... Porous plate of silicon single crystal.
Claims (1)
て構成したことを特徴とする濾過器。 (2) 請求項(1)において、シリコン単結晶の多孔
質板の孔径を０．００１μｍ〜１０００μｍ、厚
みを１０μｍ〜１cm、空孔率を２０％〜９９％と
したことを特徴とする濾過器。[Claims for Utility Model Registration] (1) A filter characterized in that the filter membrane is composed of a porous plate of single crystal silicon. (2) The filter according to claim (1), characterized in that the silicon single crystal porous plate has a pore diameter of 0.001 μm to 1000 μm, a thickness of 10 μm to 1 cm, and a porosity of 20% to 99%. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990050477U JP2511664Y2 (en) | 1990-05-15 | 1990-05-15 | Filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990050477U JP2511664Y2 (en) | 1990-05-15 | 1990-05-15 | Filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH049634U true JPH049634U (en) | 1992-01-28 |
| JP2511664Y2 JP2511664Y2 (en) | 1996-09-25 |
Family
ID=31569057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990050477U Expired - Lifetime JP2511664Y2 (en) | 1990-05-15 | 1990-05-15 | Filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2511664Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117611A (en) * | 1985-11-15 | 1987-05-29 | Mitsubishi Electric Corp | Filter |
-
1990
- 1990-05-15 JP JP1990050477U patent/JP2511664Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117611A (en) * | 1985-11-15 | 1987-05-29 | Mitsubishi Electric Corp | Filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2511664Y2 (en) | 1996-09-25 |
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