JPH049601U - - Google Patents
Info
- Publication number
- JPH049601U JPH049601U JP5047690U JP5047690U JPH049601U JP H049601 U JPH049601 U JP H049601U JP 5047690 U JP5047690 U JP 5047690U JP 5047690 U JP5047690 U JP 5047690U JP H049601 U JPH049601 U JP H049601U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- filtration device
- chemical
- single crystal
- silicon single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001914 filtration Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
Description
図面は本考案の一実施例を示す説明図である。
１……薬品槽、Ａ……濾過膜を用いた濾過器、
Ｂ……シリコン単結晶を用いた濾過器。
Ｂ……シリコン単結晶を用いた濾過器。
Claims (1)
- 【実用新案登録請求の範囲】 (1) 薬品を循環・濾過する濾過装置において、
孔径０．０１〜１０μｍの濾過膜を有する濾過器
Ａと、シリコン単結晶を濾過材とする濾過器Ｂと
を直列に接続して成ることを特徴とする薬品濾過
装置。 (2) 請求項(1)において、濾過器Ａの下流側に濾
過器Ｂを接続したことを特徴とする薬品濾過装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5047690U JPH049601U (ja) | 1990-05-15 | 1990-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5047690U JPH049601U (ja) | 1990-05-15 | 1990-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH049601U true JPH049601U (ja) | 1992-01-28 |
Family
ID=31569055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5047690U Pending JPH049601U (ja) | 1990-05-15 | 1990-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH049601U (ja) |
-
1990
- 1990-05-15 JP JP5047690U patent/JPH049601U/ja active Pending