JPH0493149U - - Google Patents
Info
- Publication number
- JPH0493149U JPH0493149U JP40146190U JP40146190U JPH0493149U JP H0493149 U JPH0493149 U JP H0493149U JP 40146190 U JP40146190 U JP 40146190U JP 40146190 U JP40146190 U JP 40146190U JP H0493149 U JPH0493149 U JP H0493149U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40146190U JP2527709Y2 (ja) | 1990-12-25 | 1990-12-25 | 半導体製造装置の搬送部品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40146190U JP2527709Y2 (ja) | 1990-12-25 | 1990-12-25 | 半導体製造装置の搬送部品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0493149U true JPH0493149U (cs) | 1992-08-13 |
| JP2527709Y2 JP2527709Y2 (ja) | 1997-03-05 |
Family
ID=31879553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40146190U Expired - Lifetime JP2527709Y2 (ja) | 1990-12-25 | 1990-12-25 | 半導体製造装置の搬送部品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2527709Y2 (cs) |
-
1990
- 1990-12-25 JP JP40146190U patent/JP2527709Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2527709Y2 (ja) | 1997-03-05 |