JPH0493138U - - Google Patents

Info

Publication number
JPH0493138U
JPH0493138U JP40145890U JP40145890U JPH0493138U JP H0493138 U JPH0493138 U JP H0493138U JP 40145890 U JP40145890 U JP 40145890U JP 40145890 U JP40145890 U JP 40145890U JP H0493138 U JPH0493138 U JP H0493138U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP40145890U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40145890U priority Critical patent/JPH0493138U/ja
Publication of JPH0493138U publication Critical patent/JPH0493138U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP40145890U 1990-12-25 1990-12-25 Pending JPH0493138U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40145890U JPH0493138U (enrdf_load_stackoverflow) 1990-12-25 1990-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40145890U JPH0493138U (enrdf_load_stackoverflow) 1990-12-25 1990-12-25

Publications (1)

Publication Number Publication Date
JPH0493138U true JPH0493138U (enrdf_load_stackoverflow) 1992-08-13

Family

ID=31879550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40145890U Pending JPH0493138U (enrdf_load_stackoverflow) 1990-12-25 1990-12-25

Country Status (1)

Country Link
JP (1) JPH0493138U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007308750A (ja) * 2006-05-17 2007-11-29 Toyo Seikan Kaisha Ltd プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007308750A (ja) * 2006-05-17 2007-11-29 Toyo Seikan Kaisha Ltd プラズマ処理装置

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