JPH04916U - - Google Patents
Info
- Publication number
- JPH04916U JPH04916U JP4027590U JP4027590U JPH04916U JP H04916 U JPH04916 U JP H04916U JP 4027590 U JP4027590 U JP 4027590U JP 4027590 U JP4027590 U JP 4027590U JP H04916 U JPH04916 U JP H04916U
- Authority
- JP
- Japan
- Prior art keywords
- fan
- filter unit
- clean room
- incorporated
- frame body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009434 installation Methods 0.000 claims 1
- 239000011882 ultra-fine particle Substances 0.000 claims 1
- 238000012856 packing Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990040275U JPH0733857Y2 (ja) | 1990-04-17 | 1990-04-17 | クリーンルーム等用ファンフィルタユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990040275U JPH0733857Y2 (ja) | 1990-04-17 | 1990-04-17 | クリーンルーム等用ファンフィルタユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04916U true JPH04916U (enExample) | 1992-01-07 |
| JPH0733857Y2 JPH0733857Y2 (ja) | 1995-08-02 |
Family
ID=31549929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990040275U Expired - Lifetime JPH0733857Y2 (ja) | 1990-04-17 | 1990-04-17 | クリーンルーム等用ファンフィルタユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733857Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60132614A (ja) * | 1983-12-19 | 1985-07-15 | Nitta Kk | 空気清浄装置 |
| JPS62182540A (ja) * | 1986-02-04 | 1987-08-10 | Nitta Kk | 空気清浄装置 |
-
1990
- 1990-04-17 JP JP1990040275U patent/JPH0733857Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60132614A (ja) * | 1983-12-19 | 1985-07-15 | Nitta Kk | 空気清浄装置 |
| JPS62182540A (ja) * | 1986-02-04 | 1987-08-10 | Nitta Kk | 空気清浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733857Y2 (ja) | 1995-08-02 |