JPH0489546U - - Google Patents
Info
- Publication number
- JPH0489546U JPH0489546U JP40039690U JP40039690U JPH0489546U JP H0489546 U JPH0489546 U JP H0489546U JP 40039690 U JP40039690 U JP 40039690U JP 40039690 U JP40039690 U JP 40039690U JP H0489546 U JPH0489546 U JP H0489546U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40039690U JPH0489546U (de) | 1990-12-12 | 1990-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40039690U JPH0489546U (de) | 1990-12-12 | 1990-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0489546U true JPH0489546U (de) | 1992-08-05 |
Family
ID=31878644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40039690U Pending JPH0489546U (de) | 1990-12-12 | 1990-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0489546U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005087972A1 (ja) * | 2004-03-12 | 2005-09-22 | Shinmaywa Industries, Ltd. | 成膜装置 |
-
1990
- 1990-12-12 JP JP40039690U patent/JPH0489546U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005087972A1 (ja) * | 2004-03-12 | 2005-09-22 | Shinmaywa Industries, Ltd. | 成膜装置 |