JPH0488044U - - Google Patents
Info
- Publication number
- JPH0488044U JPH0488044U JP40312190U JP40312190U JPH0488044U JP H0488044 U JPH0488044 U JP H0488044U JP 40312190 U JP40312190 U JP 40312190U JP 40312190 U JP40312190 U JP 40312190U JP H0488044 U JPH0488044 U JP H0488044U
- Authority
- JP
- Japan
- Prior art keywords
- steel rod
- outer cylinder
- rod damper
- cylinder
- circumferential surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 238000013016 damping Methods 0.000 claims description 2
- 238000002955 isolation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40312190U JPH0737315Y2 (ja) | 1990-12-11 | 1990-12-11 | 熱処理装置の基板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40312190U JPH0737315Y2 (ja) | 1990-12-11 | 1990-12-11 | 熱処理装置の基板搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0488044U true JPH0488044U (cs) | 1992-07-30 |
| JPH0737315Y2 JPH0737315Y2 (ja) | 1995-08-23 |
Family
ID=31880950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40312190U Expired - Lifetime JPH0737315Y2 (ja) | 1990-12-11 | 1990-12-11 | 熱処理装置の基板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737315Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102834790B1 (ko) * | 2023-08-30 | 2025-07-17 | 주식회사 야스 | 증착 시스템의 기판 핸들링 시스템 |
-
1990
- 1990-12-11 JP JP40312190U patent/JPH0737315Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737315Y2 (ja) | 1995-08-23 |