JPH0487650U - - Google Patents

Info

Publication number

JPH0487650U

JPH0487650U JP13021090U JP13021090U JPH0487650U JP H0487650 U JPH0487650 U JP H0487650U JP 13021090 U JP13021090 U JP 13021090U JP 13021090 U JP13021090 U JP 13021090U JP H0487650 U JPH0487650 U JP H0487650U

Authority

JP

Japan

Prior art keywords

interlayer insulating

insulating film

wiring

film

semiconductor device

Prior art date

1990-11-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 8
• 239000000758 substrate Substances 0.000 claims description 2
• 239000010408 film Substances 0.000 claims 8
• 239000011229 interlayer Substances 0.000 claims 7
• 239000002184 metal Substances 0.000 claims 2
• 239000010409 thin film Substances 0.000 claims 2
• 238000005530 etching Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 229920005591 polysilicon Polymers 0.000 description 1