JPH0487637U - - Google Patents
Info
- Publication number
- JPH0487637U JPH0487637U JP40016890U JP40016890U JPH0487637U JP H0487637 U JPH0487637 U JP H0487637U JP 40016890 U JP40016890 U JP 40016890U JP 40016890 U JP40016890 U JP 40016890U JP H0487637 U JPH0487637 U JP H0487637U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40016890U JP2539798Y2 (ja) | 1990-12-07 | 1990-12-07 | 化学気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40016890U JP2539798Y2 (ja) | 1990-12-07 | 1990-12-07 | 化学気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0487637U true JPH0487637U (en:Method) | 1992-07-30 |
| JP2539798Y2 JP2539798Y2 (ja) | 1997-06-25 |
Family
ID=31878458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40016890U Expired - Lifetime JP2539798Y2 (ja) | 1990-12-07 | 1990-12-07 | 化学気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2539798Y2 (en:Method) |
-
1990
- 1990-12-07 JP JP40016890U patent/JP2539798Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2539798Y2 (ja) | 1997-06-25 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19970218 |