JPH0487631U - - Google Patents
Info
- Publication number
- JPH0487631U JPH0487631U JP13078190U JP13078190U JPH0487631U JP H0487631 U JPH0487631 U JP H0487631U JP 13078190 U JP13078190 U JP 13078190U JP 13078190 U JP13078190 U JP 13078190U JP H0487631 U JPH0487631 U JP H0487631U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- furnace
- core tube
- furnace core
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13078190U JPH0487631U (ar) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13078190U JPH0487631U (ar) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487631U true JPH0487631U (ar) | 1992-07-30 |
Family
ID=31878096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13078190U Pending JPH0487631U (ar) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487631U (ar) |
-
1990
- 1990-11-30 JP JP13078190U patent/JPH0487631U/ja active Pending