JPH0487549A - Actuator - Google Patents

Actuator

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Publication number
JPH0487549A
JPH0487549A JP20071790A JP20071790A JPH0487549A JP H0487549 A JPH0487549 A JP H0487549A JP 20071790 A JP20071790 A JP 20071790A JP 20071790 A JP20071790 A JP 20071790A JP H0487549 A JPH0487549 A JP H0487549A
Authority
JP
Japan
Prior art keywords
cylinder
electromagnet
piston
permanent magnet
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20071790A
Other languages
Japanese (ja)
Other versions
JP2780455B2 (en
Inventor
Yoshiko Yoshida
佳子 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2200717A priority Critical patent/JP2780455B2/en
Publication of JPH0487549A publication Critical patent/JPH0487549A/en
Application granted granted Critical
Publication of JP2780455B2 publication Critical patent/JP2780455B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To obtain an actuator producing a large force in which the driving section does not contact the cell by providing a piston being held in a magnetic fluid filled in a cylinder composed of a nonmagnetic material and self floats through the function of a permanent magnet and an electromagnet. CONSTITUTION:An actuator comprises a permanent magnet 12 and an electromagnet 13 disposed, respectively, at the lower and upper parts of a cylinder 11 filled with a magnetic fluid and a piston 10 held in the magnetic fluid and self floats through the function of the permanent magnet 12 and the electromagnet 13. Force to be produced from the piston is controlled by varying the force of the electromagnet 13. The piston 10 is self centered by the function of the magnetic field.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、アクチュエータに関し、特に望遠鏡の主鏡
の支持機構等に利用されるアクチュエータに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an actuator, and particularly to an actuator used as a support mechanism for a primary mirror of a telescope.

〔従来の技術〕[Conventional technology]

第7図は例えば特願平2−40250号明細書に示され
九従来のアクチュエータを示す側面構成図で、図におい
て、(1)は七〜、(2)はセ* (1)内を直進案内
するスライド機構、(3)はばね、(4)は磁性流体ダ
ンパー、(6)は送プ機構である。
FIG. 7 is a side view of a conventional actuator shown in, for example, Japanese Patent Application No. 2-40250. The guiding slide mechanism, (3) is a spring, (4) is a magnetic fluid damper, and (6) is a feeding mechanism.

また、萬8図は特開昭63−144504号公報に示さ
れた従来の7クチユエータのもう1つの例を示す断面図
で、図において、(6)は駆動体、(7)は磁性流体、
(8)は円筒磁石、(9)はコイル、QOはピストン、
(ロ)はシリンダーである。
In addition, Figure 8 is a sectional view showing another example of the conventional 7-cut unit disclosed in JP-A-63-144504. In the figure, (6) is a driving body, (7) is a magnetic fluid,
(8) is a cylindrical magnet, (9) is a coil, QO is a piston,
(b) is a cylinder.

次に動作について説明する。第7図において、送り機構
(6)にてばれ(3)、磁性流体ダンパー員)を伸縮し
てそれに°よって生じる力をスライド機構(2)を介し
て伝える。
Next, the operation will be explained. In FIG. 7, the feed mechanism (6) expands and contracts the magnetic fluid damper member (3) and transmits the resulting force through the slide mechanism (2).

また第10図において、ピストンQOFi円筒磁石(8
)によって自己浮揚しておシ、コイル(9)(電流を加
えることによ)ピストンを上下はせる。
In addition, in Fig. 10, the piston QOFi cylindrical magnet (8
), the coil (9) causes the piston to move up and down (by applying an electric current).

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のアクチュエータは、第7図のものは、機械的に構
造が複雑でメンテナンスが困難であることや、セル(1
)とスライド機構(2)とが接触していることがらセA
/(1)の振動が伝達しやすいという問題点かあシ、第
8図のものは、コイ/L/(9)が円筒磁石(8)の外
側にあシ%また円筒磁石(8)に比してコイル(9)の
作る磁場勾配がその構造上弱いことからアクチュエータ
の力が弱い等の問題点があった。
The conventional actuator shown in Fig. 7 has a complicated mechanical structure and is difficult to maintain.
) and the slide mechanism (2) are in contact with each other.
The problem is that the vibration of /(1) is easy to transmit.In the case of the one in Figure 8, the carp /L/(9) is placed on the outside of the cylindrical magnet (8). In comparison, the magnetic field gradient created by the coil (9) is weak due to its structure, which causes problems such as weak actuator force.

この発明は上記のような問題点を解消するためになされ
たもので、メンテナンスが容易で、駆動部分とセルの接
触がなく、大きな力の出るアクチュエータを得ることを
目的とする0 〔課題を解決するための手段〕 本発明にかかるアクチュエータは、非磁性体からなるシ
リンダーと、このシリンダー内に充填された磁性流体と
、上記シリンダーの下部(または上部〕に、シリンダー
底面(または上面)に磁極を向けて設置された永久磁石
と、上記シリンダーの上部(または下部)に、シリンダ
ー上面(または底面)に磁極を向けて設置された電磁石
と、上記磁性流体中に保持され且つ上記永久磁石と電磁
石の作用で自己浮揚するごときピストンとを備えたもの
である。
This invention was made to solve the above-mentioned problems, and aims to provide an actuator that is easy to maintain, has no contact between the driving part and the cell, and generates a large force. An actuator according to the present invention includes a cylinder made of a non-magnetic material, a magnetic fluid filled in the cylinder, and a magnetic pole on the bottom (or top) of the cylinder at the bottom (or top) of the cylinder. an electromagnet installed at the top (or bottom) of the cylinder with its magnetic pole facing the top (or bottom) of the cylinder; It is equipped with a piston that seems to self-levitate due to its action.

また、本発明の別の発明にかかるアクチュエータは、非
磁性体からなるシリンダーと、このシリンダー内に充填
された磁性渡体と、上記シリンダーの周囲に外接して設
けられた複数個の永久磁石と、これらの永久磁石間に設
置された電磁石と、上記磁性流体中に保持され、且つ上
記永久磁石と電磁石の作用で自己浮揚するごときピスト
ンとを備えたものである。
Further, an actuator according to another aspect of the present invention includes a cylinder made of a non-magnetic material, a magnetic body filled in the cylinder, and a plurality of permanent magnets provided circumscribed around the cylinder. , an electromagnet installed between these permanent magnets, and a piston held in the magnetic fluid and self-levitating by the action of the permanent magnet and the electromagnet.

〔作用〕[Effect]

この発明におけるアクチュエータは、ばねや送シ機構と
いう機械部品がなく、またピストンが磁性流体中に保持
されているのでピストンとシリンダーの接触部分がない
。また、永久磁石と電磁石が直接シリンダーに設置され
ておシ、磁場勾配の制御力が大きく、アクチュエータの
出せる力も大きい0 〔実施例〕 以下、この発明の一実施例を図について説明する。菖l
因において、(ロ)はシリンダー、(7)はシリンダー
ミル内に充填された磁性流体、(2)はシリンダー(6
)の下部に、シリンダー(ロ)の底面に磁極を向けて設
置した永久磁石、L1rtシリンダー(ロ)の上部に5
7リンダ一上面に磁極を向けて設置した電磁石、叫は磁
性流体(7)中に保持され且つ永久磁ミーと電磁石(2
)の作用で自己浮揚するごときピストンである0 次に動作について説明する0永久磁石(2)によって磁
性流体(7)には磁場がかかつており、その作用でピス
トンQOは浮揚している0ピヌトン(至)の比重をPP
1磁性流体゛(7)の比重をPMs重力加速度をg。
The actuator according to the present invention does not have mechanical parts such as a spring or a feeding mechanism, and since the piston is held in a magnetic fluid, there is no contact portion between the piston and the cylinder. Further, since the permanent magnet and the electromagnet are directly installed in the cylinder, the control force of the magnetic field gradient is large, and the force that can be produced by the actuator is also large. [Embodiment] An embodiment of the present invention will be described below with reference to the drawings. irises
In the above, (b) is a cylinder, (7) is a magnetic fluid filled in the cylinder mill, and (2) is a cylinder (6).
), a permanent magnet is installed with the magnetic pole facing the bottom of the cylinder (b), and a permanent magnet is installed at the top of the L1rt cylinder (b).
7 The electromagnet installed with the magnetic pole facing the top surface of the cylinder is held in the magnetic fluid (7), and the permanent magnet and the electromagnet (2) are held in the magnetic fluid (7).
) is a piston that seems to self-levitate due to the action of 0.Next, the operation will be explained.0 A magnetic field is applied to the magnetic fluid (7) by the permanent magnet (2), and the piston QO is levitated by this action.0 pinuton The specific gravity of (to) is PP
1 The specific gravity of the magnetic fluid (7) is PMs, and the gravitational acceleration is g.

a性流体(7)の透磁率、磁化、磁場勾配をμosMs
VH,ピヌトン(2)にかかる外力(またはピストンが
出す力)をfとすると、ピストン(至)にかかる力Fは
次式で表される。
The magnetic permeability, magnetization, and magnetic field gradient of the a-based fluid (7) are μosMs
When the external force (or the force exerted by the piston) applied to VH and pinuton (2) is f, the force F applied to the piston (to) is expressed by the following equation.

F=(Pp−PM)g  #oMVH+f   −−−
−−LL)式(1)のFが0以下になるような磁場を永
久磁ミーによってかけることでピストンαQは浮揚する
。そして電磁石(LIICよって磁場をかけると、電磁
石□□□によって式(1)中のM、VHが変化し、ピス
トンは、F=Oとなる点で浮揚、静止する。このように
して、電磁石(2)の強さを変えることでピストンの出
す力fを制御できる。また磁場の作用でピストンαoh
セルフセンタリングするので、ガイド等をつける必要は
ない。
F=(Pp-PM)g #oMVH+f ---
--LL) The piston αQ levitates by applying a magnetic field such that F in equation (1) becomes 0 or less using a permanent magnet. Then, when a magnetic field is applied by the electromagnet (LIIC), M and VH in equation (1) change due to the electromagnet □□□, and the piston levitates and comes to rest at the point where F=O.In this way, the electromagnet ( By changing the strength of 2), the force f exerted by the piston can be controlled. Also, due to the action of the magnetic field, the piston
Since it is self-centering, there is no need to attach a guide or the like.

なお、上記実施例では、1つのアクチュエータに対し1
つの永久磁石(2)を用いたが、2つの7クチユエータ
で共用してもよい。第2図はその例を表したもので、第
1図に付した番号と同一の番号を付したものは同一の構
成要素でめシ、第2181の永久磁石(2)は1つの永
久aミーで2つのアクチュエータの永久磁石(2)の効
果を兼ねるものであり、複数の7クチユエータを製作す
る場合にスペースや経費の効率が上がる。また、82図
ではアクチユエータが2個の場合について示したが、そ
れ以上の数でも組み合せて使用できる。
In addition, in the above embodiment, one actuator is
Although one permanent magnet (2) is used, two permanent magnets (2) may be used in common. Figure 2 shows an example of this.Those with the same numbers as those in Figure 1 are the same components, and the permanent magnet (2) of No. 2181 is one permanent magnet. This doubles as the effect of the permanent magnets (2) of the two actuators, and increases space and cost efficiency when manufacturing a plurality of seven actuators. Further, although FIG. 82 shows the case where there are two actuators, a larger number can also be used in combination.

また、上記実施例では、シリンダ東の底面側に永久磁石
時、上面側に電磁石(至)を設置したが逆でもよく、底
面側に電磁石(2)、上面tllK永久磁石(2)を設
置してもよい。
In addition, in the above embodiment, the permanent magnet was placed on the bottom side of the east of the cylinder, and the electromagnet (to) was placed on the top side, but the reverse is also possible, and the electromagnet (2) is placed on the bottom side and the top permanent magnet (2) is placed on the top side. You can.

また、磁場勾配を上げるために磁石(2)と電磁石(至
)をシリンダー(ロ)の周シに交互に設置した場合の実
施例を第3図に示す。第3図において、第1図に付した
番号と同一の番号を付したものは同一の構成要素であり
、電磁石(至)が通電していない状態ではシリンダ(6
)の軸方向について磁場勾配は殆んどゼロであり、従っ
て式(1)よシアクチュエータの力はゼロであるが、電
磁石(至)を少しでも通電させ、永久磁石(2)と電磁
石(至)の向い合う面が同極になるようにすると磁場勾
配を生じ、アクチュエータは力を生じる。もちろん、永
久磁石(2)と電磁石(至)の位置は逆であってもよい
し、永久磁石@の代わりに新たに電磁石を設置し、全て
電磁石としても同様の効果を奏する。
Further, FIG. 3 shows an embodiment in which magnets (2) and electromagnets (2) are alternately installed around the circumference of the cylinder (2) in order to increase the magnetic field gradient. In Fig. 3, the parts with the same numbers as those in Fig. 1 are the same components, and when the electromagnet (to) is not energized, the cylinder (6)
), the magnetic field gradient is almost zero in the axial direction, and therefore the force of the shear actuator is zero according to equation (1). ) have the same polarity, creating a magnetic field gradient and the actuator producing a force. Of course, the positions of the permanent magnet (2) and the electromagnet (to) may be reversed, or a new electromagnet is installed in place of the permanent magnet @, and the same effect can be achieved even if all of them are electromagnets.

また、永久磁石を互いに同ffiが向いあうように設置
し、その間に2個(または偶数個)の電磁石(至)を設
置すると、電磁石(至)に通電しない状態でも、永久磁
石(2)の作用でピストン(至)は自己浮揚する。
In addition, if permanent magnets are installed so that the same ffi faces each other, and two (or even number) electromagnets (to) are installed between them, the permanent magnet (to) will remain strong even when the electromagnets (to) are not energized. The action causes the piston to self-levitate.

この場合の実施例を!!411!lに示す。この作用に
よシ、ピストンaQは初期力を持つことになる。この場
合も第3図の場合と同様に、永久磁石りと電磁石(至)
の配tは逆であってもよいし、永久磁石0の代わシに新
たに電磁石を設置し、全て電磁石としても同様の効果を
賽する。また、この永久磁石(ロ)と電磁石(至)の組
み合せで、多数の永久磁石@と電磁石(至)を設置して
本よい。
An example of this case! ! 411! Shown in l. Due to this action, the piston aQ has an initial force. In this case as well, as in the case of Figure 3, the permanent magnet and the electromagnet (to)
The arrangement t may be reversed, or a new electromagnet may be installed in place of the permanent magnet 0, and the same effect can be achieved even if all the magnets are electromagnets. Also, with this combination of permanent magnets (b) and electromagnets (to), it is good to install a large number of permanent magnets and electromagnets (to).

また更に、磁場勾配を大きくするためにシリンダーの側
面に同極ばかシ向けられるように永久磁石(2)と電磁
石Q3を交互に設置した実施例を第5図fa) 、 f
b) K示す。85図(a)riアクチュエータの断面
図、第5図(b)はアクチュエータを上から見た図であ
シ、第5図(b)に示すとおプ、その構造上永久磁石時
と電磁石(至)を薗型に設置する必要がある。これによ
ると大きな磁場勾配VH′f:得ることができ、アクチ
ュエータは非常に大きな力を持つ。なお、第5図(、)
ではシリンダー(ロ)の上端と下端に永久磁石(ロ)を
設置した場合を示したが、永久磁石(2)と電磁石(至
)の配置が交互にさえなっていれば、上場と下端は電磁
石−でもよいし、電磁石@と永久磁石@の数をかえても
よい。また、永久磁石(6)を電磁石(至)に置換して
もよい。そして、第6図に示すように1つの永久m石側
を複数の7クチユエータで共有してもよい。この場合は
その構造上、シリンダー周りにはリターンヨーク(14
a)、(14b)が設置されることになる。この場合も
、第5図と同様の効果を奏する。
Furthermore, in order to increase the magnetic field gradient, an embodiment in which permanent magnets (2) and electromagnets Q3 are alternately installed so that the same polarity is oriented toward the side of the cylinder is shown in Fig. 5 fa) and f.
b) Show K. Figure 85 (a) is a cross-sectional view of the ri actuator, Figure 5 (b) is a view of the actuator viewed from above, and Figure 5 (b) shows that due to its structure, both permanent magnets and electromagnets ( ) must be installed in a sono-shape. According to this, a large magnetic field gradient VH'f can be obtained, and the actuator has a very large force. In addition, Figure 5 (,)
The above shows the case where permanent magnets (B) are installed at the top and bottom ends of the cylinder (B), but as long as the permanent magnets (2) and electromagnets (to) are arranged alternately, the top and bottom ends are electromagnets. -, or the number of electromagnets and permanent magnets may be changed. Further, the permanent magnet (6) may be replaced with an electromagnet (to). Further, as shown in FIG. 6, one permanent m-stone side may be shared by a plurality of seven cutuators. In this case, due to its structure, there is a return yoke (14
a) and (14b) will be installed. In this case as well, the same effect as in FIG. 5 is achieved.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明によれば、非磁性体からなるシリ
ンダーと、このシリンダー内に充填されたa性流体と、
上記シリンダーの下部(または上部)に、シリンダー底
面(または上面)Ka極を向けて設置された永久磁石と
、上記シリンダーの上部(または下部)K、シリンダー
上面(または底面)に磁ffiを向けて設置された電磁
石と、上記磁性流体中に保持され且つ上記永久磁石と電
磁石の作用で自己浮揚するごときピストンとを備えたの
で、また、本発明の別の発明によれば、非磁性体からな
るシリンダーと、このシリンダー内に充填された磁性流
体と、上記シリンダーの周囲に外接して設けられた複数
個の永久磁石と、これらの永久磁石間に設置された電磁
石と、上記磁性流体中に保持され、且つ上記永久磁石と
電磁石の作用で自己浮揚するごときピストンとを備えた
ので、永久磁石や電磁石の作用で磁性流体中のピストン
が浮揚するので、ピストンとシリンダーの接陪部がなく
、電磁石をシリンダーに1接設置したことで大きな力の
出せるアクチュエータが得られる効果がある。
As described above, according to the present invention, a cylinder made of a non-magnetic material, an a-permeable fluid filled in this cylinder,
A permanent magnet is installed at the bottom (or top) of the cylinder with the pole Ka facing the bottom (or top) of the cylinder, and a magnet ffi is installed at the top (or bottom) K of the cylinder and the top (or bottom) of the cylinder. According to another aspect of the present invention, the piston is made of a non-magnetic material and is held in the magnetic fluid and is self-levitating by the action of the permanent magnet and the electromagnet. A cylinder, a magnetic fluid filled in the cylinder, a plurality of permanent magnets circumscribed around the cylinder, an electromagnet installed between these permanent magnets, and a magnet held in the magnetic fluid. In addition, since the piston is self-levitating due to the action of the permanent magnet and electromagnet, the piston in the magnetic fluid levitates due to the action of the permanent magnet and the electromagnet, so there is no joint between the piston and the cylinder, and the electromagnet By installing the actuator in direct contact with the cylinder, it is possible to obtain an actuator that can generate a large amount of force.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例によるアクチュエータを示
す断面図、第2図〜第4図、第5図(a)および第6図
はそれぞれこの発明の他の実施例によるアクチュエータ
を示す断面図、第6図(b) rt第5図(a)の上面
図、稟7図、第8図はそれぞれ従来のアクチュエータを
示す断面図である。 図において、(7)は磁性流体、(至)はピストン、(
ロ)はシリンダー、(2)は永久磁石、a3は電磁石で
ある。
FIG. 1 is a cross-sectional view showing an actuator according to one embodiment of the present invention, and FIGS. 2 to 4, FIG. 5(a), and FIG. 6 are cross-sectional views showing actuators according to other embodiments of the present invention, respectively. , FIG. 6(b) rt The top view of FIG. 5(a), FIG. 7, and FIG. 8 are sectional views showing conventional actuators, respectively. In the figure, (7) is a magnetic fluid, (to) is a piston, (
b) is a cylinder, (2) is a permanent magnet, and a3 is an electromagnet.

Claims (2)

【特許請求の範囲】[Claims] (1)非磁性体からなるシリンダーと、このシリンダー
内に充填された磁性流体と、上記シリンダーの下部(ま
たは上部)に、シリンダー底面(または上面)に磁極を
向けて設置された永久磁石と、上記シリンダーの上部(
または下部)に、シリンダー上面(または底面)に磁極
を向けて設置された電磁石と、上記磁性流体中に保持さ
れ且つ上記永久磁石と電磁石の作用で自己浮揚するごと
きピストンとを備えたアクチュエータ。
(1) A cylinder made of a non-magnetic material, a magnetic fluid filled in the cylinder, and a permanent magnet installed at the bottom (or top) of the cylinder with its magnetic pole facing the bottom (or top) of the cylinder, The top of the cylinder above (
An actuator comprising an electromagnet installed on the top (or bottom) of the cylinder with its magnetic pole facing the top (or bottom) of the cylinder, and a piston held in the magnetic fluid and self-levitating by the action of the permanent magnet and the electromagnet.
(2)非磁性体からなるシリンダーと、このシリンダー
内に充填された磁性流体と、上記シリンダーの周囲に外
接して設けられた複数個の永久磁石と、これらの永久磁
石間に設置された電磁石と、上記磁性流体中に保持され
、且つ上記永久磁石と電磁石の作用で自己浮揚するごと
きピストンとを備えたアクチユエータ。
(2) A cylinder made of a non-magnetic material, a magnetic fluid filled in the cylinder, a plurality of permanent magnets circumscribed around the cylinder, and an electromagnet installed between these permanent magnets. and a piston held in the magnetic fluid and self-levitating by the action of the permanent magnet and electromagnet.
JP2200717A 1990-07-25 1990-07-25 Actuator Expired - Fee Related JP2780455B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2200717A JP2780455B2 (en) 1990-07-25 1990-07-25 Actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2200717A JP2780455B2 (en) 1990-07-25 1990-07-25 Actuator

Publications (2)

Publication Number Publication Date
JPH0487549A true JPH0487549A (en) 1992-03-19
JP2780455B2 JP2780455B2 (en) 1998-07-30

Family

ID=16429037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2200717A Expired - Fee Related JP2780455B2 (en) 1990-07-25 1990-07-25 Actuator

Country Status (1)

Country Link
JP (1) JP2780455B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003100512A (en) * 2001-09-26 2003-04-04 Yuichi Kiryu Electromagnetic actuator
WO2014063561A1 (en) * 2012-10-23 2014-05-01 Feng Lin Parking space magnetic fluid lock

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5832611U (en) * 1981-08-28 1983-03-03 株式会社トーキン solenoid electromagnet
JPS59191882U (en) * 1983-06-08 1984-12-19 三井造船株式会社 actuator
JPS63144504A (en) * 1986-12-09 1988-06-16 Nec Corp Actuator
JPS63125243U (en) * 1987-02-06 1988-08-16
JPH02127373A (en) * 1988-11-07 1990-05-16 Mitsubishi Electric Corp Drive control device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5832611U (en) * 1981-08-28 1983-03-03 株式会社トーキン solenoid electromagnet
JPS59191882U (en) * 1983-06-08 1984-12-19 三井造船株式会社 actuator
JPS63144504A (en) * 1986-12-09 1988-06-16 Nec Corp Actuator
JPS63125243U (en) * 1987-02-06 1988-08-16
JPH02127373A (en) * 1988-11-07 1990-05-16 Mitsubishi Electric Corp Drive control device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003100512A (en) * 2001-09-26 2003-04-04 Yuichi Kiryu Electromagnetic actuator
WO2014063561A1 (en) * 2012-10-23 2014-05-01 Feng Lin Parking space magnetic fluid lock

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Publication number Publication date
JP2780455B2 (en) 1998-07-30

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