JPH0486612U - - Google Patents
Info
- Publication number
- JPH0486612U JPH0486612U JP13082790U JP13082790U JPH0486612U JP H0486612 U JPH0486612 U JP H0486612U JP 13082790 U JP13082790 U JP 13082790U JP 13082790 U JP13082790 U JP 13082790U JP H0486612 U JPH0486612 U JP H0486612U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate transfer
- engaging
- transport device
- transfer tables
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chain Conveyers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13082790U JPH0486612U (cs) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13082790U JPH0486612U (cs) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0486612U true JPH0486612U (cs) | 1992-07-28 |
Family
ID=31878141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13082790U Pending JPH0486612U (cs) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0486612U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01119100A (ja) * | 1987-10-31 | 1989-05-11 | Toshiba Corp | 基板搬送装置 |
-
1990
- 1990-11-30 JP JP13082790U patent/JPH0486612U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01119100A (ja) * | 1987-10-31 | 1989-05-11 | Toshiba Corp | 基板搬送装置 |
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