JPH0485643U - - Google Patents

Info

Publication number
JPH0485643U
JPH0485643U JP12894890U JP12894890U JPH0485643U JP H0485643 U JPH0485643 U JP H0485643U JP 12894890 U JP12894890 U JP 12894890U JP 12894890 U JP12894890 U JP 12894890U JP H0485643 U JPH0485643 U JP H0485643U
Authority
JP
Japan
Prior art keywords
emitter
support plate
electron gun
field emission
emission type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12894890U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12894890U priority Critical patent/JPH0485643U/ja
Publication of JPH0485643U publication Critical patent/JPH0485643U/ja
Pending legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例装置の構成概略図、
第２図は従来例を説明するための図である。 １……エミツタ、４……保持板、１０……フラ
ンジ、１８……電子銃本体、１９ａ，１９ｂ，１
９ｃ……絶縁棒、２０ａ，２０ｂ，２０ｃ……調
整ネジ、２１ａ，２１ｂ，２１ｃ……ビス固定板
。 FIG. 1 is a schematic diagram of the configuration of a device according to an embodiment of the present invention;
FIG. 2 is a diagram for explaining a conventional example. 1... Emitter, 4... Holding plate, 10... Flange, 18... Electron gun body, 19a, 19b, 1
9c...Insulating rod, 20a, 20b, 20c...Adjustment screw, 21a, 21b, 21c...Screw fixing plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] エミツタと、該エミツタを保持する支持板とを
備え、一端が前記保持板と係合し、かつ他が大気
中に取り出された複数の絶縁体を上下動させて支
持板を傾動させることによりエミツタの電子放出
面の中心をアノードの軸に合わせるように構成し
たことを特徴とする電界放出型電子銃の軸整合装
置。 The emitter is equipped with an emitter and a support plate that holds the emitter, one end of which is engaged with the retainer, and the other of which is taken out into the atmosphere by moving up and down a plurality of insulators and tilting the support plate. An axis alignment device for a field emission type electron gun, characterized in that the center of the electron emission surface of the field emission type electron gun is aligned with the axis of the anode.
JP12894890U 1990-11-30 1990-11-30 Pending JPH0485643U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12894890U JPH0485643U (en) 1990-11-30 1990-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12894890U JPH0485643U (en) 1990-11-30 1990-11-30

Publications (1)

Publication Number Publication Date
JPH0485643U true JPH0485643U (en) 1992-07-24

Family

ID=31876382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12894890U Pending JPH0485643U (en) 1990-11-30 1990-11-30

Country Status (1)

Country Link
JP (1) JPH0485643U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010272334A (en) * 2009-05-21 2010-12-02 Japan Ae Power Systems Corp Electron beam source for electron beam irradiation apparatus
EP2672502A1 (en) * 2012-06-06 2013-12-11 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH High brightness electron gun with moving condenser lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010272334A (en) * 2009-05-21 2010-12-02 Japan Ae Power Systems Corp Electron beam source for electron beam irradiation apparatus
EP2672502A1 (en) * 2012-06-06 2013-12-11 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH High brightness electron gun with moving condenser lens

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