JPH0484697A - Continuous vacuum hot pressing device - Google Patents
Continuous vacuum hot pressing deviceInfo
- Publication number
- JPH0484697A JPH0484697A JP19827990A JP19827990A JPH0484697A JP H0484697 A JPH0484697 A JP H0484697A JP 19827990 A JP19827990 A JP 19827990A JP 19827990 A JP19827990 A JP 19827990A JP H0484697 A JPH0484697 A JP H0484697A
- Authority
- JP
- Japan
- Prior art keywords
- zone
- vacuum
- carrier
- vacuum chambers
- pressurizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007731 hot pressing Methods 0.000 title abstract 2
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- 238000001816 cooling Methods 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 abstract description 9
- 239000012212 insulator Substances 0.000 abstract description 6
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 4
- 238000002788 crimping Methods 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000003825 pressing Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 4
- 238000003672 processing method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- BNOODXBBXFZASF-UHFFFAOYSA-N [Na].[S] Chemical compound [Na].[S] BNOODXBBXFZASF-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/34—Heating or cooling presses or parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は真空且つ高温条件下で連続的にセラミックスと
金属との接合や金属と金属との接合或いはセラミックス
の焼結などを効率的に行うことができる連続真空ホット
プレス装置に関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention efficiently performs continuous bonding of ceramics and metals, metal-to-metal bonding, or sintering of ceramics under vacuum and high temperature conditions. It is related to a continuous vacuum hot press device that can be used.
（従来の技術）
例えば高温二次電池においては、α−アルミナからなる
絶縁体とアルミニウム合金からなる蓋体とを接合した接
合部品が使用されており、このようなセラミックスと金
属とを接合する装置として高真空雰囲気でかつ高温に維
持した直線トンネル炉形式の処理室内で熱圧接合するも
のが知られているが、従来のこの種接合装置においては
処理室の前後に真空雰囲気を維持するだめの気圧調整室
を設ける必要性から装置が複雑化するとともに、前記処
理室内を真空にするためのポンプ容量も大きなものが必
要となり、装置全体が大規模で高価なものになるという
問題があった。また、ハツチ方式でセラミックスと金属
とを接合するようにした装置も使用されているが、ハツ
チ方式では被加工物の搬出入作業が煩雑なうえ処理能力
が小さくコスＩ・高となるという問題があった。(Prior art) For example, in high-temperature secondary batteries, bonded parts are used in which an insulator made of α-alumina and a lid made of an aluminum alloy are bonded, and a device for bonding such ceramics and metal is used. It is known that thermo-pressure bonding is carried out in a straight tunnel furnace type processing chamber maintained at high temperature in a high vacuum atmosphere.However, in conventional bonding equipment of this type, it is difficult to maintain a vacuum atmosphere before and after the processing chamber. The necessity of providing an air pressure adjustment chamber complicates the apparatus, and requires a pump with a large capacity to create a vacuum inside the processing chamber, resulting in a problem that the entire apparatus becomes large-scale and expensive. In addition, equipment that uses the hatch method to join ceramics and metals is also used, but the hatch method has problems such as complicated loading and unloading of workpieces, small processing capacity, and high costs. there were.
（発明が解決しようとする課題）
本発明は」１記のような従来の問題点を解決して、ハツ
チ処理方式でなく連続処理方式によって効率よく作業が
行なえるとともに、真空処理室およびそれに接続する真
空ポンプの容量も小さくて装置全体を小型化することが
できる連続真空ホットプレス装置を提供することを目的
として完成されたものである。(Problems to be Solved by the Invention) The present invention solves the conventional problems as described in item 1 above, enables efficient work by a continuous processing method rather than a hatch processing method, and also provides a vacuum processing chamber and connection thereto. This was completed with the aim of providing a continuous vacuum hot press device that has a small vacuum pump capacity and can downsize the entire device.
（課題を解決するための手段）
」１記の課題を解決するためになされた本発明に係る連
続真空ホットプレス装置は、組付・取出ゾーン、加熱ゾ
ーン、加圧ゾーン、冷却ゾーンを循環する回転自在なキ
ャリヤ上に被加工物を挟持する型が」二部に収納された
真空チャンバを等間隔をおいて配設するとともに、前記
キャリヤの」一方には加熱ゾーンから冷却ゾーンに移動
する真空チャンバを通過させるトンネル炉を設け、さら
に、前記加圧ゾーンにはトンネル炉の上方より該加圧ゾ
ーンで真空チャンバの型にプレス圧を加えて被加工物を
熱圧着するプレス装置を設けたことを特徴とするもので
ある。(Means for Solving the Problem) A continuous vacuum hot press device according to the present invention, which has been made to solve the problem in item 1, circulates through an assembly/unloading zone, a heating zone, a pressurizing zone, and a cooling zone. A die for holding a workpiece on a rotatable carrier is provided with vacuum chambers housed in two parts at equal intervals, and one side of the carrier is equipped with a vacuum chamber that moves from a heating zone to a cooling zone. A tunnel furnace for passing through the chamber is provided, and a press device is further provided in the pressurizing zone for applying press pressure to the mold of the vacuum chamber from above the tunnel furnace to thermocompress the workpiece. It is characterized by:
（実施例）
次に本発明を被加工物がナトリウム−硫黄電池に用いら
れる部品のセラミックス製絶縁体とアルミニウム合金製
蓋体である場合に用いる装置を実施例として詳細に説明
する。(Example) Next, the present invention will be described in detail as an example of an apparatus used when the workpieces are ceramic insulators and aluminum alloy lids used in sodium-sulfur batteries.
（１）は組付・取出ゾーン（八）、加熱ゾーン（Ｂ）、
加圧ゾーン（Ｃ）、冷却ゾーン（１））を循環する間欠
回転自在なキャリアであって、図示のものはインデック
スユニット（２）によって間欠駆動される回転式テーブ
ルである。（３）はキャリア（＋１上に等間隔をおいて
配設された着脱自在な真空チャンバであって、各真空チ
ャンバ（３）には後記するように被加工物（５０）であ
るセラミックス製絶縁体（５０ａ） とアルミニウム
合金製蓋体（５０ｂ） とを挟持する型（１２）が上
部に収納されており、（４）は前記キャリヤ（１）の上
方にあって加熱ゾーン（Ｂ）から冷却ゾーン（Ｄ）に間
欠移動する真空チャンバ（３）を通過させるｌ・ンネル
炉、（５）は前記加圧ゾーン（Ｃ）の上方にあってトン
ネル炉（４）の」三方より該加圧ゾーン（Ｃ）において
−時停止した真空チャンバ（３）内の型（１２）にプレ
ス圧を加えて被加工物（５０）を熱圧着するプレス装置
である。なお、キャリヤ（１）としての回転式テーブル
の下部には回転真空シール（６）によって気密保持され
て図示しない真空ポンプに接続する主真空室（７）が設
けられており、該主真空室（７）と各真空チャンバ（３
）とがバルブ（８）を介して連通されている。また、各
真空チャンバ（３）は予備バルブ〔９）を介して別に設
けられた予備真空引き用の真空ポンプ０１にも連通され
、後述するように真空チャンバ（３）の着脱時における
主真空室（７）の真空度低下を防止している。また５、
第３図に示されるように真空チャンバ（３）は、着脱自
在な筒体（１１）内に被加工物（５０）を保持すると七
もに筒体内には接合すべき絶縁体（５０ａ）と蓋体（５
０ｈ）とを挟持する上型（１２ａ）と下型（１２ｂ）と
よりなる型（１２）が設けられており、また、Ｊ−下両
端部にはプレス装置（５）が作動した場合の変位を吸収
するベローズ０３）が、底面部には荷重計測用のロード
セル０滲が取付けられている。なお、プレス装置（５）
は加熱炉（４）の透孔０つを貫通ずるプレスロッド（５
ａ）が前記真空チャンバ（３）の上端部を押圧して内部
に支持された被加工物（５０）を押圧して熱圧着するよ
う構成されている。(1) is the assembly/removal zone (8), the heating zone (B),
The carrier is intermittently rotatable and circulates through a pressurizing zone (C) and a cooling zone (1), and the one shown is a rotary table that is intermittently driven by an indexing unit (2). (3) is a removable vacuum chamber arranged at equal intervals on the carrier (+1), and each vacuum chamber (3) has a ceramic insulator which is a workpiece (50) as described later. A mold (12) that holds the body (50a) and the aluminum alloy lid (50b) is housed in the upper part, and the mold (4) is located above the carrier (1) and receives cooling from the heating zone (B). A tunnel furnace (5) is located above the pressure zone (C) and passes through a vacuum chamber (3) that moves intermittently into the zone (D), and is connected to the pressure zone from three sides of the tunnel furnace (4). In (C) - This is a press device that applies press pressure to the mold (12) in the stopped vacuum chamber (3) to thermocompress the workpiece (50). A main vacuum chamber (7) is provided at the bottom of the table, which is kept airtight by a rotating vacuum seal (6) and connected to a vacuum pump (not shown).
) are in communication with each other via a valve (8). Each vacuum chamber (3) is also communicated with a separately provided vacuum pump 01 for preliminary evacuation via a preliminary valve [9], and as will be described later, the main vacuum chamber is (7) This prevents the degree of vacuum from decreasing. Also 5,
As shown in FIG. 3, when a workpiece (50) is held in a removable cylinder (11), the vacuum chamber (3) also contains an insulator (50a) to be bonded inside the cylinder. Lid body (5
A mold (12) consisting of an upper mold (12a) and a lower mold (12b) is provided to sandwich the J-0h). A load cell for measuring load is attached to the bottom of the bellows. In addition, the press device (5)
is a press rod (5) that passes through 0 through holes in the heating furnace (4).
a) is configured to press the upper end of the vacuum chamber (3) and press the workpiece (50) supported therein to bond it by thermocompression.
なお、上記実施例ではキャリヤを間欠動作させるものに
ついて説明したが、これ以外にも例えばキャリヤを連続
的に動作させるようにしても良くこのように動作させた
ものは被加熱物に対するなめらかな温度コントロールが
容易に得られる。In the above embodiment, the carrier is operated intermittently, but it is also possible to operate the carrier continuously. can be easily obtained.
（作用）
以トのように構成されたものにおいては、例えば２０個
の真空チャンバ（３）が８時間で１回転するようにして
、第１１Ｅｍの組付・取出ゾーン（Ａ）において前記真
空チャンバ（３）内の上部にある型θ２）に被加工物（
５０）をセットし、次の加熱ゾーン（Ｂ）へと送られる
。なお、真空チャンバ（３）内へ被加工物（５０）を組
付る場合には、９第４図に示されるように該当真空チャ
ンバ（３）のバルブ（８）を閉じて筒体（１１）の開放
時におけるその他の真空チャンバおよび主真空室（７）
の真空度低下を防止するとともに、被加工物（５０）を
組付り後は予備バルブ（９）を開き予備真空引き用の真
空ポンプ００）に連通して真空チャンバ内を真空状態と
し、その後予備バルブ（９）を閉じるとともに、バルブ
（８）を開いて主真空室（７）に連通ずるのでこの間に
おける真空度低ｒは防止されることとなる。そして、加
熱ゾーン（Ｂ）によって所定温度まで昇温された真空チ
ャンバ（３）は加圧ゾーン（Ｃ）においてプレス装置（
５）により上端部が押圧されると、１−型（］、 ２
ａ ）および下型（１２ｂ）に挟持された絶縁体（５０
ａ）と蓋体（５０ｂ）とが確実に熱圧接合されることと
なり、その後冷却ゾーンにおいて所定温度まで降温され
、最後に組付・取出ゾーン（Ａ）において接合が完了し
た被加工物（５０）が取り出される。この取り出し工程
においても前述の組付は工程と同様、バルブ（８）と予
備バルブ（９）とを操作することにより他の真空チャン
バや主真空室（７）の真空度を低下させることはない。(Function) In the configuration as described below, for example, the 20 vacuum chambers (3) rotate once every 8 hours, and the vacuum chambers (3) rotate in the assembly/removal zone (A) of the 11th Em. (3) The workpiece (
50) and sent to the next heating zone (B). In addition, when assembling the workpiece (50) into the vacuum chamber (3), the valve (8) of the vacuum chamber (3) is closed as shown in FIG. ) and other vacuum chambers and main vacuum chamber (7) when opened.
After assembling the workpiece (50), the preliminary valve (9) is opened and communicated with the vacuum pump 00) for preliminary evacuation to create a vacuum inside the vacuum chamber. Since the preliminary valve (9) is closed and the valve (8) is opened to communicate with the main vacuum chamber (7), a low degree of vacuum during this period is prevented. Then, the vacuum chamber (3) heated to a predetermined temperature by the heating zone (B) is moved to the press device (
When the upper end is pressed by 5), 1-type (], 2
a ) and the insulator (50
a) and the lid body (50b) are reliably joined by heat and pressure, then the temperature is lowered to a predetermined temperature in the cooling zone, and finally the workpiece (50 ) is retrieved. In this extraction step, as in the above-mentioned assembly process, by operating the valve (8) and the preliminary valve (9), the degree of vacuum in other vacuum chambers and the main vacuum chamber (7) will not be reduced. .
なお、前記実施例においてはキャリヤ（１）とじて回転
式テーブルを用いた場合についてのみ説明したが、環状
に敷かれた走行レールとしてその上を真空チャンバが台
車に載せられて間欠移動できるようにしてもよく、また
、プレス装置（５）や真空チャンバ（３）の個数につい
ても特に限定されるものではない。さらに、前記実施例
はセラミックスと金属との接合についてのみ記載したが
、本発明の装置でセラミックスの焼結成いは金属と金属
の接合なども行えることは勿論である。In the above embodiment, only the case where a rotary table is used as the carrier (1) has been explained, but it is also possible to use a traveling rail laid in an annular shape on which the vacuum chamber is placed on a trolley and can be moved intermittently. Furthermore, the number of press devices (5) and vacuum chambers (3) is not particularly limited. Furthermore, although the above-mentioned embodiments have described only the bonding of ceramics and metals, it goes without saying that the apparatus of the present invention can also perform sintering of ceramics and bonding of metals.
（発明の効果）
本発明は以上の説明からも明らかなように、従来のよう
なバッチ処理方式と異なり連続処理方式によって効率よ
く接合作業を行なうことができ、また、真空チャンバを
トンネル炉で外部加熱するので、温度コントロールが容
易で種々の加熱条件に対応するヒートカーブを得ること
ができ、特に、キャリヤを回転式テーブルとしてその下
部に真空ポンプと接続された主真空室を設け、各真空チ
ャンバを主真空室に対してバルブを介して接離自在とし
たときは、各真空チャンバの容量が小さくできるうえに
作業時における真空度低下も防止できて容量の小さな真
空ポンプによって十分な真空度を維持できるもので小型
化された装置で作業性に優れたものとなる。(Effects of the Invention) As is clear from the above description, the present invention enables efficient bonding work by a continuous processing method, unlike the conventional batch processing method, and also allows the vacuum chamber to be replaced externally with a tunnel furnace. Since heating is performed, temperature control is easy and heat curves corresponding to various heating conditions can be obtained.In particular, the carrier is a rotary table with a main vacuum chamber connected to a vacuum pump at the bottom, and each vacuum chamber is heated. When the main vacuum chamber can be moved into and out of contact with the main vacuum chamber via a valve, the capacity of each vacuum chamber can be reduced, and a drop in the degree of vacuum during work can be prevented, allowing a small-capacity vacuum pump to maintain a sufficient degree of vacuum. It is a compact device that can be maintained and has excellent workability.
従って、本発明は従来の問題点を一掃した連続真空ホッ
トプレス装置として産業の発展に寄与するところは極め
て大である。Therefore, the present invention greatly contributes to the development of industry as a continuous vacuum hot press device that eliminates the problems of the conventional method.
第１図は本発明の実施例を示す概略平面図、第２図４Ｊ
同しく ・部切欠正面図、第３図は要部の断面図、第４
図はバルブ操作を説明するための概略フ１１−図である
。
（１）：キャリャ、（３）：真空チャンバ、（４）二ト
ンネル炉、、 （５） 、プレス装置、（７） ： ：
ｉ−真空室、（８）：バルブ、θ２）：型。
特許出願人 日本碍子株式会社Fig. 1 is a schematic plan view showing an embodiment of the present invention, Fig. 2 4J
Similarly, Fig. 3 is a cross-sectional view of the main part, Fig. 4 is a cutaway front view, and Fig. 4 is a sectional view of the main part.
The figure is a schematic diagram 11 for explaining valve operation. (1): Carrier, (3): Vacuum chamber, (4) Two tunnel furnace, (5) Press device, (7): : :
i-Vacuum chamber, (8): Valve, θ2): Mold. Patent applicant Nippon Insulator Co., Ltd.
Claims (1)
ゾーンを循環する回転自在なキャリヤ（１）上に被加工
物を挟持する型（１２）が上部に収納された真空チャン
バ（３）を等間隔をおいて配設するとともに、前記キャ
リヤ（１）の上方には加熱ゾーンから冷却ゾーンに移動
する真空チャンバ（３）を通過させるトンネル炉（４）
を設け、さらに、前記加圧ゾーンにはトンネル炉（４）
の上方より該加圧ゾーンで真空チャンバ（３）の型（１
２）にプレス圧を加えて被加工物を熱圧着するプレス装
置（５）を設けたことを特徴とする連続真空ホットプレ
ス装置。 ２、キャリヤ（１）が回転式テーブルでその下部に真空
ポンプと接続された主真空室（７）が設けられており、
各真空チャンバ（３）は主真空室（７）に対してバルブ
（８）を介して接離自在としてある請求項１に記載の連
続真空ホットプレス装置。[Claims] 1. A rotatable carrier (1) that circulates through an assembly/removal zone, a heating zone, a pressurizing zone, and a cooling zone, and a die (12) for holding a workpiece therebetween is housed in the upper part. vacuum chambers (3) arranged at equal intervals, and above the carrier (1) there is a tunnel furnace (4) through which the vacuum chambers (3) move from the heating zone to the cooling zone.
Further, a tunnel furnace (4) is provided in the pressurizing zone.
The mold (1) of the vacuum chamber (3) is placed in the pressurized zone from above.
2) A continuous vacuum hot press apparatus characterized in that a press apparatus (5) for applying press pressure to thermocompress the workpiece is provided. 2. The carrier (1) is a rotary table, and a main vacuum chamber (7) connected to a vacuum pump is provided at the bottom of the rotary table.
2. A continuous vacuum hot press apparatus according to claim 1, wherein each vacuum chamber (3) can be freely moved into and out of contact with the main vacuum chamber (7) via a valve (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19827990A JPH0783959B2 (en) | 1990-07-26 | 1990-07-26 | Continuous vacuum hot press machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19827990A JPH0783959B2 (en) | 1990-07-26 | 1990-07-26 | Continuous vacuum hot press machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0484697A true JPH0484697A (en) | 1992-03-17 |
| JPH0783959B2 JPH0783959B2 (en) | 1995-09-13 |
Family
ID=16388484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19827990A Expired - Fee Related JPH0783959B2 (en) | 1990-07-26 | 1990-07-26 | Continuous vacuum hot press machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0783959B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103836914A (en) * | 2014-03-12 | 2014-06-04 | 安徽金泰尔合金新材料有限公司 | Connecting structure of vacuum hot pressing sintering furnace thermode and oil hydraulic cylinder piston head |
| CN104325012A (en) * | 2014-09-04 | 2015-02-04 | 广东福尔电子有限公司 | Dual-metal-sheet molding die |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101753980B1 (en) * | 2015-09-11 | 2017-07-06 | 울산대학교 산학협력단 | Compact hot press apparatus |
-
1990
- 1990-07-26 JP JP19827990A patent/JPH0783959B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103836914A (en) * | 2014-03-12 | 2014-06-04 | 安徽金泰尔合金新材料有限公司 | Connecting structure of vacuum hot pressing sintering furnace thermode and oil hydraulic cylinder piston head |
| CN103836914B (en) * | 2014-03-12 | 2015-09-30 | 吴宣成 | The syndeton of a kind of vacuum sintering funace thermode and oil hydraulic cylinder piston head |
| CN104325012A (en) * | 2014-09-04 | 2015-02-04 | 广东福尔电子有限公司 | Dual-metal-sheet molding die |
| CN104325012B (en) * | 2014-09-04 | 2016-06-29 | 广东福尔电子有限公司 | Bimetal leaf mould |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0783959B2 (en) | 1995-09-13 |
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