JPH048441U - - Google Patents

Info

Publication number
JPH048441U
JPH048441U JP4896490U JP4896490U JPH048441U JP H048441 U JPH048441 U JP H048441U JP 4896490 U JP4896490 U JP 4896490U JP 4896490 U JP4896490 U JP 4896490U JP H048441 U JPH048441 U JP H048441U
Authority
JP
Japan
Prior art keywords
gripping
wafer cassette
plate
front plate
gripping plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4896490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4896490U priority Critical patent/JPH048441U/ja
Publication of JPH048441U publication Critical patent/JPH048441U/ja
Pending legal-status Critical Current

Links

JP4896490U 1990-05-09 1990-05-09 Pending JPH048441U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4896490U JPH048441U (US07655688-20100202-C00086.png) 1990-05-09 1990-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4896490U JPH048441U (US07655688-20100202-C00086.png) 1990-05-09 1990-05-09

Publications (1)

Publication Number Publication Date
JPH048441U true JPH048441U (US07655688-20100202-C00086.png) 1992-01-27

Family

ID=31566246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4896490U Pending JPH048441U (US07655688-20100202-C00086.png) 1990-05-09 1990-05-09

Country Status (1)

Country Link
JP (1) JPH048441U (US07655688-20100202-C00086.png)

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