JPH048440U - - Google Patents

Info

Publication number
JPH048440U
JPH048440U JP4873790U JP4873790U JPH048440U JP H048440 U JPH048440 U JP H048440U JP 4873790 U JP4873790 U JP 4873790U JP 4873790 U JP4873790 U JP 4873790U JP H048440 U JPH048440 U JP H048440U
Authority
JP
Japan
Prior art keywords
wafer holder
electrostatic chuck
lead wire
negative terminal
built
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4873790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4873790U priority Critical patent/JPH048440U/ja
Publication of JPH048440U publication Critical patent/JPH048440U/ja
Pending legal-status Critical Current

Links

JP4873790U 1990-05-10 1990-05-10 Pending JPH048440U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4873790U JPH048440U (US06521211-20030218-C00004.png) 1990-05-10 1990-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4873790U JPH048440U (US06521211-20030218-C00004.png) 1990-05-10 1990-05-10

Publications (1)

Publication Number Publication Date
JPH048440U true JPH048440U (US06521211-20030218-C00004.png) 1992-01-27

Family

ID=31565822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4873790U Pending JPH048440U (US06521211-20030218-C00004.png) 1990-05-10 1990-05-10

Country Status (1)

Country Link
JP (1) JPH048440U (US06521211-20030218-C00004.png)

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