JPH048438U - - Google Patents
Info
- Publication number
- JPH048438U JPH048438U JP4835890U JP4835890U JPH048438U JP H048438 U JPH048438 U JP H048438U JP 4835890 U JP4835890 U JP 4835890U JP 4835890 U JP4835890 U JP 4835890U JP H048438 U JPH048438 U JP H048438U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrostatic chuck
- holder
- fixing means
- close contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4835890U JPH048438U (fr) | 1990-05-08 | 1990-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4835890U JPH048438U (fr) | 1990-05-08 | 1990-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048438U true JPH048438U (fr) | 1992-01-27 |
Family
ID=31565094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4835890U Pending JPH048438U (fr) | 1990-05-08 | 1990-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048438U (fr) |
-
1990
- 1990-05-08 JP JP4835890U patent/JPH048438U/ja active Pending