JPH048436U - - Google Patents
Info
- Publication number
- JPH048436U JPH048436U JP4769290U JP4769290U JPH048436U JP H048436 U JPH048436 U JP H048436U JP 4769290 U JP4769290 U JP 4769290U JP 4769290 U JP4769290 U JP 4769290U JP H048436 U JPH048436 U JP H048436U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- transport arm
- transport
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第1図は本考案の一実施例を示す側面図、第2
図はその要部の詳細側面図である。
1……搬送アーム、2……搬送用ころ、3……
カセツト、4……試料、6……ベアリング、7…
…試料載台。
Figure 1 is a side view showing one embodiment of the present invention;
The figure is a detailed side view of the main parts. 1...Transportation arm, 2...Transportation roller, 3...
Cassette, 4...sample, 6...bearing, 7...
...Sample mounting stand.
Claims (1)
おいて、搬送アームにアース金具を設けたことを
特徴とする試料搬送装置の帯電防止機構。 An antistatic mechanism for a sample transport device comprising a sample stage and a transport arm, characterized in that the transport arm is provided with a grounding fitting.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4769290U JPH048436U (en) | 1990-05-09 | 1990-05-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4769290U JPH048436U (en) | 1990-05-09 | 1990-05-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH048436U true JPH048436U (en) | 1992-01-27 |
Family
ID=31563848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4769290U Pending JPH048436U (en) | 1990-05-09 | 1990-05-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH048436U (en) |
-
1990
- 1990-05-09 JP JP4769290U patent/JPH048436U/ja active Pending
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