JPH048427U - - Google Patents
Info
- Publication number
- JPH048427U JPH048427U JP4783390U JP4783390U JPH048427U JP H048427 U JPH048427 U JP H048427U JP 4783390 U JP4783390 U JP 4783390U JP 4783390 U JP4783390 U JP 4783390U JP H048427 U JPH048427 U JP H048427U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- liquid filling
- filling chamber
- supply pipe
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 230000005587 bubbling Effects 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4783390U JPH0533005Y2 (is) | 1990-05-08 | 1990-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4783390U JPH0533005Y2 (is) | 1990-05-08 | 1990-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH048427U true JPH048427U (is) | 1992-01-27 |
| JPH0533005Y2 JPH0533005Y2 (is) | 1993-08-23 |
Family
ID=31564116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4783390U Expired - Lifetime JPH0533005Y2 (is) | 1990-05-08 | 1990-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533005Y2 (is) |
-
1990
- 1990-05-08 JP JP4783390U patent/JPH0533005Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533005Y2 (is) | 1993-08-23 |
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