JPH0482842U - - Google Patents
Info
- Publication number
- JPH0482842U JPH0482842U JP12435690U JP12435690U JPH0482842U JP H0482842 U JPH0482842 U JP H0482842U JP 12435690 U JP12435690 U JP 12435690U JP 12435690 U JP12435690 U JP 12435690U JP H0482842 U JPH0482842 U JP H0482842U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- processing apparatus
- purging
- ring
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010926 purge Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12435690U JPH0482842U (en, 2012) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12435690U JPH0482842U (en, 2012) | 1990-11-28 | 1990-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0482842U true JPH0482842U (en, 2012) | 1992-07-20 |
Family
ID=31872014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12435690U Pending JPH0482842U (en, 2012) | 1990-11-28 | 1990-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0482842U (en, 2012) |
-
1990
- 1990-11-28 JP JP12435690U patent/JPH0482842U/ja active Pending
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