JPH0481966U - - Google Patents
Info
- Publication number
- JPH0481966U JPH0481966U JP12386390U JP12386390U JPH0481966U JP H0481966 U JPH0481966 U JP H0481966U JP 12386390 U JP12386390 U JP 12386390U JP 12386390 U JP12386390 U JP 12386390U JP H0481966 U JPH0481966 U JP H0481966U
- Authority
- JP
- Japan
- Prior art keywords
- sealing ring
- plasma
- workpiece
- entrance
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12386390U JPH0481966U (enExample) | 1990-11-26 | 1990-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12386390U JPH0481966U (enExample) | 1990-11-26 | 1990-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0481966U true JPH0481966U (enExample) | 1992-07-16 |
Family
ID=31871546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12386390U Pending JPH0481966U (enExample) | 1990-11-26 | 1990-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0481966U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5519809B2 (enExample) * | 1975-04-29 | 1980-05-29 | ||
| JPS63179522A (ja) * | 1987-01-21 | 1988-07-23 | Tokyo Electron Ltd | アツシング装置 |
| JPH01181527A (ja) * | 1988-01-11 | 1989-07-19 | Mitsubishi Electric Corp | プラズマ真空容器のシール装置 |
-
1990
- 1990-11-26 JP JP12386390U patent/JPH0481966U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5519809B2 (enExample) * | 1975-04-29 | 1980-05-29 | ||
| JPS63179522A (ja) * | 1987-01-21 | 1988-07-23 | Tokyo Electron Ltd | アツシング装置 |
| JPH01181527A (ja) * | 1988-01-11 | 1989-07-19 | Mitsubishi Electric Corp | プラズマ真空容器のシール装置 |