JPH0479423U - - Google Patents
Info
- Publication number
- JPH0479423U JPH0479423U JP12120890U JP12120890U JPH0479423U JP H0479423 U JPH0479423 U JP H0479423U JP 12120890 U JP12120890 U JP 12120890U JP 12120890 U JP12120890 U JP 12120890U JP H0479423 U JPH0479423 U JP H0479423U
- Authority
- JP
- Japan
- Prior art keywords
- view
- quartz
- cleaned
- cleaning tank
- handle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990121208U JP2540555Y2 (ja) | 1990-11-21 | 1990-11-21 | 洗浄槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990121208U JP2540555Y2 (ja) | 1990-11-21 | 1990-11-21 | 洗浄槽 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0479423U true JPH0479423U (ar) | 1992-07-10 |
| JP2540555Y2 JP2540555Y2 (ja) | 1997-07-09 |
Family
ID=31869079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990121208U Expired - Lifetime JP2540555Y2 (ja) | 1990-11-21 | 1990-11-21 | 洗浄槽 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2540555Y2 (ar) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5665642U (ar) * | 1979-10-24 | 1981-06-01 | ||
| JPS6382723U (ar) * | 1986-11-18 | 1988-05-31 | ||
| JPS63169864U (ar) * | 1987-04-27 | 1988-11-04 | ||
| JPH0195521A (ja) * | 1987-10-07 | 1989-04-13 | Hitachi Ltd | 洗浄方法および装置 |
-
1990
- 1990-11-21 JP JP1990121208U patent/JP2540555Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5665642U (ar) * | 1979-10-24 | 1981-06-01 | ||
| JPS6382723U (ar) * | 1986-11-18 | 1988-05-31 | ||
| JPS63169864U (ar) * | 1987-04-27 | 1988-11-04 | ||
| JPH0195521A (ja) * | 1987-10-07 | 1989-04-13 | Hitachi Ltd | 洗浄方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2540555Y2 (ja) | 1997-07-09 |