JPH0478935U - - Google Patents

Info

Publication number
JPH0478935U
JPH0478935U JP12155990U JP12155990U JPH0478935U JP H0478935 U JPH0478935 U JP H0478935U JP 12155990 U JP12155990 U JP 12155990U JP 12155990 U JP12155990 U JP 12155990U JP H0478935 U JPH0478935 U JP H0478935U
Authority
JP
Japan
Prior art keywords
ozone
piping
ozone generator
generator
branch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12155990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12155990U priority Critical patent/JPH0478935U/ja
Publication of JPH0478935U publication Critical patent/JPH0478935U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP12155990U 1990-11-20 1990-11-20 Pending JPH0478935U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12155990U JPH0478935U (US20030199744A1-20031023-C00003.png) 1990-11-20 1990-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12155990U JPH0478935U (US20030199744A1-20031023-C00003.png) 1990-11-20 1990-11-20

Publications (1)

Publication Number Publication Date
JPH0478935U true JPH0478935U (US20030199744A1-20031023-C00003.png) 1992-07-09

Family

ID=31869410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12155990U Pending JPH0478935U (US20030199744A1-20031023-C00003.png) 1990-11-20 1990-11-20

Country Status (1)

Country Link
JP (1) JPH0478935U (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022526453A (ja) * 2019-04-16 2022-05-24 北京北方華創微電子装備有限公司 反応ガス供給システムおよびその制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022526453A (ja) * 2019-04-16 2022-05-24 北京北方華創微電子装備有限公司 反応ガス供給システムおよびその制御方法

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