JPH0478820A - Formation of optical shutter for information output device - Google Patents

Formation of optical shutter for information output device

Info

Publication number
JPH0478820A
JPH0478820A JP2193266A JP19326690A JPH0478820A JP H0478820 A JPH0478820 A JP H0478820A JP 2193266 A JP2193266 A JP 2193266A JP 19326690 A JP19326690 A JP 19326690A JP H0478820 A JPH0478820 A JP H0478820A
Authority
JP
Japan
Prior art keywords
liquid crystal
substrate
light transparent
information output
crystal cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2193266A
Other languages
Japanese (ja)
Inventor
Akira Mase
晃 間瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2193266A priority Critical patent/JPH0478820A/en
Publication of JPH0478820A publication Critical patent/JPH0478820A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To attain fine interelectrode spacings by forming at least one electrode on a pair of light transparent substrates to prescribed patterns by excimer laser processing. CONSTITUTION:This information output device is constituted by providing the liquid crystal electrooptical device which includes the liquid crystal exhibiting a ferroelectric property in a liquid crystal cell provided with a 1st substrate consisting of one piece of electrode consisting of a light transparent conductive material and leads on a light transparent substrate (for example, a 1st substrate having an SiO2 film of 1,000Angstrom thickness) on soda lime glass of 1.1mm thickness and a 2nd substrate consisting of plural pieces of electrodes consisting of a light transparent conductive material and leads on a light transparent substrate, includes the liquid crystal having an ester bond in the main skeleton and has means for arraying the liquid crystal compsn. in a specified direction between the photosensitive drum and the light source. ITO is directly worked at least once by using the excimer laser at the time of working the shapes of the electrodes on the 1st substrate and 2nd substrate of this liquid crystal cell.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、コンピュータやワードプロセッサー等からの
情報を出力するプリンター、ファクシミリの出力部分、
コピー機の印刷部分に利用する装置を改善する方法を提
案するにある。
[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to a printer that outputs information from a computer, word processor, etc., an output portion of a facsimile,
The purpose of the present invention is to propose a method for improving a device used in the printing part of a copy machine.

〔従来の技術〕[Conventional technology]

従来の情報出力装置は抵抗加熱部をライン状。 Conventional information output devices have a line-shaped resistance heating section.

またはマトリクス形状に配置した印刷ヘッドを感熱紙に
接触させて熱変質させることでドツト転写を行い2文字
や図形を出力させるサーマルヘッドタイプのもの、また
インクを封入した容器の一部に熱源を密着させて内部の
インクの一部を瞬間沸騰させ、容器に付いたノズルから
インクを被転写物である紙の上に飛ばすタイプのもの等
か現実化されている。
Alternatively, there is a thermal head type that transfers dots and outputs two characters or figures by bringing the printing head arranged in a matrix into contact with thermal paper and causing it to change its quality due to heat.Also, there is a thermal head type that outputs two characters or figures by contacting the thermal paper with a print head arranged in a matrix shape, and a heat source is placed closely on a part of the container filled with ink. A type of ink that instantly boils a portion of the ink inside the container and sprays the ink onto the paper that is being transferred from a nozzle attached to the container has been realized.

また、感光ドラムを用いた方法としては、半導体レーザ
ーの出力光をコリオリミラーを回転させることでドラム
上に点照射しその連続動作で文字や図形を出力する方式
が現実化している。
Furthermore, as a method using a photosensitive drum, a system has been realized in which the output light of a semiconductor laser is point-irradiated onto the drum by rotating a Coriolis mirror, and characters and figures are output by continuous operation.

ゲストホストタイプのライン状の液晶セルを用い、蛍光
灯の後部照明の光をライントッド情報として感光ドラム
上に線照射しその連続動作で文字や図形を出力する方式
が現実かしている。
A method using a line-shaped liquid crystal cell of the guest-host type has become a reality, and the light from the rear illumination of a fluorescent lamp is used as line tod information to irradiate a line onto a photosensitive drum, and the continuous operation of the light irradiates the photosensitive drum to output characters and figures.

また近年ではこのゲストホストタイプの液晶セルに代わ
り強誘電性液晶セルを用いる方法も提案されている。
In recent years, a method has also been proposed in which a ferroelectric liquid crystal cell is used instead of this guest-host type liquid crystal cell.

〔発明か解決しようとする問題点〕[The problem that the invention attempts to solve]

従来の技術の項目に記述したサーマルヘッドとインクジ
ェット法は応答速度の限界から印刷速度か一秒間に60
文字程度までしか上げられないという欠点を有している
。また半導体レーサーを用いた情報出力装置では2点光
源をコリオリミラーを用いて長さ400mmの感光ドラ
ム上に点照射するため、その光路長を確保するためには
装置全体の大きさを大きくする必要かあり、小型化には
不向きなものであった。
The thermal head and inkjet method described in the conventional technology section have a printing speed of 6000 yen per second due to the limit of response speed.
It has the disadvantage that it can only be raised to the level of letters. In addition, in an information output device using a semiconductor laser, two light sources are used to irradiate a 400 mm long photosensitive drum using a Coriolis mirror, so the overall size of the device must be increased to ensure the optical path length. This made it unsuitable for miniaturization.

ゲストホスト液晶セルを使用した情報出力装置はコンパ
クトではあるか、液晶の応答速度か数十m5ecと遅く
、新たに強誘電性液晶セルを用いた方法か提案されてい
る。
An information output device using a guest-host liquid crystal cell is compact, but the response speed of the liquid crystal is slow at several tens of m5ec, and a new method using a ferroelectric liquid crystal cell has been proposed.

しかし、この様な強誘電性液晶を用いた液晶装置におい
ては、装置全体において均一な駆動特性か当然ながら要
求される。そのために、液晶装置全体にわたって欠陥の
ない、均一な液晶相すなわちモノドメインを全体に形成
することを、目標として従来より技術開発かなされてき
た。
However, in a liquid crystal device using such a ferroelectric liquid crystal, it is naturally required that the drive characteristics be uniform throughout the device. To this end, technology has been developed with the aim of forming a defect-free and uniform liquid crystal phase, ie, a monodomain, over the entire liquid crystal device.

しかしながら、液晶材料特にスメスチックの層構造を持
つ強誘電性液晶は配向膜についた微小なキズや液晶駆動
用の電極の凸凹段差や、液晶装置の基板間隔を一定に保
持するためのスペーサーその他種々の原因により層構造
に欠陥か発生し、均一なモノドメインか得られないその
為に従来は液晶装置の端部より、液晶を一次元結晶成長
させる方法(温度勾配)によりセル全体にモノドメイン
を成長させる事か試みられていた。
However, liquid crystal materials, especially ferroelectric liquid crystals with a smectic layer structure, are subject to various problems such as minute scratches on the alignment film, irregularities in the electrodes for driving the liquid crystal, spacers used to maintain a constant distance between the substrates of the liquid crystal device, etc. Depending on the cause, defects occur in the layer structure and uniform monodomains cannot be obtained.For this reason, conventionally, monodomains were grown over the entire cell by one-dimensional crystal growth (temperature gradient) from the edge of the liquid crystal device. There was an attempt to make him do it.

しかしながら、液晶装置の長さが長くなった場合この方
法は適用不可能であった。すなわちこの方法によって実
現されるモノドメインの大きさは最大数十ミリ角程度で
あり長軸化して工業的に使用する事は不可能であった。
However, this method was not applicable when the length of the liquid crystal device became long. That is, the size of the monodomain realized by this method is at most several tens of millimeters square, and it has been impossible to make it long and use it industrially.

また仮に使用可能な大きさのモノドメインか実現された
としても1強誘電性液晶材料が持つ性質として液晶材料
か基板と平行に配列せず、一定の傾きを持つ配列となる
ため強誘電性液晶の層構造か曲がったり、折れたりする
。その為にジグザグ欠陥か度メイン中に発生し1表示性
、駆動特性に不均一さが発生する問題があった。
Furthermore, even if a usable monodomain were to be realized, the property of the ferroelectric liquid crystal material is that the liquid crystal material will not be aligned parallel to the substrate, but will be aligned with a certain inclination. The layered structure can bend or break. For this reason, there is a problem in that zigzag defects occur during the main display, resulting in non-uniformity in display performance and drive characteristics.

そして、液晶材料は外部よりの電界によって。The liquid crystal material is exposed to an external electric field.

その取りえる状態を変化させる際に、このジグザグ欠陥
を境にしてその反転過程か逆になるという現象がみられ
る。この為に、装置全体において。
When changing the possible states, there is a phenomenon in which the zigzag defect becomes the boundary and the process becomes reversed. For this purpose, in the entire device.

均一な駆動特性が得られないという問題かあったまた、
液晶セルの電極部を光シャッターの解像度に合わせて、
微細なパターンを形成しなければならなかったが、従来
のフォトリソ写植方法を用いた場合、隣合う電極の間隔
を狭くすることかできず、且つ装置の全体の寸法が決定
しているので結果として、電極面積が小さくなり、単位
面積に占めるシャッタ一部分の密度か小さくなるという
欠点か指摘されており、それにかわる手段か望まれてい
た。
There was also the problem of not being able to obtain uniform drive characteristics.
Adjust the electrode part of the liquid crystal cell to match the resolution of the optical shutter,
It was necessary to form a fine pattern, but when using the conventional photolithography method, it is not possible to narrow the distance between adjacent electrodes, and the overall dimensions of the device are determined, so as a result, However, it has been pointed out that the electrode area becomes smaller and the density of the portion of the shutter that occupies a unit area becomes smaller, which is a drawback, and an alternative means has been desired.

〔問題を解決する手段〕[Means to solve the problem]

透光性の基板(例えば1.1mm厚のソーダライムガラ
ス上に1000人厚のSiO7膜を有する第一の基板(
1)上に、透光性の導電性物質よりなる一個の電極およ
びリードよりなる第一の基板と透光性の基板に、透光性
の導電性物質よりなる複数個の電極およびリードよりな
る第二の基板を平行位置に設けた液晶セルの内部に1強
誘電性を示す液晶を含み且つ主骨格かエステル結合を有
する液晶組成物を含む強誘電性液晶組成物を充填しその
液晶組成物を一定方向に並べるための手段を有する液晶
電気光学装置を感光性ドラムと光源の間に設ける事を特
徴とする情報出力装置である。この液晶セルの第一の基
板および第二の基板上の電極の形状加工する際、エキシ
マレーザ−を用いて、IT○を少なくとも1回は直接加
工するものである。これにより従来のフォトリソグラフ
ィ法では実現できなかった、微細な電極間隔を実現する
ことができたものであります。
A first substrate having a 1000mm thick SiO7 film on a 1.1mm thick soda lime glass (for example)
1) A first substrate consisting of one electrode and lead made of a light-transmitting conductive material on the top, and a plurality of electrodes and leads made of a light-transmitting conductive material on the light-transmitting substrate. A ferroelectric liquid crystal composition containing a liquid crystal exhibiting ferroelectricity and having an ester bond in its main skeleton is filled inside a liquid crystal cell in which a second substrate is provided in a parallel position. This information output device is characterized in that a liquid crystal electro-optical device having means for arranging the images in a certain direction is provided between a photosensitive drum and a light source. When processing the shapes of the electrodes on the first and second substrates of this liquid crystal cell, IT◯ is directly processed at least once using an excimer laser. This made it possible to achieve fine electrode spacing that was not possible with conventional photolithography.

また液晶組成物中に主骨格中にエステル結合を含む液晶
組成物を含むことにより、マルチドメイン状態とする事
で、液晶の配向欠陥はそのドメインの境界によって、緩
和されるために液晶セル全体において、ジグザグ欠陥等
が発生しないものである。
In addition, by including a liquid crystal composition containing an ester bond in the main skeleton in the liquid crystal composition, a multi-domain state is created, and alignment defects in the liquid crystal are alleviated by the boundaries of the domains, so that the entire liquid crystal cell , zigzag defects, etc. do not occur.

さらに、この微小なドメイン内部は良好なモノドメイン
状態となっているため、それぞれの微小なドメインにお
ける液晶の表示又は駆動に差か無く、装置全体としては
、均一な表示または駆動特性を実現することかできるも
のである。
Furthermore, since the inside of this microdomain is in a good monodomain state, there is no difference in the display or drive of the liquid crystal in each microdomain, and the device as a whole can achieve uniform display or drive characteristics. It is something that can be done.

以下に実施例を示す。Examples are shown below.

〔実施例〕〔Example〕

第1図に本実施例にて使用した液晶装置のセル概略断面
図を示す。また第2図には情報出力装置の構成図を示す
。両図とも概略図であるためその寸法は任意となってい
る。
FIG. 1 shows a schematic cross-sectional view of a cell of a liquid crystal device used in this example. Further, FIG. 2 shows a configuration diagram of the information output device. Since both figures are schematic diagrams, their dimensions are arbitrary.

第一の基板として9本実施例ではソーダライムガラス(
1,1mm厚)上に、ガラス基板中のアルカリイオンの
析出を遮断するための、スパッタ法により成膜した5i
02膜を1000人有す6ものを使用した。その第一の
基板(1)上にスパッタ法により成膜した透光性導電膜
(2) (I T○;インジューム酸化錫)を1100
人設けた。その後、第3図に示す様な構成を持つエキシ
マレーサ加工系を使用して、個の電極、外部取り出し電
極及びリードを形成した。
In this example, soda lime glass (9) was used as the first substrate.
5i film formed by sputtering on the glass substrate (1.1 mm thick) to block the precipitation of alkali ions in the glass substrate.
Six samples containing 1000 02 membranes were used. A translucent conductive film (2) (IT○; indium tin oxide) was formed on the first substrate (1) by sputtering at 1100%
I set up a person. Thereafter, using an excimer laser processing system having the configuration shown in FIG. 3, individual electrodes, external electrodes, and leads were formed.

第二の基板(6)として1本実施例ではソータライムガ
ラス(1,1mm厚)上に、 5in2膜を1000人
有す6ものを使用した。その第二の基板(6)上に透光
性導電膜(5)を1100人設けた。その後、同様のエ
キシマレーザ−加工法を用いて4800個の印刷電極、
外部取り出し電極及びリードを形成した。これら印刷電
極のピッチは62.5ミ7oVとした。また、電極間の
分離幅は10ミクロンとした。
In this example, as the second substrate (6), a 6 substrate having 1000 5in2 films on sortalime glass (1.1 mm thick) was used. 1,100 light-transmitting conductive films (5) were provided on the second substrate (6). Then, using the same excimer laser processing method, 4800 printed electrodes,
External lead electrodes and leads were formed. The pitch of these printed electrodes was 62.5 mm and 7 oV. Further, the separation width between the electrodes was set to 10 microns.

ここで使用した第3図に示すレーザー光学系はエキシマ
レーザ発振器(30)、コンピューター(31)、レー
ザ光学系(32)、TVカメラ−モニター系(35)(
34)、x−y−θテーブルコントローラー(36)よ
り構成されるものであり、レーサ本体からの光を光学系
(32)で長偏平に加工し線状のパターンで加工してい
くものであります。
The laser optical system shown in Fig. 3 used here includes an excimer laser oscillator (30), a computer (31), a laser optical system (32), and a TV camera/monitor system (35).
34), is composed of an x-y-theta table controller (36), and the optical system (32) processes the light from the laser body into a long flat shape and processes it into a linear pattern. .

またリードおよび取り出し電極の部分には5000人の
ニッケルメッキ(7)と500人の金メツキ(8)を施
した。
In addition, 5,000 nickel plating (7) and 500 gold plating (8) were applied to the leads and extraction electrodes.

第一の基板上にポリイミド膜を、オフセット法により印
刷し、350°Cの遠赤外線炉で10分間焼成し100
0人の配向膜(3)を得た。その後、チャージノン(脂
化成製)布をロールに巻き付けたラビング装置によりラ
ビングを施し、配向膜(3)上に一定方向の微細な傷を
付けた。
A polyimide film was printed on the first substrate by an offset method, and baked in a far infrared oven at 350°C for 10 minutes.
An alignment film (3) for 0 people was obtained. Thereafter, rubbing was performed using a rubbing device in which a Chargenon cloth (manufactured by Fuikasei Co., Ltd.) was wound around a roll to make fine scratches in a certain direction on the alignment film (3).

一液性のエポキシ樹脂中に2.2ミクoVの直径を有す
る円柱状のSiO□ファイバーを5重量%混合したもの
をスクリーン法を用いて第一の基板上に印刷(4)シた
A mixture of 5% by weight of cylindrical SiO□ fibers having a diameter of 2.2 μoV in a one-component epoxy resin was printed (4) on the first substrate using a screen method.

その後、第一の基板と第二の基板を貼り合わせた後、真
空注入法を用いて2強誘電性を示す液晶(5ELT−5
00)αωを注入した。注入口を紫外線硬化樹脂で封止
して液晶セルを作成した。
After that, after bonding the first substrate and the second substrate together, a liquid crystal exhibiting diferroelectricity (5ELT-5) was added using a vacuum injection method.
00) αω was injected. A liquid crystal cell was created by sealing the injection port with an ultraviolet curing resin.

その後、コントローラからの8ビツトデータをシフトす
るマルチプレクサ−であるドライバーIC(9)の出力
端子に設けた100ミクロン角、高さ20ミクロンの金
バンプと第二の基板上の外部取り出し電極(8)とを電
気的に接触させ、かつIC表面と第二の基板をエポキシ
系樹脂01)で接続固定をして液晶装置を作成した。
After that, a gold bump of 100 microns square and 20 microns in height was installed on the output terminal of the driver IC (9), which is a multiplexer that shifts 8-bit data from the controller, and an external electrode (8) on the second substrate. A liquid crystal device was fabricated by electrically contacting the IC surface and the second substrate, and connecting and fixing the IC surface and the second substrate with epoxy resin 01).

この液晶装置をLEDをライン上に配置した光源と感光
ドラムとの間に設置して情報出力装置を構成した。
This liquid crystal device was installed between a light source in which LEDs were arranged on a line and a photosensitive drum to constitute an information output device.

本発明の液晶セルは(22)として、LED光源(21
)と感光体ドラム(23)の間に設けられ、入力信号に
応じて光の透過、非透過を行なうシャッターとして機能
するため、偏向板か2枚(図示せず)設けられている。
The liquid crystal cell of the present invention has an LED light source (21) as (22).
) and the photoreceptor drum (23), and two deflection plates (not shown) are provided to function as a shutter that transmits or blocks light depending on an input signal.

本実施例の場合、1ライン4800個の光をON。In the case of this example, 4800 lights are turned on for one line.

OFFを行なうことになるか、その4800個において
、良好な光の○N、○FF制御をすることかできた。こ
れは液晶セル中の液晶の配向かマルチドメイン状態とな
っているためてあり、はぼすへての部分において均一な
光のON、  OFFか行なえた。
I was able to perform good ○N and ○FF control of the light for those 4800 lights, although I had to turn them off. This may be due to the orientation of the liquid crystal in the liquid crystal cell or the multi-domain state, and the light could be uniformly turned on and off at the end of the screen.

また、液晶セル全面において、微小な配向欠陥か存在し
ているので、大きな配向欠陥かなく、光の○N、OFF
か他の部分とは様子が違う部分がみられなかった。
In addition, since there are small alignment defects on the entire surface of the liquid crystal cell, there are no large alignment defects, and the light can be turned on or off.
There were no parts that looked different from other parts.

また、液晶材料として、強誘電性液晶材料を使用したの
で従来の液晶に比べて応答速度が2倍〜10倍以上とな
り、A4サイズの標準原稿の出力速度が、従来装置の倍
以上とすることかできた。
In addition, since a ferroelectric liquid crystal material is used as the liquid crystal material, the response speed is 2 to 10 times more than that of conventional liquid crystals, and the output speed of standard A4 size documents is more than twice that of conventional devices. I was able to do it.

液晶セルの基板状の電極形成のためにエキシマレーザ加
工を使用したので、電極間隔を非常に狭くすることかで
き、完全ドライプロセスにて液晶セルを形成することか
できた。
Since excimer laser processing was used to form electrodes on the substrate of the liquid crystal cell, the electrode spacing could be made very narrow, and the liquid crystal cell could be formed using a completely dry process.

〔効果〕〔effect〕

本発明により、情報出力装置中の液晶セルにマルチドメ
イン配向を行うことにより、液晶セル全体に均一な配向
状態を得ることが出来た。
According to the present invention, by performing multi-domain alignment on a liquid crystal cell in an information output device, it was possible to obtain a uniform alignment state over the entire liquid crystal cell.

ジグザグ欠陥等光学的に大きな影響のでる欠陥か発生せ
ず均一な表示特性と高いコントラスト比を実現できた。
Uniform display characteristics and a high contrast ratio were achieved without the occurrence of defects such as zigzag defects that have a large optical effect.

とくに情報出力装置の液晶装置においては、高コントラ
ストか必要になるため本発明により特性の向上か可能と
なった。
Particularly in liquid crystal devices used in information output devices, high contrast is required, and the present invention has made it possible to improve the characteristics.

またエキシマレーザ−によるITOの直接形状加工を電
極部に用いたため、従来のフォトリソ法に比へて電極間
の分離幅か25ミクロンから10ミクロンへ削減でき1
画素面積比で1.87倍の増加が可能になった。
In addition, since direct shaping of ITO using an excimer laser was used for the electrode parts, the separation width between the electrodes could be reduced from 25 microns to 10 microns compared to conventional photolithography.
This makes it possible to increase the pixel area ratio by 1.87 times.

またドライバーICを第二の基板上に実装することによ
り、FPCとパッケージICを使用していた従来の装置
に比べ1重量で70%の削減、外形で60%の削減か可
能となった。
Additionally, by mounting the driver IC on the second board, it has become possible to reduce the weight by 70% and the external size by 60% compared to conventional equipment that uses FPC and packaged ICs.

【図面の簡単な説明】[Brief explanation of drawings]

第一図は本発明で用いた液晶装置の断面図を示す。 第二図は本発明で用いた情報出力装置の断面図を示す。 第三図は本発明で用いたエキシマレーザ−加工装置の概
略構成図を示す。
FIG. 1 shows a cross-sectional view of the liquid crystal device used in the present invention. FIG. 2 shows a sectional view of the information output device used in the present invention. FIG. 3 shows a schematic diagram of the excimer laser processing apparatus used in the present invention.

Claims (1)

【特許請求の範囲】 1、一対の透光性基板と、一対の前記基板間に充填され
た強誘電性を示す液晶組成物材料とを有する液晶セルで
あって、前記液晶セルを構成する一対の透光性基板上の
少なくとも一方の電極はエキシマレーザ加工により所定
のパターンに形成することを特徴とする情報出力装置用
光シャッターの作成方法。 2、特許請求範囲第1項において、前記液晶組成物材料
の中に、主骨格中にエステル結合を有する液晶組成物が
含まれることを特徴とする情報出力装置用光シャッター
の作成方法。
[Scope of Claims] 1. A liquid crystal cell comprising a pair of transparent substrates and a liquid crystal composition material exhibiting ferroelectricity filled between the pair of substrates, the pair constituting the liquid crystal cell. A method for producing an optical shutter for an information output device, characterized in that at least one electrode on a transparent substrate is formed into a predetermined pattern by excimer laser processing. 2. A method for producing an optical shutter for an information output device according to claim 1, wherein the liquid crystal composition material includes a liquid crystal composition having an ester bond in its main skeleton.
JP2193266A 1990-07-21 1990-07-21 Formation of optical shutter for information output device Pending JPH0478820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2193266A JPH0478820A (en) 1990-07-21 1990-07-21 Formation of optical shutter for information output device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2193266A JPH0478820A (en) 1990-07-21 1990-07-21 Formation of optical shutter for information output device

Publications (1)

Publication Number Publication Date
JPH0478820A true JPH0478820A (en) 1992-03-12

Family

ID=16305085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2193266A Pending JPH0478820A (en) 1990-07-21 1990-07-21 Formation of optical shutter for information output device

Country Status (1)

Country Link
JP (1) JPH0478820A (en)

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