JPH0478550U - - Google Patents
Info
- Publication number
- JPH0478550U JPH0478550U JP12154790U JP12154790U JPH0478550U JP H0478550 U JPH0478550 U JP H0478550U JP 12154790 U JP12154790 U JP 12154790U JP 12154790 U JP12154790 U JP 12154790U JP H0478550 U JPH0478550 U JP H0478550U
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- detection element
- heater
- shows
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 9
- 238000001514 detection method Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12154790U JPH0478550U (de) | 1990-11-19 | 1990-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12154790U JPH0478550U (de) | 1990-11-19 | 1990-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478550U true JPH0478550U (de) | 1992-07-08 |
Family
ID=31869398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12154790U Pending JPH0478550U (de) | 1990-11-19 | 1990-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478550U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008032607A (ja) * | 2006-07-31 | 2008-02-14 | Kyushu Univ | 硫化物の悪臭を高感度で検知するセンサ |
-
1990
- 1990-11-19 JP JP12154790U patent/JPH0478550U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008032607A (ja) * | 2006-07-31 | 2008-02-14 | Kyushu Univ | 硫化物の悪臭を高感度で検知するセンサ |