JPH0478389U - - Google Patents
Info
- Publication number
- JPH0478389U JPH0478389U JP12267690U JP12267690U JPH0478389U JP H0478389 U JPH0478389 U JP H0478389U JP 12267690 U JP12267690 U JP 12267690U JP 12267690 U JP12267690 U JP 12267690U JP H0478389 U JPH0478389 U JP H0478389U
- Authority
- JP
- Japan
- Prior art keywords
- bypass passage
- control valve
- mass flow
- flow controller
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 1
Landscapes
- Pipe Accessories (AREA)
- Pipeline Systems (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Flow Control (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Examining Or Testing Airtightness (AREA)
Description
第１図は、この考案の一実施例を示すマスフロ
ーコントローラの斜視図である。
１……透明カバー、２……ボデイブロツク、３
……継手、４……センサー部、５……バルブ、６
……バイパス部、７……検知紙。
FIG. 1 is a perspective view of a mass flow controller showing an embodiment of this invention. 1...Transparent cover, 2...Body block, 3
...Joint, 4...Sensor section, 5...Valve, 6
...Bypass section, 7...Detection paper.
Claims (1)
バイパス路壁の温度変化を検出して、バイパス路
近傍の配管に設けた制御バルブを駆動させて流量
制御を行うマスフローコントローラにおいて、 バイパス路及び制御バルブを覆う本体カバーを
透明にするとともに、カバー内空間にリークガス
を検知する検知紙を設けたことを特徴とするマス
フローコントローラ。[Scope of Claim for Utility Model Registration] A mass flow controller that detects temperature changes on the wall of the bypass passage due to the diverted fluid in the division bypass passage installed in the piping and controls the flow rate by driving a control valve installed in the piping near the bypass passage. A mass flow controller characterized in that a main body cover covering a bypass path and a control valve is made transparent, and a detection paper for detecting leak gas is provided in a space inside the cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267690U JPH0639790Y2 (en) | 1990-11-22 | 1990-11-22 | Mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267690U JPH0639790Y2 (en) | 1990-11-22 | 1990-11-22 | Mass flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478389U true JPH0478389U (en) | 1992-07-08 |
| JPH0639790Y2 JPH0639790Y2 (en) | 1994-10-19 |
Family
ID=31870437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12267690U Expired - Lifetime JPH0639790Y2 (en) | 1990-11-22 | 1990-11-22 | Mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639790Y2 (en) |
-
1990
- 1990-11-22 JP JP12267690U patent/JPH0639790Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0639790Y2 (en) | 1994-10-19 |