JPH0478267U - - Google Patents

Info

Publication number
JPH0478267U
JPH0478267U JP12266290U JP12266290U JPH0478267U JP H0478267 U JPH0478267 U JP H0478267U JP 12266290 U JP12266290 U JP 12266290U JP 12266290 U JP12266290 U JP 12266290U JP H0478267 U JPH0478267 U JP H0478267U
Authority
JP
Japan
Prior art keywords
substrate
pattern
photomask
etching
aperture plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12266290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12266290U priority Critical patent/JPH0478267U/ja
Publication of JPH0478267U publication Critical patent/JPH0478267U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP12266290U 1990-11-22 1990-11-22 Pending JPH0478267U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12266290U JPH0478267U (US06815460-20041109-C00097.png) 1990-11-22 1990-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12266290U JPH0478267U (US06815460-20041109-C00097.png) 1990-11-22 1990-11-22

Publications (1)

Publication Number Publication Date
JPH0478267U true JPH0478267U (US06815460-20041109-C00097.png) 1992-07-08

Family

ID=31870423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12266290U Pending JPH0478267U (US06815460-20041109-C00097.png) 1990-11-22 1990-11-22

Country Status (1)

Country Link
JP (1) JPH0478267U (US06815460-20041109-C00097.png)

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