JPH0477251U - - Google Patents

Info

Publication number
JPH0477251U
JPH0477251U JP12150690U JP12150690U JPH0477251U JP H0477251 U JPH0477251 U JP H0477251U JP 12150690 U JP12150690 U JP 12150690U JP 12150690 U JP12150690 U JP 12150690U JP H0477251 U JPH0477251 U JP H0477251U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
walking beam
backward
wafer
movements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12150690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12150690U priority Critical patent/JPH0477251U/ja
Publication of JPH0477251U publication Critical patent/JPH0477251U/ja
Pending legal-status Critical Current

Links

JP12150690U 1990-11-20 1990-11-20 Pending JPH0477251U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12150690U JPH0477251U (enrdf_load_stackoverflow) 1990-11-20 1990-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12150690U JPH0477251U (enrdf_load_stackoverflow) 1990-11-20 1990-11-20

Publications (1)

Publication Number Publication Date
JPH0477251U true JPH0477251U (enrdf_load_stackoverflow) 1992-07-06

Family

ID=31869359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12150690U Pending JPH0477251U (enrdf_load_stackoverflow) 1990-11-20 1990-11-20

Country Status (1)

Country Link
JP (1) JPH0477251U (enrdf_load_stackoverflow)

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