JPH0477247U - - Google Patents
Info
- Publication number
- JPH0477247U JPH0477247U JP12190690U JP12190690U JPH0477247U JP H0477247 U JPH0477247 U JP H0477247U JP 12190690 U JP12190690 U JP 12190690U JP 12190690 U JP12190690 U JP 12190690U JP H0477247 U JPH0477247 U JP H0477247U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- semiconductor wafer
- measuring device
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12190690U JPH0477247U (enExample) | 1990-11-20 | 1990-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12190690U JPH0477247U (enExample) | 1990-11-20 | 1990-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0477247U true JPH0477247U (enExample) | 1992-07-06 |
Family
ID=31869727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12190690U Pending JPH0477247U (enExample) | 1990-11-20 | 1990-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0477247U (enExample) |
-
1990
- 1990-11-20 JP JP12190690U patent/JPH0477247U/ja active Pending