JPH047656U - - Google Patents

Info

Publication number
JPH047656U
JPH047656U JP4530290U JP4530290U JPH047656U JP H047656 U JPH047656 U JP H047656U JP 4530290 U JP4530290 U JP 4530290U JP 4530290 U JP4530290 U JP 4530290U JP H047656 U JPH047656 U JP H047656U
Authority
JP
Japan
Prior art keywords
thin film
film forming
intake pump
shape
reaction vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4530290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4530290U priority Critical patent/JPH047656U/ja
Publication of JPH047656U publication Critical patent/JPH047656U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP4530290U 1990-04-28 1990-04-28 Pending JPH047656U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4530290U JPH047656U (enrdf_load_stackoverflow) 1990-04-28 1990-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4530290U JPH047656U (enrdf_load_stackoverflow) 1990-04-28 1990-04-28

Publications (1)

Publication Number Publication Date
JPH047656U true JPH047656U (enrdf_load_stackoverflow) 1992-01-23

Family

ID=31559358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4530290U Pending JPH047656U (enrdf_load_stackoverflow) 1990-04-28 1990-04-28

Country Status (1)

Country Link
JP (1) JPH047656U (enrdf_load_stackoverflow)

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