JPH0476032U - - Google Patents
Info
- Publication number
- JPH0476032U JPH0476032U JP11993690U JP11993690U JPH0476032U JP H0476032 U JPH0476032 U JP H0476032U JP 11993690 U JP11993690 U JP 11993690U JP 11993690 U JP11993690 U JP 11993690U JP H0476032 U JPH0476032 U JP H0476032U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- storage space
- wafer support
- cylinder
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993690U JP2502929Y2 (ja) | 1990-11-16 | 1990-11-16 | 保温筒を有する縦型熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993690U JP2502929Y2 (ja) | 1990-11-16 | 1990-11-16 | 保温筒を有する縦型熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0476032U true JPH0476032U (US07943777-20110517-C00090.png) | 1992-07-02 |
| JP2502929Y2 JP2502929Y2 (ja) | 1996-06-26 |
Family
ID=31867866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11993690U Expired - Lifetime JP2502929Y2 (ja) | 1990-11-16 | 1990-11-16 | 保温筒を有する縦型熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2502929Y2 (US07943777-20110517-C00090.png) |
-
1990
- 1990-11-16 JP JP11993690U patent/JP2502929Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2502929Y2 (ja) | 1996-06-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R323117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |