JPH04749U - - Google Patents

Info

Publication number
JPH04749U
JPH04749U JP3905990U JP3905990U JPH04749U JP H04749 U JPH04749 U JP H04749U JP 3905990 U JP3905990 U JP 3905990U JP 3905990 U JP3905990 U JP 3905990U JP H04749 U JPH04749 U JP H04749U
Authority
JP
Japan
Prior art keywords
rotating shaft
arms
changing jig
wafer
wafer changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3905990U
Other languages
English (en)
Other versions
JPH0635471Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3905990U priority Critical patent/JPH0635471Y2/ja
Publication of JPH04749U publication Critical patent/JPH04749U/ja
Application granted granted Critical
Publication of JPH0635471Y2 publication Critical patent/JPH0635471Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)

Description

【図面の簡単な説明】
第１図は、本考案のウエーハ持ち替え用治具の
一実施例を示す、斜視図。第２図は、本考案のウ
エーハ持ち替え用治具の一実施例を示す、正面図
。 １……支持台、２……回転軸、３……頂部、４
……腕、５……円盤、６……ウエーハ持ち替え用
治具、７……ウエーハ。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ 支持台により回転可能に垂直に支持された回
    転軸の頂部に、回転軸を中心として、放射状に斜
    め上方に向けて少なくとも３本の腕を設け、腕と
    支持台間に位置する回転軸の一定高さには、回転
    軸と同心的に円盤を固定したことを特徴とするウ
    エーハ持ち替え用治具。 ２ 腕は、凹状にわん曲した構造であることを特
    徴とする請求項１記載のウエーハ持ち替え用治具
    。
JP3905990U 1990-04-13 1990-04-13 ウエーハ持ち替え用治具 Expired - Lifetime JPH0635471Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3905990U JPH0635471Y2 (ja) 1990-04-13 1990-04-13 ウエーハ持ち替え用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3905990U JPH0635471Y2 (ja) 1990-04-13 1990-04-13 ウエーハ持ち替え用治具

Publications (2)

Publication Number Publication Date
JPH04749U true JPH04749U (ja) 1992-01-07
JPH0635471Y2 JPH0635471Y2 (ja) 1994-09-14

Family

ID=31547622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3905990U Expired - Lifetime JPH0635471Y2 (ja) 1990-04-13 1990-04-13 ウエーハ持ち替え用治具

Country Status (1)

Country Link
JP (1) JPH0635471Y2 (ja)

Also Published As

Publication number Publication date
JPH0635471Y2 (ja) 1994-09-14

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