JPH0474440U - - Google Patents

Info

Publication number
JPH0474440U
JPH0474440U JP11773790U JP11773790U JPH0474440U JP H0474440 U JPH0474440 U JP H0474440U JP 11773790 U JP11773790 U JP 11773790U JP 11773790 U JP11773790 U JP 11773790U JP H0474440 U JPH0474440 U JP H0474440U
Authority
JP
Japan
Prior art keywords
wafer
notches
main body
dovetail
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11773790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11773790U priority Critical patent/JPH0474440U/ja
Publication of JPH0474440U publication Critical patent/JPH0474440U/ja
Pending legal-status Critical Current

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Landscapes

  • Weting (AREA)
JP11773790U 1990-11-13 1990-11-13 Pending JPH0474440U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11773790U JPH0474440U (US20110009641A1-20110113-C00185.png) 1990-11-13 1990-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11773790U JPH0474440U (US20110009641A1-20110113-C00185.png) 1990-11-13 1990-11-13

Publications (1)

Publication Number Publication Date
JPH0474440U true JPH0474440U (US20110009641A1-20110113-C00185.png) 1992-06-30

Family

ID=31865644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11773790U Pending JPH0474440U (US20110009641A1-20110113-C00185.png) 1990-11-13 1990-11-13

Country Status (1)

Country Link
JP (1) JPH0474440U (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10150095A (ja) * 1996-11-18 1998-06-02 Toshiba Corp ウエーハ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10150095A (ja) * 1996-11-18 1998-06-02 Toshiba Corp ウエーハ処理装置

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