JPH0474436U - - Google Patents
Info
- Publication number
- JPH0474436U JPH0474436U JP11683490U JP11683490U JPH0474436U JP H0474436 U JPH0474436 U JP H0474436U JP 11683490 U JP11683490 U JP 11683490U JP 11683490 U JP11683490 U JP 11683490U JP H0474436 U JPH0474436 U JP H0474436U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inspection device
- foreign matter
- solutions
- cleaning solutions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11683490U JPH0474436U (cs) | 1990-11-07 | 1990-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11683490U JPH0474436U (cs) | 1990-11-07 | 1990-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474436U true JPH0474436U (cs) | 1992-06-30 |
Family
ID=31864680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11683490U Pending JPH0474436U (cs) | 1990-11-07 | 1990-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474436U (cs) |
-
1990
- 1990-11-07 JP JP11683490U patent/JPH0474436U/ja active Pending
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