JPH0474425U - - Google Patents

Info

Publication number

JPH0474425U

JPH0474425U JP11812690U JP11812690U JPH0474425U JP H0474425 U JPH0474425 U JP H0474425U JP 11812690 U JP11812690 U JP 11812690U JP 11812690 U JP11812690 U JP 11812690U JP H0474425 U JPH0474425 U JP H0474425U

Authority

JP

Japan

Prior art keywords

wiring

aluminum wiring

aluminum

tungsten silicide

semiconductor device

Prior art date

1990-11-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
• 229910052782 aluminium Inorganic materials 0.000 claims description 6
• WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims description 2
• 229910021342 tungsten silicide Inorganic materials 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000011229 interlayer Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1