JPH0474423U - - Google Patents
Info
- Publication number
- JPH0474423U JPH0474423U JP11839090U JP11839090U JPH0474423U JP H0474423 U JPH0474423 U JP H0474423U JP 11839090 U JP11839090 U JP 11839090U JP 11839090 U JP11839090 U JP 11839090U JP H0474423 U JPH0474423 U JP H0474423U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- heater
- gas
- introduction means
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11839090U JPH0474423U (nl) | 1990-11-08 | 1990-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11839090U JPH0474423U (nl) | 1990-11-08 | 1990-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0474423U true JPH0474423U (nl) | 1992-06-30 |
Family
ID=31866306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11839090U Pending JPH0474423U (nl) | 1990-11-08 | 1990-11-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0474423U (nl) |
-
1990
- 1990-11-08 JP JP11839090U patent/JPH0474423U/ja active Pending