JPH0473983A - Laser pulse stretcher - Google Patents

Laser pulse stretcher

Info

Publication number
JPH0473983A
JPH0473983A JP18535190A JP18535190A JPH0473983A JP H0473983 A JPH0473983 A JP H0473983A JP 18535190 A JP18535190 A JP 18535190A JP 18535190 A JP18535190 A JP 18535190A JP H0473983 A JPH0473983 A JP H0473983A
Authority
JP
Japan
Prior art keywords
light
optical
condenser lens
optical fiber
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18535190A
Other languages
Japanese (ja)
Inventor
Makoto Ishibashi
誠 石橋
Yoshio Tanaka
田中 祥夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18535190A priority Critical patent/JPH0473983A/en
Publication of JPH0473983A publication Critical patent/JPH0473983A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a pulse width altering unit which does not need a complicated optical regulation and a large place by delaying a light via an optical fiber. CONSTITUTION:High reflection plane mirrors 4-7 of prior art are composed of optical fibers 10, and at one end face of the fiber 10 is formed a first condenser lens 11 for introducing a reflected light L2. A second condenser lens l2 is formed for condensing the light L2 transmitted via the fiber 10 and emitted from the other end face to the reflecting surface 2 of an optical unit 3.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明はレーザ光のパルス幅を任意に変更するレーザパ
ルスストレッチャーに関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a laser pulse stretcher that arbitrarily changes the pulse width of laser light.

(従来の技術) たとえば色素レーザシステムでは、金属(銅)蒸気レー
ザ発振装置からのパルスレーザ光でレーザ物質である色
素を励起し、出力した色素レーザ光を増幅する際、パル
ス幅を延ばすことが行われている。このようなパルス幅
の変更は特開昭6444916号等に開示され、それは
第2図に示すように、パルス発振された入射光Llを反
射光L2と透過光L3とに分岐し、さらに反射光L2を
入射面(1)の反対面(2)で部分的に反射して上記透
過光L3との合成光L4とする光学体(3)と、反射光
L2を直角に反射させて反対面(2)に入射させる4枚
の高反射平面鏡(4)乃至(7)で構成された装置で行
われている。第2図において、反射光L2は高反射平面
鏡(4)乃至(7)の反射光路の長さ分時間的に遅延さ
れ、入射光Llの元のパルス幅の変更は、この遅延時間
と光学体(3)の入射面(1)および反対面(2)の各
反射率(透過率)によって決められる。
(Prior art) For example, in a dye laser system, when a dye, which is a laser substance, is excited with pulsed laser light from a metal (copper) vapor laser oscillator and the output dye laser light is amplified, the pulse width may be extended. It is being done. Such a change in pulse width is disclosed in Japanese Patent Application Laid-Open No. 6444916, etc., and as shown in FIG. An optical body (3) that partially reflects L2 on a surface (2) opposite to the incident surface (1) to form a composite light L4 with the transmitted light L3; 2) is carried out using a device consisting of four high-reflection plane mirrors (4) to (7). In FIG. 2, the reflected light L2 is temporally delayed by the length of the reflected optical path of the high-reflection plane mirrors (4) to (7), and the change in the original pulse width of the incident light L1 is based on this delay time and the optical body. (3) It is determined by the reflectance (transmittance) of the incident surface (1) and the opposite surface (2).

(発明が解決しようとする課題) 上記従来の構成では、遅延時間を変更するには高反射平
面鏡(4)乃至(7)の各間隔を変更することになるが
、変更した場合の光学調整に時間がかかるという問題が
あった。また、たとえば20nsecずつ遅延をとって
パルスを重ね会わせてパルス幅を広げようとした場合、
空気中の光束はおよそ3X108 (m/S)であるの
で、20nsecの遅延時間を得るためには約6mの距
離が必要である。このような距離を高反射平面鏡(4)
乃至(7)で構成すると占有面積が極めて広くなってし
まう問題があった。本発明はこのような問題を解決する
ためになされたもので、面倒な光学調整を必要とせずま
た、場所のとらないパルス幅変更装置を提供することを
目的とする。
(Problem to be Solved by the Invention) In the conventional configuration described above, in order to change the delay time, each interval of the high reflection plane mirrors (4) to (7) must be changed, but when changing, the optical adjustment is difficult. The problem was that it took time. Also, if you try to widen the pulse width by overlapping the pulses with a delay of 20 ns, for example,
Since the luminous flux in the air is approximately 3×10 8 (m/S), a distance of approximately 6 m is required to obtain a delay time of 20 nsec. Highly reflective plane mirror (4)
When configured as in (7) above, there is a problem in that the occupied area becomes extremely large. The present invention was made to solve such problems, and an object of the present invention is to provide a pulse width changing device that does not require troublesome optical adjustment and does not take up much space.

[発明の構成] (課題を解決するための手段と作用) 入射面およびこの入射面の反対面とがともに部分反射面
になり、入射光を入射方向以外の方向に反射させる角度
に設けられた光学体と、上記入射面での反射光を集光す
る第1の集光レンズと、この第1の集光レンズの集光さ
れた光を伝送する光ファイバと、この光ファイバから出
光した光を上記反対面における上記入射面での反射光お
よび透過光に重畳みさせる面に集光する第2の集光レン
ズとを備えた構成としたもので、装置自体の占有面積が
減少した。
[Structure of the invention] (Means and effects for solving the problem) Both the incident surface and the opposite surface to the incident surface are partially reflecting surfaces, and are provided at an angle to reflect the incident light in a direction other than the incident direction. an optical body, a first condenser lens that condenses the light reflected by the incident surface, an optical fiber that transmits the condensed light of the first condenser lens, and light emitted from the optical fiber. and a second condensing lens that condenses light onto a surface on which the reflected light and transmitted light from the incident surface on the opposite surface are superimposed, reducing the area occupied by the device itself.

(実施例) 以下、実施例を示す図面に基づいて本発明を説明する。(Example) Hereinafter, the present invention will be described based on drawings showing examples.

なお、第2図と共通する部分には同一符号を付し、重複
を避ける意味でその部分の説明は省略する。すなわち、
第2図に示した従来技術とは、高反射平面鏡(4)乃至
(7)の部分の構成を光ファイバ(10)と、この光フ
ァイ/110)の一端面に反射光L2を入射させる第1
の集光レンズ(11)と、光ファイバ(I[llで伝送
され他端面から出光した反射光L2を光学体(3)の反
対面(2)に集光する第2の集光レンズ(12)とで構
成した点にある。
Note that parts common to those in FIG. 2 are given the same reference numerals, and explanations of those parts will be omitted to avoid duplication. That is,
The prior art shown in FIG. 2 is a configuration in which the high-reflection plane mirrors (4) to (7) are configured so that the reflected light L2 is incident on one end surface of the optical fiber (10) and this optical fiber/110. 1
a condenser lens (11), and a second condenser lens (12) that condenses reflected light L2 transmitted through the optical fiber (I[ll) and emitted from the other end surface onto the opposite surface (2) of the optical body (3) ).

次に、上記の構成の作用について説明する。入射光L1
のパルス幅をT1ピーク値を1、光学体(3)の入射面
(1)および反対面(2)のそれぞれの反射率を共にR
1パルスどうしの遅延時間をΔtとする。入射光L1の
一部は入射面(1)で反射し、ピーク値がRになる反射
光L2は第1の集光レンズ(11)で集光され光ファイ
バ(10)に入射し、ピーク値が(1−R)になる透過
光L3は第1の出射光となる。反射光L2は光ファイバ
(10)を出光し第2の集光レンズ(12)を経て反対
面(2)で反射と透過が行われ、その反射光はピーク値
R2を有し第2の出射光となって上記第1の出射光にΔ
tだけ遅れて重なり合う。一方、反対面(2)を透過し
た光はピーク値が(1−R)Rとなり、光ファイバ(1
0)で伝送され、反対面(2)で反射と透過が繰り返さ
れる。このような反射と透過の繰り返しで光パルスの波
形はΔtずつ遅れて重なり合い、出射光のピーク値は(
1−R)、RR(1−R)、R(1−R)    ・・
・、R2(1−R)“ となり、全体としてみた光パル
ス波形はそれぞれの出射パルス波形の和になる。したが
って、反射率Rと遅延時間との選択でパルス幅を変化さ
せられる。光ファイバ(10)が石英の場合、光の速度
はおよそ、2.lXIO3[m/s] となり、20n
secの遅延時間を得たい場合、光ファイバ(IC)の
長さを約10mにすればよい。
Next, the operation of the above configuration will be explained. Incident light L1
The pulse width of T1 is 1, and the reflectance of the incident surface (1) and the opposite surface (2) of the optical body (3) are both R.
Let the delay time between one pulse be Δt. A part of the incident light L1 is reflected by the incident surface (1), and the reflected light L2 whose peak value is R is focused by the first condensing lens (11) and enters the optical fiber (10), and the peak value is R. The transmitted light L3 in which the value becomes (1-R) becomes the first emitted light. The reflected light L2 is emitted from the optical fiber (10), passes through the second condensing lens (12), and is reflected and transmitted on the opposite surface (2), and the reflected light has a peak value R2 and is transmitted through the second condensing lens (12). Δ
They overlap with a delay of t. On the other hand, the light transmitted through the opposite surface (2) has a peak value of (1-R)R, and the optical fiber (1
0), and reflection and transmission are repeated on the opposite surface (2). Through this repetition of reflection and transmission, the waveforms of the optical pulses overlap with a delay of Δt, and the peak value of the emitted light is (
1-R), RR(1-R), R(1-R)...
, R2(1-R)", and the optical pulse waveform seen as a whole is the sum of the respective output pulse waveforms. Therefore, the pulse width can be changed by selecting the reflectance R and the delay time. If 10) is quartz, the speed of light is approximately 2.1XIO3 [m/s], which is 20n
If it is desired to obtain a delay time of sec, the length of the optical fiber (IC) should be approximately 10 m.

[発明の効果] 光の遅延を光ファイバで行ったので、従来の平面鏡のよ
うな面倒な光学調整が不要となった。また、遅延させる
ための距離を短縮でき巻き上げた状態で設置可能なこと
から、従来に比べて占有面積を著しく狭めることができ
た。
[Effects of the Invention] Since the light is delayed using an optical fiber, there is no need for the troublesome optical adjustment required for conventional plane mirrors. Additionally, because the delay distance can be shortened and the device can be installed in a rolled-up state, the area it occupies can be significantly reduced compared to conventional devices.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す構成図、第2図は従来
例を示す構成図である。 (3)・・・光学体 (10)・・9光ファイバ (11)・・・第1の集光レンズ (12)・・・第2の集光レンズ
FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional example. (3)...Optical body (10)...9 optical fibers (11)...first condenser lens (12)...second condenser lens

Claims (1)

【特許請求の範囲】[Claims] 入射面およびこの入射面の反対面とがともに部分反射面
になり、入射光を入射方向以外の方向に反射させる角度
に設けられた光学体と、上記入射面での反射光を集光す
る第1の集光レンズと、この第1の集光レンズの集光さ
れた光を伝送する光ファイバと、この光ファイバから出
光した光を上記反対面における上記入射面での反射光お
よび透過光に重畳みさせる面に集光する第2の集光レン
ズとを備えたことを特徴とするレーザパルスストレッチ
ャー。
Both the entrance surface and the surface opposite to the entrance surface are partially reflective surfaces, and an optical body is provided at an angle to reflect the incident light in a direction other than the direction of incidence, and a third lens is provided to condense the light reflected from the entrance surface. a condenser lens, an optical fiber for transmitting the light condensed by the first condenser lens, and a light emitted from the optical fiber into reflected light and transmitted light at the incident surface on the opposite surface. A laser pulse stretcher comprising: a second condensing lens that condenses light onto a surface to be superimposed.
JP18535190A 1990-07-16 1990-07-16 Laser pulse stretcher Pending JPH0473983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18535190A JPH0473983A (en) 1990-07-16 1990-07-16 Laser pulse stretcher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18535190A JPH0473983A (en) 1990-07-16 1990-07-16 Laser pulse stretcher

Publications (1)

Publication Number Publication Date
JPH0473983A true JPH0473983A (en) 1992-03-09

Family

ID=16169271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18535190A Pending JPH0473983A (en) 1990-07-16 1990-07-16 Laser pulse stretcher

Country Status (1)

Country Link
JP (1) JPH0473983A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6389045B1 (en) 1999-04-19 2002-05-14 Lambda Physik Ag Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers
CN103427316A (en) * 2013-08-22 2013-12-04 中国科学院上海光学精密机械研究所 Laser pulse stretching device
JPWO2018020564A1 (en) * 2016-07-26 2019-05-09 ギガフォトン株式会社 Laser system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6389045B1 (en) 1999-04-19 2002-05-14 Lambda Physik Ag Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers
CN103427316A (en) * 2013-08-22 2013-12-04 中国科学院上海光学精密机械研究所 Laser pulse stretching device
CN103427316B (en) * 2013-08-22 2015-09-16 中国科学院上海光学精密机械研究所 Laser pulse stretching device
JPWO2018020564A1 (en) * 2016-07-26 2019-05-09 ギガフォトン株式会社 Laser system

Similar Documents

Publication Publication Date Title
JPH03214682A (en) Laser
DE69128001T2 (en) Dichroic mirror and projector equipped with it
US7620080B2 (en) Laser pulse conditioning
KR100237938B1 (en) Laser pulse extender
KR950031358A (en) Laser oscillator
US4639740A (en) Laser marking enhancement system using reflection from the mask
JPH0473983A (en) Laser pulse stretcher
JPS6373221A (en) Speckle erasing optical device
JPH08228038A (en) Narrow-band laser generator
US4969156A (en) Laser cavity having an adjustable optical path length extender
JPS62254105A (en) Reflecting mirror
JPS6348884A (en) Laser resonator
US20040247001A1 (en) Laser configuration with resonator internal frequency conversion
JPS6354235B2 (en)
JP2776412B2 (en) Narrow band ArF excimer laser device
JP2001116906A (en) Device and method for light attenuator
JP3554373B2 (en) Distance measuring optical system
JPH04247674A (en) Laser
JPH03233988A (en) Laser device
JP2002006122A (en) Laser mirror
JPH065953A (en) Solid state laser
JPH0638530B2 (en) Q switch laser device
JP2004042076A (en) Light source for machining
JPH04174579A (en) Laser device
JPH0394989A (en) Optical processing device