JPH0473861U - - Google Patents
Info
- Publication number
- JPH0473861U JPH0473861U JP11705690U JP11705690U JPH0473861U JP H0473861 U JPH0473861 U JP H0473861U JP 11705690 U JP11705690 U JP 11705690U JP 11705690 U JP11705690 U JP 11705690U JP H0473861 U JPH0473861 U JP H0473861U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- gas detection
- detection element
- substrate
- hereinafter referred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 229910000510 noble metal Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11705690U JPH0473861U (pl) | 1990-11-06 | 1990-11-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11705690U JPH0473861U (pl) | 1990-11-06 | 1990-11-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0473861U true JPH0473861U (pl) | 1992-06-29 |
Family
ID=31864930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11705690U Pending JPH0473861U (pl) | 1990-11-06 | 1990-11-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0473861U (pl) |
-
1990
- 1990-11-06 JP JP11705690U patent/JPH0473861U/ja active Pending