JPH0473839A - Conductive film forming device - Google Patents

Abstract

PURPOSE:To accurately carry out the coating of a conductive film on a fluorescent lamp bulb by setting the temperature in a furnace based on the measurement result of the resistance of the conductive film of the fluorescent lamp bulb, which is exhausted from the furnace, and by controlling the temperature in the furnace based on the result. CONSTITUTION:The resistance of a conductive film of a fluorescent lamp bulb, which is exhausted from a furnace 11, is measured by a resistance measurement device 26, and the measured resistance by the resistance measurement device 26 is compared with an aimed value of resistance maintenance, which is preliminarily set for the measurement resistance, by a sequencer 32, and the temperature in the furnace is set based on the difference, and a signal of the set temperature is supplied to a proportion controller 29, by which the set temperature is compared with the temperature in the furnace measured by a thermal body 28 for measurement of furnace temperature, and a switch valve controller 31 is controlled in such a way that the temperature in the furnace will be the same as the set temperature, and the opening of an automatic switch valve 30 is adjusted, so as to control the supply of combustion gas to a heating means. The coating of the conductive film on the fluorescent lamp bulb is carried out accurately constantly, while the level of the resistance of the conductive film can thus be maintained almost stable.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a conductive film forming apparatus for coating a transparent conductive film on the inner surface of a bulb of, for example, a rapid start type fluorescent lamp.

(Prior art) A conductive film forming device that coats a conductive film on the inner surface of a fluorescent light bulb supplies the fluorescent light bulb into a furnace, heats it with a heating means such as a burner, and then applies a coating to the heated fluorescent light bulb. A conductive coating is applied to the inner surface of the fluorescent lamp bulb by blowing vapor of a chemical, such as an organic tin compound, through a nozzle from one open end and removing air through a duct from the other open end. Fluorescent lamp bulbs that have been coated with a conductive film are discharged from the furnace.

Then, as shown in FIG. 4, combustion gas is supplied from the outside to the heating means provided in the furnace 1 through a solenoid valve 2, and the temperature inside the furnace 1 is measured with a thermocouple 3. The temperature measurement output from pair 3 is supplied to proportional control section 4. Then, the electric automatic on-off valve control section 5 is controlled based on the temperature measurement value inputted in the proportional control section 4, and the automatic on-off valve control section 5 adjusts the opening degree of the on-off valve 2, thereby controlling the heating means. The amount of gas supplied to the reactor, in other words the input energy of the furnace, was controlled.

(Problem to be solved by the invention) However, if the furnace input energy is controlled only based on the measured value of the temperature inside the furnace, for example, the fluorescent light bulb inside the furnace may become empty, or the fluorescent light bulb may become empty. If the furnace is clogged, the temperature inside the furnace will change greatly due to the change in the amount of heat stored in the heated object, causing a sudden change in the opening degree of the solenoid valve 2. As a result, the conductive film coating on the valve will be affected. There was a problem that had a negative impact.

Furthermore, since the temperature of the phosphor bulb cannot be directly measured, depending on the conditions, there may be a large difference between the temperature measured by the thermocouple and the temperature of the phosphor bulb, which may have an adverse effect on the conductive film coating on the bulb.

If a situation like this occurs in which the conductive film is not applied accurately to the fluorescent lamp bulb, the resistance value of the conductive film will fluctuate greatly. For example, if the resistance value increases, the starting voltage of the fluorescent lamp will rise abnormally, and When the resistance value becomes small, there is a problem that a blackening phenomenon occurs earlier during lighting, resulting in a defective product.

There is also a problem in that the coating of the conductive film on the fluorescent lamp bulb changes due to changes in temperature, variations in the amount of chemicals injected, etc., and the resistance value of the conductive film fluctuates.

SUMMARY OF THE INVENTION Therefore, the present invention aims to provide a conductive film forming apparatus that can always accurately coat a fluorescent lamp bulb with a conductive film, and therefore can control the resistance value of the conductive film to be approximately constant. .

[Structure of the Invention (Means for Solving the Problem) The invention corresponding to claim (1) is to supply a fluorescent lamp bulb into a furnace and heat it with a heating means, and to A conductive film is coated on the inner surface of the fluorescent lamp bulb by injecting a chemical that becomes a conductive film material from one open end and releasing air from the other open end.
In a conductive coating forming device that discharges fluorescent lamp bulbs from the furnace after coating with conductive coating, there is a furnace temperature measurement element that measures the temperature inside the furnace, and a resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace. A resistance measuring device to be measured, a set temperature determining means for determining a set temperature in the furnace from the difference between the measurement result of this resistance measuring device and a preset resistance management target value, and Temperature control means is provided for controlling input energy to the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature and the temperature measured by the furnace temperature measuring element.

The invention corresponding to claim (2) also provides a furnace temperature measuring element for measuring the temperature inside the furnace, a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the inside of the furnace, and a fluorescent lamp inside the furnace. Bulb clogging detection means for detecting clogging of the light bulb;
a set temperature determining means for determining a set temperature in the furnace from the difference between the measurement result of the resistance measuring device and a preset resistance management target value and the detection result of the valve clogging detection means; Temperature control means is provided for controlling input energy to the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature and the temperature measured by the furnace temperature measuring element.

The invention corresponding to claim (3) also provides a furnace temperature measuring element for measuring the temperature inside the furnace, a resistance measuring device for measuring the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the inside of the furnace, and a fluorescent lamp inside the furnace. bulb empty detection means for detecting that the light bulb is empty;
a set temperature determining means for determining a set temperature in the furnace from the difference between the measurement result of the resistance measuring device and a preset resistance management target value and the detection result of the empty valve detecting means; Temperature control means is provided for controlling input energy to the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature and the temperature measured by the furnace temperature measuring element.

The invention corresponding to claim (4) also provides a furnace temperature measuring element for measuring the temperature inside the furnace, a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the inside of the furnace, and a chemical injection device. A setting means for setting a time, and a set temperature determination for determining a set temperature in the furnace from the difference between the measurement result of the resistance measuring device and a preset resistance management target value and the chemical injection time set by the setting means. and a temperature control means for controlling input energy to the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. It is something.

The invention corresponding to claim (5) also provides a furnace temperature measuring element for measuring the temperature inside the furnace, a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the furnace, and a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the furnace. The inside of the furnace is determined based on the difference between the measurement result of the resistance measuring device and the preset resistance management target value and the discharge valve temperature detected by the bulb temperature detection means. A set temperature determining means for determining the set temperature of the heating means, and input energy to the heating means so that the temperature inside the furnace reaches the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. It is equipped with temperature control means for controlling the temperature.

The invention corresponding to claim (6) also provides a furnace temperature measuring element for measuring the temperature inside the furnace, a resistance measuring device for measuring the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the inside of the furnace, and a resistance measuring device for measuring the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the inside of the furnace. The set temperature in the furnace is determined from the difference between the measurement result of the chemical temperature detection means that detects the temperature and the resistance measuring device and the preset resistance management target value, and the temperature of the injected chemical detected by the chemical temperature detection means. and a temperature control that controls input energy to the heating means so that the temperature inside the furnace reaches the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. This means that a means has been established.

Furthermore, the invention corresponding to claim (7) provides a furnace temperature measuring element for measuring the temperature inside the furnace, a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the inside of the furnace, and this resistance measuring device. a set temperature determining means for determining the set temperature in the furnace from the difference between the measurement result and a preset resistance management target value, and a set temperature determined by the set temperature determining means and the measured temperature of the furnace temperature measuring element. temperature control means for controlling the input energy to the heating means so that the temperature in the furnace reaches a set temperature based on the temperature, a clogging detection means for detecting clogging of a fluorescent light bulb in the furnace, and a fluorescent light bulb in the furnace. bulb empty detection means for detecting that the lamp is empty; bulb temperature detection means for detecting the temperature of the fluorescent lamp bulb discharged from the furnace; and chemical temperature detection means for detecting the temperature of the injected chemical;
A heater that heats the injected chemicals, and one or both of the energy applied to the heater and the time for injecting the chemicals, the measured temperature of the furnace temperature measuring element, the #1 constant result of the resistance measuring device, and the detection of the valve clogging detection means. As a result, a setting means is provided for setting based on one or more of the detection result of the empty valve detection means, the temperature detected by the valve temperature detection means, and the temperature detected by the chemical temperature detection means.

(Function) In the invention corresponding to claim (1), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Then, this resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined from the difference. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In this way, the set temperature in the furnace is determined based on the results of measuring the resistance value of the conductive coating of the fluorescent lamp bulb using a resistance measuring device, and the temperature inside the furnace is controlled based on this using the furnace temperature measuring element.
Compared to systems that control the temperature inside the furnace using only a furnace temperature measurement element, the conductive film can be applied to fluorescent lamp bulbs more accurately.

Further, in the invention corresponding to claim (2), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Further, the degree of clogging of the in-furnace fluorescent lamp bulb is detected by a bulb clogging detection means.

Then, the resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined from the difference therebetween and the result of detecting the degree of clogging of the fluorescent lamp bulb. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In this way, the set temperature inside the furnace is determined based on the results of measuring the resistance value of the conductive coating of the fluorescent light bulb using a resistance measuring device and the degree of clogging of the fluorescent light bulb, and based on this, the temperature within the furnace is controlled using the furnace temperature measuring element. Therefore, in this case as well, the conductive film can be applied accurately to the fluorescent lamp bulb.

Further, in the invention corresponding to claim (3), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Further, the empty bulb detection means detects that the fluorescent lamp bulb in the furnace is empty.

Then, the resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined from the difference therebetween and the detection result of the empty valve detection means. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In this way, the set temperature in the furnace is determined based on the result of measuring the resistance value of the conductive coating of the fluorescent light bulb using a resistance measuring device and whether the fluorescent light bulb is empty.Based on that, the temperature inside the furnace is determined using the furnace temperature measuring element. Since control is performed, the conductive film can be applied accurately to the fluorescent lamp bulb in this case as well.

Further, in the invention corresponding to claim (4), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Further, the chemical injection time is set by the setting means. Then, the resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined from the difference therebetween and the set chemical injection time. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In this way, the set temperature inside the furnace is determined from the results of measuring the resistance value of the conductive coating of the fluorescent lamp bulb using a resistance measuring device and the chemical injection time, and based on this, the temperature inside the furnace is controlled using the furnace temperature measuring element. Therefore, in this case as well, the conductive film can be applied accurately to the fluorescent lamp bulb.

Further, in the invention corresponding to claim (5), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Further, the temperature of the fluorescent lamp bulb discharged from the furnace is detected by the bulb temperature detection means. Then, the resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined based on the difference therebetween and the detected valve temperature. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In this way, the set temperature in the furnace is determined based on the results of measuring the resistance value of the conductive coating of the fluorescent lamp bulb using the resistance measuring device and the detected bulb temperature, and based on this, the temperature inside the furnace is controlled using the furnace temperature measuring element. Therefore, in this case as well, the conductive film can be applied accurately to the fluorescent lamp bulb.

Further, in the invention corresponding to claim (6), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Further, the temperature of the chemical injected into the fluorescent lamp bulb is detected by the chemical temperature detection means.

Then, the resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined from the difference therebetween and the detected chemical temperature. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In this way, the set temperature in the furnace is determined from the results of measuring the resistance value of the conductive coating of the fluorescent lamp bulb using the resistance mJ meter and the detected chemical temperature, and based on that, the temperature in the furnace is controlled using the furnace temperature measurement element. Therefore, in this case as well, the conductive film can be applied accurately to the fluorescent lamp bulb.

Furthermore, in the invention corresponding to claim (7), the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace is measured using a resistance measuring device. Then, this resistance value measurement result is compared with the resistance management target value, and the set temperature in the furnace is determined from the difference. Then, the input energy to the heating means is controlled based on the determined set temperature and the temperature measured by the furnace temperature measuring element. In addition, the degree of clogging of the fluorescent light bulb in the furnace, whether the fluorescent light bulb in the furnace is empty, the temperature of the fluorescent light bulb being discharged,
The temperature of each injected chemical is detected. Then, one or both of the energy applied to the heater that heats the injected chemicals and the time for injecting the chemicals are determined by the measured temperature inside the furnace, the measured resistance value of the conductive film, the degree of clogging of the fluorescent lamp bulb in the furnace, and the fluorescent lamp inside the furnace. The setting is based on one or more of the following: whether the bulb is empty, the temperature of the fluorescent light bulb being discharged, and the temperature of the injected chemical.

In this way, the set temperature in the furnace is determined based on the results of measuring the resistance value of the conductive coating of the fluorescent lamp bulb using a resistance measuring device, and based on this, the furnace temperature is controlled using the furnace temperature measuring element, and the injected chemicals are controlled. One or both of the energizing energy to the heater and the time for blowing chemicals can be adjusted based on the measured temperature inside the furnace, the measured resistance value of the conductive film, the degree of clogging of the fluorescent light bulb in the furnace, and whether the fluorescent light bulb in the furnace is empty or not. However, since the temperature is set based on one or more of the temperature of the discharged fluorescent lamp bulb and the temperature of the blown chemical, the conductive film can be accurately applied to the fluorescent lamp bulb in this case as well.

(Example) Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

In Fig. 1, reference numeral 11 is a furnace that heats a fluorescent light bulb supplied from one side, coats the inside of the bulb with a conductive film, and discharges the fluorescent light bulb coated with the conductive film from the other side. .

That is, the furnace 11 has a furnace wall 12.1 as shown in FIG.
A fluorescent lamp bulb 13 is supported between the rollers 2 and is rotated by a pair of rollers 14, 14 (only one of which is shown). The fluorescent lamp bulb 13 is then heated by a heating means 15 such as a burner. The pair of rollers 14.degree. 14 are rotationally controlled using a motor 16 as a driving source.

Note that FIG. 2 is a sectional view of the furnace 11 viewed from the outlet side.

A nozzle 17 is arranged to face one open end of the fluorescent lamp bulb 13, and a duct 18 is arranged to face the other open end.

The nozzle 17 communicates with a hot air blowing vibe 20 through a chemical tank 19, and a blowing solenoid valve 21 is provided in the middle of the hot air blowing vibe 20.

The chemical tank 19 contains, for example, (CH3)2SnCl.
An appropriate amount of an organic tin compound such as C2 or (C2H5)2SnC12 is put in as a conductive coating material, and this conductive coating material is evaporated by heating the tank 19 with a heater 22. Then, the generated steam is blown into the fluorescent lamp bulb 13 from the nozzle 17 using the hot air from the hot air blowing vibe 20 as a carrier. Prior to this blowing, the fluorescent lamp bulb 13 is heated to a predetermined temperature by the heating means 15.

Further, the duct 18 is adapted to suck air, etc. inside the fluorescent lamp bulb 13.

The chemical tank 19 is also provided with a chemical temperature detecting thermocouple 23 as a chemical temperature detecting means.

Further, as shown in FIG. 1, a valve empty detection means 24 is provided at the entrance of the furnace 11 to detect whether or not the inside of the furnace is empty, and at the exit, a valve empty detection means 24 is installed to detect whether the fluorescent lamp bulb 13 inside the furnace is clogged. Valve clogging detection means 25 is provided.

A resistance measuring device 26 for measuring the resistance value of the conductive film is disposed in the discharge path of the fluorescent lamp bulb 13 discharged from the furnace 11 after coating with the conductive film. Further, an infrared camera 27 is disposed at the outlet of the furnace 11 as a bulb temperature detecting means for detecting the temperature of the fluorescent lamp bulb 13 discharged after coating with the conductive film is completed.

A furnace temperature measuring thermocouple 28 is provided inside the furnace 11 as a furnace temperature measuring element for measuring the temperature inside the furnace.
The temperature measurement output from 8 is supplied to a proportional control section 29 constituting temperature control means.

A supply path for supplying combustion gas to the heating means 15 provided in the furnace is provided with, for example, an electric automatic on-off valve 30 for controlling the gas supply amount, and the opening degree of this on-off valve 30 is determined by the on-off valve. Adjustment control is performed by a control section 31.

The on-off valve control section 31 is controlled by the proportional control section 29.

The chemical temperature detection thermocouple 23 and the empty valve detection means 24
, the valve clogging detection means 25, the resistance measuring device 26, and the detection signal and the measurement signal from the infrared camera 27 are supplied to the sequencer 32, respectively.

The sequencer 32 is adapted to control the blow solenoid valve 21 and the proportional control section 29.

The sequencer 32 includes a set temperature determining means that compares the resistance measurement value of the conductive film by the resistance measuring device 26 with a preset resistance management target value, and determines the set temperature in the furnace from the difference. The heating means 15 adjusts the furnace temperature to the set temperature based on the set temperature determined by the determining means and the temperature measured by the furnace temperature measuring thermocouple 28.
Temperature control means for controlling input energy to the chemical temperature detection thermocouple 23, valve empty detection means 24, valve clogging detection means 25, resistance measuring device 26, infrared camera 2
Based on the detection signal and measurement signal from 7, the heater 22
One or both of the energizing energy and the hot air blowing time to the chemical tank 19, for example, the heater 2
Setting means is provided for setting both the energization energy to 2 and the hot air blowing time.

In this embodiment with such a configuration, the furnace 11 is connected from the inlet.
Fluorescent lamp bulbs 13 are sequentially supplied inside and heated by heating means 15. When the fluorescent lamp bulb 13 reaches the position where the nozzle 17 and the duct 18 face each other, the blowing solenoid valve 21
is opened based on a preset hot air blowing time.

In this way, the vapor of the conductive coating material from the chemical tank 19 is blown into the fluorescent lamp bulb 13 from the nozzle 17 by hot air. The ash remaining in the fluorescent lamp bulb 13 is then sucked out by the duct 18 and removed.

In this way, the fluorescent lamp bulb 13 is coated with a conductive film, and the coated fluorescent lamp bulb 1
3 is discharged from the outlet. Then, the resistance value of the conductive coating of the discharged fluorescent lamp bulb 13 is measured by the resistance measuring device 26, and the measured value is supplied to the sequencer 32.

Further, at the inlet of the furnace 11, the valve empty detection means 24 detects the supply state of the bulb, and the fluorescent lamp bulb 13 is detected in the furnace.
At the same time, the discharge state of the bulb is detected by the valve clogging detection means 25 at the outlet of the furnace 11, and the fluorescent lamp bulb 1 in the furnace is checked to see if it is empty.
The degree of clogging in step 3 is checked. This detection result is then supplied to the sequencer 32.

Further, at the exit of the furnace 11, the temperature state of the discharged fluorescent lamp bulb 13 is detected by an infrared camera 27, and the detection result is supplied to the sequencer 32.

Furthermore, the chemical tank 1 is
The temperature of the conductive coating material in the conductive film 9 is detected and the detection result is supplied to the sequencer 32.

Further, the furnace temperature is measured by the furnace temperature measuring thermocouple 28, and the measured temperature is supplied to the proportional control section 29.

The sequencer 32 compares the resistance value measured by the resistance measuring device 26 with a preset resistance management target value, and determines the set temperature in the furnace based on the difference. This set temperature signal is then supplied to the proportional control section 29.

The proportional control unit 29 compares the actual furnace temperature measured by the furnace temperature measuring thermocouple 28 with the set temperature, and controls the on-off valve control unit 31 so that the furnace temperature becomes the set temperature, so that the automatic on-off valve is activated. 30 is adjusted to adjust the amount of combustion gas supplied to the heating means 15.

The sequencer 32 also receives a temperature detection signal from the chemical temperature detection thermocouple 23, a detection signal from the valve empty detection means 24,
Based on the detection signal from the valve clogging detection means 25, the resistance measurement signal from the resistance measuring device 26, and the temperature detection signal from the infrared camera 27, the energization energy to the heater 22 is set, and the opening time of the blow solenoid valve 21; That is, the time for blowing hot air into the chemical tank 19 is set.

In this way, the energy applied to the heater 22 and the opening time of the solenoid valve 21 are controlled so that the resistance value of the conductive coating of the fluorescent lamp bulb 13 approaches the resistance management target value.

In this way, the furnace temperature is controlled based on the set temperature determined by comparing the resistance value measured by the resistance measuring device 26 with the resistance management target value. Even if a large difference occurs in the temperature of the furnace, the resistance value of the conductive film approaches the resistance management target value when the temperature inside the furnace is reduced, so that the conductive film can be coated accurately.

Also, energizing energy to the heater 22 and blowing solenoid valve 2
Since the opening time of 1 is also controlled so that the resistance value of the conductive film of the fluorescent lamp bulb 13 approaches the resistance management target value, coating with the conductive film can be performed more accurately.

In this way, since the conductive film of the fluorescent lamp bulb 13 can be coated accurately, the resistance value can be controlled to be approximately constant, and quality can be improved.

In the above embodiment, energy is supplied to the heater and hot air is supplied to the chemical tank based on the thermocouple for detecting the chemical temperature, the empty valve detecting means, the valve clogging detecting means, the resistance measuring device, the detection signal from the infrared camera, and the measurement signal. However, it is not necessarily limited to this, and even if either of the energizing energy to the heater and the hot air blowing time to the chemical tank is set, or if In some cases, no settings may be made at all.

Furthermore, in the above embodiment, the set temperature in the furnace was determined based on the difference between the resistance measurement value from the resistance measuring device and the resistance management target value, but the invention is not limited to this, and the valve clogging detection Even if the determination is made by taking into account the detection result from the hanging means, or by taking into account the detection result from the empty bulb detection means, or by taking into account the difference therebetween, the detection result of the fluorescent lamp bulb temperature by an infrared camera is determined. Whether it is determined by taking into account the difference in temperature, or by taking into account the result of detecting the temperature of a fluorescent lamp bulb by an infrared camera, or by taking into account the result of detecting the temperature of a chemical by a thermocouple for detecting chemical temperature. You may decide by doing so. Furthermore, a plurality of detection results from each of these means may be taken into consideration in determining the set temperature in the furnace.

In this way, additional conditions are taken into account, so that the conductive film can be coated more accurately.

In the above embodiment, a thermocouple for detecting chemical temperature, a valve empty detection means for detecting whether a fluorescent light bulb in the furnace is empty, and a clogging state of the fluorescent light bulb in the furnace are used. Although the bulb clogging detection means and the infrared camera for detecting the temperature of the fluorescent lamp bulb discharged from the furnace are arranged, these may be omitted. The configuration in this case is as shown in FIG.

In FIG. 3, the set temperature in the furnace is determined only on the basis of the difference between the resistance measurement value from the resistance measuring device 26 and the resistance management target value in the sequencer 32.

In this case, even if there is a large difference between the temperature inside the furnace and the temperature of the fluorescent light bulb 13, the temperature inside the furnace is immediately corrected so that the resistance value of the conductive coating coated on the fluorescent light bulb 13 approaches the resistance management target value. Therefore, the conductive film can be coated accurately.

[Effects of the Invention] As detailed above, according to the present invention, it is possible to always accurately coat a fluorescent lamp bulb with a conductive film,
Therefore, it is possible to provide a conductive film forming apparatus that can control the resistance value of the conductive film to be substantially constant.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing one embodiment of the present invention, FIG. 2 is a schematic diagram showing the main structure of a furnace in the same embodiment, and FIG. 3 is a block diagram showing another embodiment of the present invention. FIG. 4 is a block diagram showing a conventional example. DESCRIPTION OF SYMBOLS 11... Furnace, 13... Fluorescent lamp bulb, 15... Heating means, 19... Chemical tank, 22... Heater, 23... Thermocouple for detecting chemical temperature, 24... Valve Empty detection means, 25... Valve clogging detection means, 26... Resistance measuring device, 27... Infrared camera, 29... Proportional control section, 30... Automatic opening/closing valve, 32... Sequencer. Figure 3 Applicant's agent Patent attorney Takehiko Suzue Figure 4

Claims (7)

[Claims] (1) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is injected from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. element, a resistance measuring device that measures the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace, and a resistance measuring device that measures the resistance value of the inside of the furnace based on the difference between the measurement result of this resistance measuring device and a preset resistance management target value. a set temperature determining means for determining a set temperature of the heating means; and a set temperature determining means for determining a set temperature of the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. A conductive film forming apparatus characterized by being provided with a temperature control means for controlling input energy. (2) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is injected from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. a resistance measuring device for measuring a resistance value of a conductive coating of a fluorescent lamp bulb discharged from the furnace, a bulb clogging detection means for detecting clogging of the fluorescent lamp bulb in the furnace, and the resistance measuring device. a set temperature determining means for determining a set temperature in the furnace from the difference between the measurement result and a preset resistance management target value and the detection result of the valve clogging detecting means; and a setting determined by the set temperature determining means. A conductive film forming apparatus comprising: a temperature control means for controlling input energy to the heating means so that the temperature inside the furnace reaches a set temperature based on the temperature and the temperature measured by the furnace temperature measuring element. (3) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is blown from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the furnace; a bulb empty detection means for detecting that the fluorescent lamp bulb in the furnace is empty; Set temperature determining means for determining a set temperature in the furnace from the difference between the measurement result of the resistance measuring device and a preset resistance management target value and the detection result of the empty valve detection means;
Temperature control means is provided for controlling input energy to the heating means so that the temperature inside the furnace reaches the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. A conductive film forming device characterized by: (4) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is blown from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. an element, a resistance measuring device for measuring the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace, a setting means for setting the injection time of the chemical, and a measurement result of the resistance measuring device and preset settings. a set temperature determining means for determining a set temperature in the furnace from the difference from the resistance management target value set by the setting means and the chemical injection time set by the setting means; A conductive film forming apparatus characterized in that a temperature control means is provided for controlling input energy to the heating means so that the temperature inside the furnace reaches a set temperature based on the temperature measured by the furnace temperature measuring element. (5) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is blown from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. a resistance measuring device for measuring a resistance value of a conductive coating of a fluorescent lamp bulb discharged from the furnace, a bulb temperature detection means for detecting a temperature of the fluorescent lamp bulb discharged from the furnace, and the resistor. a set temperature determining means for determining a set temperature in the furnace from the difference between the measurement result of the measuring device and a preset resistance management target value and the discharge valve temperature detected by the valve temperature detecting means; It is characterized by providing a temperature control means for controlling input energy to the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature determined by the determining means and the temperature measured by the furnace temperature measuring element. Conductive film forming equipment. (6) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is injected from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. a resistance measuring device for measuring the resistance value of a conductive coating of a fluorescent lamp bulb discharged from the furnace, a chemical temperature detection means for detecting the temperature of the injected chemical, and a measurement result of the resistance measuring device; Set temperature determining means for determining a set temperature in the furnace from the difference from a preset resistance management target value and the injected chemical temperature detected by the chemical temperature detecting means;
Temperature control means is provided for controlling input energy to the heating means so that the temperature inside the furnace reaches the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. A conductive film forming device characterized by: (7) A fluorescent light bulb is supplied into a furnace and heated by a heating means, and a chemical that becomes a conductive coating material is blown into the heated fluorescent light bulb from one open end, and air is injected from the other open end. Furnace temperature measurement for measuring the temperature inside the furnace in a conductive film forming apparatus that coats the inner surface of a fluorescent lamp bulb with a conductive film by removing the conductive film and discharges the fluorescent lamp bulb coated with the conductive film from the furnace. element, a resistance measuring device that measures the resistance value of the conductive coating of the fluorescent lamp bulb discharged from the furnace, and a resistance measuring device that measures the resistance value of the inside of the furnace based on the difference between the measurement result of this resistance measuring device and a preset resistance management target value. a set temperature determining means for determining a set temperature of the heating means; and a set temperature determining means for determining a set temperature of the heating means so that the temperature inside the furnace becomes the set temperature based on the set temperature determined by the set temperature determining means and the temperature measured by the furnace temperature measuring element. temperature control means for controlling input energy; bulb clogging detection means for detecting the degree of clogging of the fluorescent light bulb in the furnace; and bulb empty detection means for detecting that the fluorescent light bulb in the furnace is empty. , a bulb temperature detection means for detecting the temperature of a fluorescent lamp bulb discharged from the furnace, a chemical temperature detection means for detecting the temperature of the injected chemical, a heater for heating the injected chemical, and a heater for heating the injected chemical; One or both of the energization energy and the blowing time of the chemical, the temperature measured by the furnace temperature measuring element, the measurement result of the resistance measuring device, the detection result of the valve clogging detection means, the detection result of the valve empty detection means, and the valve temperature. Detection temperature of the detection means, 1 of the detection temperature of the chemical temperature detection means
Alternatively, a conductive film forming apparatus is provided with a setting means for setting based on a plurality of values.