JPH04737U - - Google Patents
Info
- Publication number
- JPH04737U JPH04737U JP4007490U JP4007490U JPH04737U JP H04737 U JPH04737 U JP H04737U JP 4007490 U JP4007490 U JP 4007490U JP 4007490 U JP4007490 U JP 4007490U JP H04737 U JPH04737 U JP H04737U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- sample mounting
- electrode
- sample
- rotation shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 5
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4007490U JPH04737U (pl) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4007490U JPH04737U (pl) | 1990-04-13 | 1990-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04737U true JPH04737U (pl) | 1992-01-07 |
Family
ID=31549547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4007490U Pending JPH04737U (pl) | 1990-04-13 | 1990-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04737U (pl) |
-
1990
- 1990-04-13 JP JP4007490U patent/JPH04737U/ja active Pending