JPH047308U - - Google Patents
Info
- Publication number
- JPH047308U JPH047308U JP4836090U JP4836090U JPH047308U JP H047308 U JPH047308 U JP H047308U JP 4836090 U JP4836090 U JP 4836090U JP 4836090 U JP4836090 U JP 4836090U JP H047308 U JPH047308 U JP H047308U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- support part
- respect
- crystal plane
- orientation direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
第１図は本考案によるカンチレバー体の平面図
である。第２図はその断面図である。第３図は本
考案によるカンチレバー体と試料の位置関係を示
す説明図である。第４図は従来のカンチレバー体
の平面図、第５図はその断面図である。第６図は
従来のカンチレバー体と試料の位置関係を示す説
明図である。
１……Ｓｉの１１０方向、２……カンチレバー
支持部、３……カンチレバー支持部境界線、４…
…カンチレバー、５……カンチレバーの中心線、
６……境界線端部、７……位置合わせピン、８…
…試料面、９……支持部の幅、１０……試料面、
１１……支持部の端部。
FIG. 1 is a plan view of a cantilever body according to the present invention. FIG. 2 is a sectional view thereof. FIG. 3 is an explanatory diagram showing the positional relationship between the cantilever body and the sample according to the present invention. FIG. 4 is a plan view of a conventional cantilever body, and FIG. 5 is a sectional view thereof. FIG. 6 is an explanatory diagram showing the positional relationship between a conventional cantilever body and a sample. 1... 110 direction of Si, 2... Cantilever support part, 3... Cantilever support part boundary line, 4...
...cantilever, 5...center line of cantilever,
6...Border line end, 7...Positioning pin, 8...
...Sample surface, 9...Width of support part, 10...Sample surface,
11... End of the support part.
Claims (1)
チレバー支持部とからなるカンチレバー体におい
て、前記カンチレバーの結晶面方位方向に対し、
カンチレバー支持部の辺がなす角度を９０°より
も大きく形成すると共に、前記カンチレバー支持
部の辺の一部に前記カンチレバーの結晶面方位方
向に対し、９０°の角度を有する部分を形成した
事を特徴とするカンチレバー体。 In a cantilever body consisting of a cantilever and a cantilever support part used in an atomic force microscope, with respect to the crystal plane orientation direction of the cantilever,
The angle formed by the sides of the cantilever support part is formed to be larger than 90°, and a part of the side of the cantilever support part has a part having an angle of 90° with respect to the crystal plane orientation direction of the cantilever. Features a cantilever body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4836090U JPH047308U (en) | 1990-05-08 | 1990-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4836090U JPH047308U (en) | 1990-05-08 | 1990-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH047308U true JPH047308U (en) | 1992-01-23 |
Family
ID=31565097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4836090U Pending JPH047308U (en) | 1990-05-08 | 1990-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047308U (en) |
-
1990
- 1990-05-08 JP JP4836090U patent/JPH047308U/ja active Pending